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21. 发明授权

US3997268A Device for determination of layer thickness, or alternatively, measurement of surface topography 失效
标题翻译：用于确定层厚度的装置，或替代地，测量表面形貌
公开(公告)号：US3997268A
公开(公告)日：1976-12-14
申请号：US570914
申请日：1975-04-23
申请人： Gerdt Fladda , Lennart Eriksson
发明人： Gerdt Fladda , Lennart Eriksson
IPC分类号： G01B11/06
CPC分类号： G01B11/0616
摘要： A device for determining by means of light the average thickness of a layer, permeable to said light, arranged on a surface having properties different from those of the layer with respect to the light used, and also adapted to be used to provide a measure of the topography of a surface substantially opaque to the light used, includes an opaque shield that bears substantially perpendicularly with one edge against the layer when thickness is being determined or against the surface when surface topography is being measured. At least one light indicator shielded from direct incident light is arranged on the side of the shield opposite to the side on which the light source is located. The light indicator responds to the emitted luminous flux which it receives indirectly from the light source, which in a thickness determination is transferred to the indicator past the lower edge of the shield via the permeable layer, or in the measuring of surface topography passes through openings formed between the irregular surface being measured and the planar edge of the shield engaging that surface. The signal from the light indicator due to the transferred luminous flux is arranged, optionally after further evaluation, to indicate the layer thickness or surface topography.
摘要翻译：一种用于通过光确定可透过所述光的层的平均厚度的装置，其布置在具有与所使用的光的层不同的性质的表面上，并且还适于用于提供对于所使用的光，基本上不透明的表面的形貌包括不透明屏蔽，当在测量表面形貌时，当确定厚度时或者抵抗表面时，不透明屏蔽件基本上垂直于一个边缘抵靠该层。屏蔽与直接入射光隔离的至少一个光指示器布置在与光源所在一侧相对的屏蔽侧。光指示器对从光源间接接收的发出的光通量进行响应，该光束在厚度确定通过可渗透层传递到指示器的下边缘，或者在表面形貌的测量中通过开口形成在被测量的不规则表面和与该表面接合的屏蔽件的平面边缘之间。可选地，在进一步评估之后，由于转移的光通量而来自光指示器的信号被布置以指示层厚度或表面形貌。

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