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    • 21. 发明授权
    • Inspecting method and apparatus for semiconductor integrated circuit
    • 半导体集成电路检测方法和装置
    • US6037793A
    • 2000-03-14
    • US15065
    • 1998-01-28
    • Toshio MiyazawaMasataka HattaMasahiko Akiyama
    • Toshio MiyazawaMasataka HattaMasahiko Akiyama
    • G01R31/26G01R31/28H01L21/66G01R1/02
    • G01R31/2851G01R31/2831G01R31/2874G01R31/287
    • According to the present invention, a main chuck, on which a wafer having a number of devices is held, is driven under the control of a computer, and the devices on the wafer are brought into electric contact with the probes arranged on the upper side of the main chuck. On the basis of outputs from the probes, a tester sequentially measures the electric characteristics of the devices. When a heat-generating type device is measured, the inspecting method and apparatus of the present invention execute the following steps step of predicting the temperature of the device under measurement on the basis of the amount of heat generated from the device under measurement, step of predicting the temperatures of the devices that surround the device under measurement, step of selecting next-measurement devices (which are suitable for next measurement in light of their temperatures) from among the devices the temperatures of which are predicted in step, and calculating the position coordinates of the next-measurement devices, and a step of repeating the steps with respect to each of the devices, adding the distance between the device under measurement and the next-measurement device to the already-calculated distance, and selecting the shortest measurement route along which all devices are measured.
    • 根据本发明,在计算机的控制下驱动其上保持有多个器件的晶片的主卡盘,并且将晶片上的器件与布置在上侧的探针电接触 的主卡盘。 根据探头的输出,测试仪依次测量设备的电气特性。 当测量发热型装置时,本发明的检查方法和装置执行以下步骤:根据测量装置产生的热量预测测量装置的温度,步骤 预测在测量装置周围的装置的温度,从步骤中预测其温度的装置中选择下一次测量装置(其适合于其温度的下次测量)的步骤,并计算位置 下一测量装置的坐标,以及重复相对于每个装置的步骤的步骤,将测量装置与下一测量装置之间的距离加到已经计算的距离上,并选择最短测量路线 测量所有设备。
    • 23. 发明授权
    • Motor magnetic-pole-position estimating apparatus
    • 电动机磁极位置估计装置
    • US08384323B2
    • 2013-02-26
    • US12968296
    • 2010-12-15
    • Masahiko Akiyama
    • Masahiko Akiyama
    • H02P21/00
    • H02P6/18H02P6/181H02P6/186H02P6/188H02P21/18H02P21/26H02P2203/01H02P2203/05
    • A motor magnetic-pole-position estimating apparatus includes a command voltage output device and a current detector. A model-current calculator is configured to calculate a model current corresponding to a voltage equation for a predetermined model of a motor based on a command voltage and an actual current. A current-difference calculator is configured to calculate a current difference between the model current and the actual current. Each of first and second magnetic-pole-position-difference calculators is configured to calculate a magnetic-pole-position difference between an actual magnetic-pole position of the motor and an estimated or designated magnetic-pole position based on the current difference depending on whether or not a rotation speed of the motor is lower than a predetermined value. A magnetic-pole-position calculation device is configured to calculate the magnetic-pole position of the motor based on the magnetic-pole-position difference calculated by the first or second magnetic-pole-position-difference calculator.
    • 电动机磁极位置估计装置包括指令电压输出装置和电流检测器。 模型电流计算器被配置为基于指令电压和实际电流来计算与电动机的预定模型的电压方程对应的模型电流。 电流差计算器被配置为计算模型电流和实际电流之间的电流差。 第一和第二磁极位置差计算器中的每一个被配置为基于当前的差异来计算电动机的实际磁极位置与估计或指定的磁极位置之间的磁极位置差 电动机的转速是否低于预定值。 磁极位置计算装置被配置为基于由第一或第二磁极位置差计算器计算的磁极位置差来计算电动机的磁极位置。