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    • 24. 发明授权
    • Method of producing a multi-layer ceramic substrate
    • 多层陶瓷基板的制造方法
    • US06228196B1
    • 2001-05-08
    • US09316770
    • 1999-05-21
    • Sadaaki SakamotoHirofumi SunaharaMitsuyoshi Nishide
    • Sadaaki SakamotoHirofumi SunaharaMitsuyoshi Nishide
    • B32B3126
    • H05K1/186H01L21/4857H05K1/0306H05K1/16H05K3/4629H05K2201/10636Y02P70/611
    • The invention provides a method of producing a multi-layer ceramic substrate comprising a laminated member having a plurality of ceramic layers made of a ceramic insulating material and a wiring conductor, comprising the steps of: preparing a raw compact having the plurality of the laminated ceramic green sheets containing the ceramic insulating material and the wiring conductor; providing raw sheet type bases on the principal plane at both ends with respect to the lamination direction of the raw compact, the raw sheet type bases containing a ceramic not to be sintered at the baking temperature of the raw compact; baking the raw compact in the state interposed between the sheet type bases so as to obtain the laminated member; and eliminating the unsintered sheet type bases; wherein the heat expansion coefficient difference of the sheet type bases and the laminated member after baking is 2.5×10−6 degK−1 or more.
    • 本发明提供一种制造多层陶瓷基板的方法,该多层陶瓷基板包括具有由陶瓷绝缘材料和布线导体制成的多个陶瓷层的层叠构件,包括以下步骤:制备具有多个层叠陶瓷 包含陶瓷绝缘材料和布线导体的生片; 相对于原料的层叠方向在两端的主面上设置原料片型基材,在原料的烧成温度下含有不要烧结的陶瓷的原料片型基材; 在插入在片状基底之间的状态下烘烤原料,以获得层压构件; 消除未烧结的片状基材; 其特征在于,所述片状基材和所述层叠体的烘焙后的热膨胀系数差为2.5×10 -6 degK -1以上。