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    • 25. 发明申请
    • PURGE GAS ASSEMBLY
    • 燃气总成
    • US20100139556A1
    • 2010-06-10
    • US12597589
    • 2008-04-23
    • Tsuyoshi KagamiOsamu IrinoNobuyuki KatoHarunori Ushikawa
    • Tsuyoshi KagamiOsamu IrinoNobuyuki KatoHarunori Ushikawa
    • B05C11/00
    • C23C16/4585C23C16/45519H01L21/68735
    • In a purge gas assembly provided: in an outer circumference portion of a substrate stage, with a shoulder portion offset downward below a substrate mounting surface on an upper end of the substrate stage; a purge ring enclosing a stepped circumferential surface between the substrate mounting surface and the shoulder portion; and an annular gas ejection passage for ejecting the purge gas, the gas ejecting passage being defined between the stepped circumferential surface and an inner circumferential surface of the purge ring, an arrangement is made such that the purge gas can be ejected uniformly from the gas ejection passage over the entire circumference thereof and that the deposition of a film on an upper surface of the purge ring can also be restricted, and further that the construction is simplified. The purge ring has formed therein an annular groove which recesses from a lower surface thereof upward.
    • 在吹扫气体组件中,其设置在衬底台的外周部分中,其肩部部分向下偏置在衬底台的上端上的衬底安装表面下方; 净化环,其包围所述基板安装表面和所述肩部之间的阶梯状周向表面; 以及用于喷射净化气体的环形气体喷射通道,气体喷射通道限定在台阶周向表面和净化环的内圆周表面之间,使排气能够均匀地从气体喷射 通过其整个圆周,并且还可以限制在清洗环的上表面上的膜的沉积,并且进一步简化了结构。 清洗环中形成有从其下表面向上凹进的环形槽。
    • 27. 发明授权
    • Method for forming tungsten nitride film
    • 形成氮化钨膜的方法
    • US07338900B2
    • 2008-03-04
    • US11140362
    • 2005-05-31
    • Eiichi MizunoNarishi GonoheMasamichi HaradaNobuyuki Kato
    • Eiichi MizunoNarishi GonoheMasamichi HaradaNobuyuki Kato
    • H01L21/44H01L21/31
    • H01L21/28568C23C16/34H01L21/28556
    • A method for forming a tungsten nitride film including a first material gas supply step of supplying a first material gas composed of a tungsten compound gas, a reduction step of supplying a reducing gas, a second material gas supply step of supplying a second material gas composed of a tungsten compound gas, and a nitridation step of supplying a nitriding gas. Since a step of depositing tungsten on a substrate 5, and a step of forming tungsten nitride are performed separately, by varying the flow rate of each gas, the pressure when each gas is supplied, and the supply time, or the number of times each step is performed and the order in which the steps are performed, the quantity of tungsten deposited and the quantity of tungsten nitride formed can be controlled easily.
    • 一种形成氮化钨膜的方法,包括:供给由钨化合物气体构成的第一原料气体的第一原料气体供给工序,供给还原气体的还原工序;第二原料气体供给工序, 的钨化合物气体,以及氮化步骤,供给氮化气体。 由于在基板5上沉积钨的步骤和形成氮化钨的步骤是通过改变每种气体的流量,每个气体的供给时的压力,供给时间或每个气体的次数, 执行步骤,并且可以容易地控制步骤的顺序,钨沉积的量和形成的氮化钨的量。
    • 29. 发明授权
    • Transfer fixing device, image bearing and conveying body, and image forming apparatus with plural gloss processing
    • 转印固定装置,图像承载和输送体以及具有多次光泽处理的成像装置
    • US06526250B1
    • 2003-02-25
    • US09650672
    • 2000-08-30
    • Satoshi UsuiKiyotaka IshikawaNobuyuki KatoKouichirou Shinohara
    • Satoshi UsuiKiyotaka IshikawaNobuyuki KatoKouichirou Shinohara
    • G03G1516
    • G03G15/161G03G15/2021G03G15/2064G03G15/6591G03G2215/00481G03G2215/00805G03G2215/0081G03G2215/0119G03G2215/1671
    • In this invention, even if a thick resin coated recording medium having large heat capacity is used, a high quality image with an excellent gloss feeling is obtained. A transfer fixing device is provided with a press conveying mechanism which includes at least one pair of pressing bodies for nipping and conveying an image bearing and conveying body and a recording medium, and contact-conveys the recording medium on the image bearing and conveying body in a region exceeding a nip region of the pair of pressing bodies, and a heat supply adjusting mechanism which includes a heating source for heating the recording medium contact-conveyed on the image bearing and conveying body by the press conveying mechanism from both obverse and reverse sides to melt an unfixed image and a thermoplastic resin layer, and makes adjustment to cause heat supplied to an image bearing surface side of the recording medium to be more than heat supplied to a non-image bearing surface side of the recording medium. Besides, transferring and fixing is performed by a heating and pressing mechanism after a preheating mechanism. Further, the image bearing and conveying body having plural different gloss surfaces is provided. Moreover, an image forming apparatus using these is also provided.
    • 在本发明中,即使使用具有大热容的厚树脂涂布的记录介质,也可获得具有优良光泽感的高品质图像。 传送固定​​装置设置有压力传送机构,其包括至少一对用于夹持和传送图像承载和传送体和记录介质的按压体,并将记录介质接触传送到图像承载和传送体上 超过所述一对按压体的压区的区域,以及供热调节机构,该供热调整机构包括:加热源,用于通过压力传送机构从正面和反面加热在图像承载体和输送体上接触输送的记录介质 熔化未固定的图像和热塑性树脂层,并进行调节,使得供给到记录介质的图像承载面侧的热量比提供给记录介质的非图像承载面侧的热量多。 此外,在预热机构之后,通过加热和加压机构进行转印和定影。 此外,提供具有多个不同光泽表面的图像承载和输送体。 此外,还提供了使用这些的图像形成装置。