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21. 发明申请

US20100170346A1 SENSOR ELEMENT FOR CAPACITIVE DIFFERENTIAL-PRESSURE SENSING 有权
标题翻译：传感器元件用于电容式差压检测
公开(公告)号：US20100170346A1
公开(公告)日：2010-07-08
申请号：US12644331
申请日：2009-12-22
申请人： Bernhard Opitz , Christian Doering , Hans Artmann , Janpeter Wolff , Remigius Niekrawietz
发明人： Bernhard Opitz , Christian Doering , Hans Artmann , Janpeter Wolff , Remigius Niekrawietz
IPC分类号： G01L9/12
CPC分类号： G01L9/0072 , B81B3/0078 , B81B2201/0264 , G01L13/025
摘要： A sensor design, respectively a micromechanical sensor structure for capacitive relative-pressure measurement, that will allow very small pressure differentials to be reliably recorded at high absolute pressures even in harsh, particle-laden measuring environments. For that purpose, the micromechanical sensor element includes a deflectable diaphragm structure which is provided with at least one deflectable electrode, and a fixed support structure for at least one fixed counter-electrode which is located opposite the deflectable electrode. The diaphragm structure includes two mutually parallel configured diaphragms that are joined rigidly to one another via at least one connecting crosspiece, so that each application of force to one of the two diaphragms is directly transmitted to the respective other diaphragm. The first diaphragm is able to be pressurized by a first measuring pressure emanating from the front side of the sensor element, and the second diaphragm is able to be pressurized by a second measuring pressure emanating from the rear side of the sensor element. The fixed counter-electrode is located in the sealed volume between the two diaphragms of the diaphragm structure.
摘要翻译：传感器设计分别是用于电容式相对压力测量的微机械传感器结构，即使在苛刻的，充满颗粒的测量环境中，也能够将极小的压差可靠地记录在高绝对压力下。为此目的，微机械传感器元件包括可偏转的膜结构，其具有至少一个可偏转电极，以及用于至少一个与可偏转电极相对的固定对置电极的固定支撑结构。隔膜结构包括通过至少一个连接横档彼此刚性地连接的两个相互平行的构造的隔膜，使得对两个隔膜中的一个的每个施加的力直接传递到相应的另一个隔膜。第一隔膜能够通过从传感器元件的前侧发出的第一测量压力被加压，并且第二隔膜能够被从传感器元件的后侧发出的第二测量压力加压。固定对置电极位于隔膜结构的两个隔膜之间的密封体积中。

22. 发明授权

US07316161B2 Rotation rate sensor 有权
标题翻译：转速传感器
公开(公告)号：US07316161B2
公开(公告)日：2008-01-08
申请号：US10471832
申请日：2002-09-25
申请人： Rainer Willig , Jochen Franz , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Dieter Maurer , Christian Doering , Wolfram Bauer , Udo Bischof , Reinhard Neul , Johannes Classen , Christoph Lang , Jens Frey
发明人： Rainer Willig , Jochen Franz , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Dieter Maurer , Christian Doering , Wolfram Bauer , Udo Bischof , Reinhard Neul , Johannes Classen , Christoph Lang , Jens Frey
IPC分类号： G01C19/00
CPC分类号： G01C19/5747
摘要： A rotation rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated above a surface of a substrate; the Coriolis element being able to be induced to vibrate in parallel to a first axis (X); an excursion of the Coriolis element being detectable, based on a Coriolis force in a second axis (Y), which is provided to be essentially perpendicular to the first axis (X); the first and second axes (X, Y) being provided parallel to the surface of the substrate, wherein force-conveying means are provided, the means being provided to convey a dynamic force effect between the substrate and the Coriolis element.
摘要翻译：提出了具有基板和科里奥利元件的旋转速率传感器，科里奥利元件位于基板的表面之上; 所述科里奥利元件能够被诱导以平行于第一轴线（X）振动; 基于在第二轴线（Y）上的科里奥利力，基本上垂直于第一轴线（X）提供可检测的科里奥利元件的偏移; 所述第一和第二轴线（X，Y）平行于所述基板的表面设置，其中设置有力传递装置，所述装置被提供以在所述基板和所述科里奥利元件之间传递动态力效应。

23. 发明申请

US20060107738A1 Micromechanical rotational rate sensor 有权
标题翻译：微机电转速传感器
公开(公告)号：US20060107738A1
公开(公告)日：2006-05-25
申请号：US11328755
申请日：2006-01-09
申请人： Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
发明人： Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
IPC分类号： G01P15/08
CPC分类号： G01C19/5747
摘要： An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.
摘要翻译：本发明的示例性实施例创建了具有第一科里奥利质量元件和可位于衬底表面上的第二科里奥利质量元件的微机械转速传感器。微机电转速传感器的示例性实施例可以具有激活装置，第一科里奥利质量元件和第二科里奥利质量元件可以通过该激活装置具有沿第一轴线激活的振动。微机电转速传感器的示例性实施例可以具有检测装置，通过该检测装置，第一科里奥利质量元件和第二科里奥利元件的偏转能够沿着垂直于第一轴线的第二轴线被检测的相应的科里奥利力量。第一轴线和第二轴线可以平行于基板的表面延伸。检测装置可以具有第一检测质量装置和第二检测质量装置。当第一科里奥利质量元件，第二科里奥利质量元件，第一检测质量装置和第二检测质量装置的重心在静止时可以在共同的重心处重合。

24. 发明授权

US5647574A Multi-layer microvalve having integral closure, membrane and pressure compensating surface forming a middle layer 失效
标题翻译：具有整体闭合的多层微型阀，形成中间层的膜和压力补偿表面
公开(公告)号：US5647574A
公开(公告)日：1997-07-15
申请号：US360652
申请日：1994-12-16
申请人： Michael Mettner , Armin Schuelke , Christian Doering , Thomas Schittny
发明人： Michael Mettner , Armin Schuelke , Christian Doering , Thomas Schittny
IPC分类号： F16K31/02 , F15C5/00 , F16K31/06 , F16K99/00
CPC分类号： F16K99/0001 , F15C5/00 , F16K99/0005 , F16K99/0051 , F16K2099/0078 , F16K2099/008 , F16K2099/0096 , F16K99/0034 , H01F2007/068
摘要： The microvalve according to the invention is composed in a layered manner of at least one bottom part (11), one middle part (12) and one top part (13). The sealing ring (31) (closure member), the valve plate (29) (pressure-compensating surface) and the membrane (26) are integrated in the middle part (12), this integral component being manufactured by a plastic moulding process. The actuation of the valve takes place using an electrical operating apparatus, for example by an electrostatic drive, an electromagnetic or a piezoelectric drive. In particular in the case of the electrostatic drive, two electrodes (17, 22) are applied in a layered manner to the middle part (12) or the bottom part (11). The bottom part, middle part and top part are joined together and connected, for example bonded or welded, permanently to one another.
摘要翻译： PCT No.PCT / DE93 / 00493 Sec。 371日期1994年12月16日第 102（e）日期1994年12月16日PCT提交1993年6月8日PCT公布。出版物WO94 / 00696 日期1994年1月6日根据本发明的微型阀以分层方式组成至少一个底部部分（11），一个中间部分（12）和一个顶部部件（13）。密封环31（封闭构件），阀板29（压力补偿面）和膜26一体化在中间部分12中，该整体构件通过塑性模制工艺制造。阀的致动使用电动操作装置进行，例如通过静电驱动，电磁或压电驱动。特别是在静电驱动的情况下，将两个电极（17,22）分层地施加到中间部分（12）或底部部分（11）。底部，中间部分和顶部部分被连接在一起并且连接在一起，例如被连接或焊接在一起。

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