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    • 23. 发明申请
    • METHOD FOR MANUFACTURING EJECTION ELEMENT SUBSTRATE
    • 制造喷射元件基板的方法
    • US20120111828A1
    • 2012-05-10
    • US13281714
    • 2011-10-26
    • Souta TakeuchiHirokazu KomuroSadayoshi Sakuma
    • Souta TakeuchiHirokazu KomuroSadayoshi Sakuma
    • G01D15/18
    • B41J2/1628B41J2/1603B41J2/1629B41J2/1631B41J2/1634B41J2/1639B41J2/1642B41J2/1643B41J2/1645B41J2002/14403
    • Provided is a method for manufacturing an ejection element substrate which is provided with a flow-channel-forming member having an ejection orifice for ejecting a liquid and a liquid flow channel that is communicated with the ejection orifice, and a substrate having a supply port for supplying the liquid to the liquid flow channel, and further a filter structure formed in the bottom of the supply port, including: forming the supply port by forming a through-hole by etching the substrate from a second face of the substrate on the side opposite to a first face of the substrate, on which the flow-channel-forming member is disposed; providing a resinous protection film on the side face and the bottom of the supply port; and forming a minute opening in the resinous protection film in the bottom of the supply port by carrying out a laser processing from the side of the second face.
    • 本发明提供一种喷射元件基板的制造方法,该喷射元件基板具有流路形成部件,该流路形成部件具有用于喷射液体的喷射孔和与该喷射孔连通的液体流路,以及具有供给口 将液体供给到液体流动通道,以及形成在供给口底部的过滤器结构,其特征在于,包括:通过从相对侧的基板的第二面上从基板的第二面蚀刻基板形成通孔而形成供给口 到所述基板的第一面,所述流路形成构件设置在所述基板的第一面上; 在供给口的侧面和底部设置树脂保护膜; 通过从第二面侧进行激光加工,在供给口的底部的树脂保护膜上形成微小的开口。
    • 29. 发明申请
    • LIQUID JET HEAD CHIP AND MANUFACTURING METHOD THEREFOR
    • 液体喷嘴及其制造方法
    • US20080143791A1
    • 2008-06-19
    • US11955772
    • 2007-12-13
    • Hirokazu Komuro
    • Hirokazu Komuro
    • B41J2/05H01L21/00
    • B41J2/14072B41J2/1603B41J2/1623B41J2/1628B41J2/1631B41J2/1632B41J2/1635B41J2/1643B41J2/1646B41J2202/18
    • A liquid ejection head includes a substrate including, at a surface thereof, an ejection energy generating means for generating ejection energy for ejecting liquid, a flow path forming member provided with an ejection outlet, the substrate further including a liquid supply opening, penetrating therethrough, for supplying the liquid to be ejected by the ejection energy to a flow path of the flow path forming member; a reinforcing member connected to a back side of the substrate; a first penetrating electrode, penetrating the substrate from a front side to the back side thereof, for supplying electric power to the ejection energy generating means; and a second penetrating electrode penetrating the reinforcing member from a front side to a back side thereof, the second penetrating electrode being electrically connected to the first penetrating electrode.
    • 液体喷射头包括:基板,其表面包括用于产生用于喷射液体的喷射能量的喷射能量产生装置,设置有喷射出口的流路形成部件,所述基板还包括穿过其的液体供应开口, 用于将通过喷射能量喷射的液体供给到流路形成部件的流路; 连接到所述基板的背面的加强构件; 第一穿透电极,其从前侧到后侧穿透基板,用于向喷射能量产生装置提供电力; 以及从前侧到后侧贯穿加强件的第二穿透电极,所述第二穿透电极与所述第一穿透电极电连接。