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21. 发明申请

US20070024550A1 Drive method for MEMS devices 有权
标题翻译： MEMS器件的驱动方法
公开(公告)号：US20070024550A1
公开(公告)日：2007-02-01
申请号：US11511908
申请日：2006-08-28
申请人： Clarence Chui , Manish Kothari , Marc Mignard , Mithran Mathew , Jeffrey Sampsell
发明人： Clarence Chui , Manish Kothari , Marc Mignard , Mithran Mathew , Jeffrey Sampsell
IPC分类号： G09G3/34
CPC分类号： G09G3/3466 , G02B26/001 , G09G3/3618 , G09G2300/0473 , G09G2300/06 , G09G2310/0254 , G09G2310/0267 , G09G2310/0275 , G09G2310/0278 , G09G2310/06 , G09G2320/029 , G09G2330/021 , G09G2330/12
摘要： Embodiments of exemplary MEMS interferometric modulators are arranged at intersections of rows and columns of electrodes. In certain embodiments, the column electrode has a lower electrical resistance than the row electrode. A driving circuit applies a potential difference of a first polarity across electrodes during a first phase and then quickly transition to applying a bias voltage having a polarity opposite to the first polarity during a second phase. In certain embodiments, an absolute value of the difference between the voltages applied to the row electrode is less than an absolute value of the difference between the voltages applied to the column electrode during the first and second phases.
摘要翻译：示例性MEMS干涉式调制器的实施例布置在电极的行和列的交叉处。在某些实施例中，列电极具有比行电极更低的电阻。驱动电路在第一阶段期间在电极之间施加第一极性的电位差，然后在第二阶段期间快速转换到施加极性与第一极性相反的偏置电压。在某些实施例中，施加到行电极的电压之差的绝对值小于在第一和第二相期间施加到列电极的电压之差的绝对值。

22. 发明授权

US07164520B2 Packaging for an interferometric modulator 有权
标题翻译：用于干涉式调制器的包装
公开(公告)号：US07164520B2
公开(公告)日：2007-01-16
申请号：US10844819
申请日：2004-05-12
申请人： Lauren Fay Palmateer , Brian James Gally , William J. Cummings , Manish Kothari , Clarence Chui
发明人： Lauren Fay Palmateer , Brian James Gally , William J. Cummings , Manish Kothari , Clarence Chui
IPC分类号： G02F1/03
CPC分类号： G02B26/001
摘要： A package is made of a transparent substrate having an interferometric modulator and a back plate. A non-hermetic seal joins the back plate to the substrate to form a package, and a desiccant resides inside the package. A method of packaging an interferometric modulator includes providing a transparent substrate and manufacturing an interferometric modulator array on a backside of the substrate. A back plate is provided and a desiccant is applied to the back plate. The back plate is sealed to the backside of the substrate with a back seal in ambient conditions, thereby forming a package
摘要翻译：封装由具有干涉式调制器和背板的透明基板制成。非气密密封件将背板连接到基板以形成包装，并且干燥剂驻留在包装内。封装干涉式调制器的方法包括提供透明衬底并在衬底的背面制造干涉式调制器阵列。设置背板，并将干燥剂施加到背板上。背板在环境条件下用背密封件密封到基板的背面，从而形成封装

23. 发明授权

US07161094B2 Modifying the electro-mechanical behavior of devices 有权
标题翻译：修改设备的机电性能
公开(公告)号：US07161094B2
公开(公告)日：2007-01-09
申请号：US11436345
申请日：2006-05-18
申请人： Manish Kothari , Clarence Chui , Lauren Palmateer
发明人： Manish Kothari , Clarence Chui , Lauren Palmateer
IPC分类号： H01L23/18
CPC分类号： G02B26/001 , B81B7/0038
摘要： A MEMS device is packaged with a control material that is included in the package to affect an operation of a moveable element of the device. The control material may affect operational characteristics including actuation and release voltages and currents, mechanical affects including damping and stiffness, lifetime of the device, optical properties, thermal affects and corrosion. The control material may be inserted into the package as part of any of several structural components of the package or the MEMS device.
摘要翻译： MEMS装置与包含在包装中的控制材料一起被包装以影响装置的可移动元件的操作。控制材料可能影响操作特性，包括致动和释放电压和电流，机械影响包括阻尼和刚度，器件寿命，光学性能，热影响和腐蚀。控制材料可以作为封装或MEMS器件的几个结构部件中的任何一个插入到封装中。

24. 发明申请

US20060067648A1 MEMS switches with deforming membranes 有权
标题翻译：具有变形膜的MEMS开关
公开(公告)号：US20060067648A1
公开(公告)日：2006-03-30
申请号：US11198925
申请日：2005-08-05
申请人： Clarence Chui , Manish Kothari
发明人： Clarence Chui , Manish Kothari
IPC分类号： G02B6/00
CPC分类号： G02B26/001 , G02B26/0833 , G02B26/0841
摘要： MEMS switches are formed with membranes or layers that are deformable upon the application of a voltage. In some embodiments, the application of a voltage opens switch contacts.
摘要翻译： MEMS开关由在施加电压时可变形的膜或层形成。在一些实施例中，电压的施加打开开关触点。

25. 发明申请

US20060066932A1 Method of selective etching using etch stop layer 审中-公开
标题翻译：使用蚀刻停止层的选择性蚀刻方法
公开(公告)号：US20060066932A1
公开(公告)日：2006-03-30
申请号：US11090773
申请日：2005-03-25
申请人： Clarence Chui , Manish Kothari , Brian Gally , Ming-Hau Tung
发明人： Clarence Chui , Manish Kothari , Brian Gally , Ming-Hau Tung
IPC分类号： G02F1/03
CPC分类号： G02B26/001 , B81B2201/042 , B81C1/00793 , B81C1/00801 , B81C2201/014
摘要： The fabrication of a MEMS device such as an interferometric modulator is improved by employing an etch stop layer between a sacrificial layer and a mirror layer. The etch stop may reduce undesirable over-etching of the sacrificial layer and the mirror layer. The etch stop layer may also serve as a barrier layer, buffer layer, and/or template layer.
摘要翻译：通过在牺牲层和镜层之间采用蚀刻停止层来改善诸如干涉式调制器之类的MEMS器件的制造。蚀刻停止可减少对牺牲层和镜层的不希望的过蚀刻。蚀刻停止层也可以用作阻挡层，缓冲层和/或模板层。

26. 发明申请

US20060066601A1 System and method for providing a variable refresh rate of an interferometric modulator display 有权
标题翻译：用于提供干涉式调制器显示器的可变刷新率的系统和方法
公开(公告)号：US20060066601A1
公开(公告)日：2006-03-30
申请号：US11178036
申请日：2005-07-08
申请人： Manish Kothari , Clarence Chui , Gaurav Sethi , Jeffrey Sampsell
发明人： Manish Kothari , Clarence Chui , Gaurav Sethi , Jeffrey Sampsell
IPC分类号： G09G5/00
CPC分类号： G02B26/001 , G09G3/3466 , G09G5/395 , G09G2310/0275 , G09G2310/04
摘要： Embodiments includes methods and systems for updating display devices at a variable refresh rate. One embodiment includes a method of updating an image displayed on a display device. The method includes setting an indicator to a first state that indicates that image data has been received subsequent to a previous update of a display device and periodically updating at least a portion of the display device to display the image. The updating is deferred for at least one period when the indicator is in a state other than the first state. In another embodiment, updates of the display are substantially asynchronous and occur as the processor writes data to one or more shift registers. When a shift register is filled, for example, having received data for a row within the display, the data in the shift register is written to the display. Other embodiments include methods of manufacturing such devices.
摘要翻译：实施例包括用于以可变刷新速率更新显示设备的方法和系统。一个实施例包括更新在显示装置上显示的图像的方法。该方法包括将指示符设置为指示在先前更新显示设备之后已经接收到图像数据的第一状态，并周期性地更新显示设备的至少一部分以显示图像。当指示符处于除第一状态之外的状态时，延迟至少一个周期。在另一个实施例中，显示器的更新基本上是异步的，并且随着处理器将数据写入一个或多个移位寄存器而发生。当移位寄存器被填充时，例如，已经在显示器内接收到一行的数据，移位寄存器中的数据被写入显示器。其他实施例包括制造这种装置的方法。

27. 发明申请

US20060066559A1 Method and system for writing data to MEMS display elements 失效
标题翻译：将数据写入MEMS显示元件的方法和系统
公开(公告)号：US20060066559A1
公开(公告)日：2006-03-30
申请号：US11100762
申请日：2005-04-06
申请人： Clarence Chui , Manish Kothari
发明人： Clarence Chui , Manish Kothari
IPC分类号： G09G3/34
CPC分类号： G09G3/3466 , G09G2300/06 , G09G2310/0245 , G09G2310/0254
摘要： Charge balanced display data writing methods use write and hold cycles of opposite polarity during selected frame update periods. A release cycle may be provided to reduce the chance that a given display element wil become stuck in an actuated state.
摘要翻译：电荷平衡显示数据写入方式在选定的帧更新周期内使用相反极性的写和保持周期。可以提供释放循环以减少给定显示元件在致动状态下被卡住的机会。

28. 发明申请

US20050250235A1 Controlling electromechanical behavior of structures within a microelectromechanical systems device 有权
标题翻译：控制微机电系统设备内结构的机电行为
公开(公告)号：US20050250235A1
公开(公告)日：2005-11-10
申请号：US11090911
申请日：2005-03-25
申请人： Mark Miles , John Batey , Clarence Chui , Manish Kothari , Ming-Hau Tung
发明人： Mark Miles , John Batey , Clarence Chui , Manish Kothari , Ming-Hau Tung
IPC分类号： B81B3/00 , H01L21/00
CPC分类号： B81B3/0086 , B81C2201/0109 , B81C2201/014 , B81C2201/053 , G02B26/001
摘要： In one embodiment, the invention provides a method for fabricating a microelectromechanical systems device. The method comprises fabricating a first layer comprising a film having a characteristic electromechanical response, and a characteristic optical response, wherein the characteristic optical response is desirable and the characteristic electromechanical response is undesirable; and modifying the characteristic electromechanical response of the first layer by at least reducing charge build up thereon during activation of the microelectromechanical systems device.
摘要翻译：在一个实施例中，本发明提供一种用于制造微机电系统装置的方法。该方法包括制造包括具有特征机电响应的膜的第一层和特征光学响应，其中特征光学响应是期望的，并且特征机电响应是不期望的; 以及通过在所述微机电系统装置的启动期间至少减少其上的电荷积累来修改所述第一层的特征机电响应。

29. 发明申请

US20050122560A1 Area array modulation and lead reduction in interferometric modulators 有权
标题翻译：干涉式调制器的面阵阵列调制和引线减少
公开(公告)号：US20050122560A1
公开(公告)日：2005-06-09
申请号：US10731989
申请日：2003-12-09
申请人： Jeffrey Sampsell , Clarence Chui , Manish Kothari
发明人： Jeffrey Sampsell , Clarence Chui , Manish Kothari
IPC分类号： G09G3/20 , G09G3/34 , G02B26/00
CPC分类号： G09G3/3466 , G02B26/001 , G09G3/2074 , G09G3/2081 , G09G2300/06 , G09G2310/0267 , G09G2310/0297
摘要： A light modulator is arranged as an array of rows and columns of interferometric display elements. Each element is divided into sub-rows of sub-elements. Array connection lines transmit operating signals to the display elements, with one connection line corresponding to one row of display elements in the array. Sub-array connection lines electrically connect to each array connection line. Switches transmit the operating signals from each array connection line to the sub-rows to effect gray scale modulation.
摘要翻译：光调制器被布置为干涉式显示元件的行和列的阵列。每个元素被划分成子行子元素。阵列连接线将工作信号发送到显示元件，其中一条连接线对应于阵列中的一行显示元件。子阵列连接线电连接到每个阵列连接线。开关将来自每个阵列连接线的操作信号传输到子行以实现灰度调制。

30. 发明授权

US08878825B2 System and method for providing a variable refresh rate of an interferometric modulator display 有权
标题翻译：用于提供干涉式调制器显示器的可变刷新率的系统和方法
公开(公告)号：US08878825B2
公开(公告)日：2014-11-04
申请号：US11178036
申请日：2005-07-08
申请人： Manish Kothari , Clarence Chui , Gaurav Sethi , Jeffrey B. Sampsell
发明人： Manish Kothari , Clarence Chui , Gaurav Sethi , Jeffrey B. Sampsell
IPC分类号： G09G5/00 , G02B26/00 , G09G3/34 , G09G5/395
CPC分类号： G02B26/001 , G09G3/3466 , G09G5/395 , G09G2310/0275 , G09G2310/04
摘要： Embodiments includes methods and systems for updating display devices at a variable refresh rate. One embodiment includes a method of updating an image displayed on a display device. The method includes setting an indicator to a first state that indicates that image data has been received subsequent to a previous update of a display device and periodically updating at least a portion of the display device to display the image. The updating is deferred for at least one period when the indicator is in a state other than the first state. In another embodiment, updates of the display are substantially asynchronous and occur as the processor writes data to one or more shift registers. When a shift register is filled, for example, having received data for a row within the display, the data in the shift register is written to the display. Other embodiments include methods of manufacturing such devices.
摘要翻译：实施例包括用于以可变刷新速率更新显示设备的方法和系统。一个实施例包括更新在显示装置上显示的图像的方法。该方法包括将指示符设置为指示在先前更新显示设备之后已经接收到图像数据的第一状态，并周期性地更新显示设备的至少一部分以显示图像。当指示符处于除第一状态之外的状态时，延迟至少一个周期。在另一个实施例中，显示器的更新基本上是异步的，并且随着处理器将数据写入一个或多个移位寄存器而发生。当移位寄存器被填充时，例如，已经在显示器内接收到一行的数据，移位寄存器中的数据被写入显示器。其他实施例包括制造这种装置的方法。

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