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    • 27. 发明授权
    • Method of manufacturing a semiconductor device and method of forming a film
    • 制造半导体器件的方法和形成膜的方法
    • US06841489B2
    • 2005-01-11
    • US10364379
    • 2003-02-12
    • Shigeyoshi UmemiyaKenji Maruyama
    • Shigeyoshi UmemiyaKenji Maruyama
    • C23C16/455C23C16/54H01L21/205H01L21/31
    • C23C16/54
    • A semiconductor device manufacturing method includes the steps of (a) introducing a first substrate into a first CVD chamber; (b) raising the first substrate temperature to a predetermined value; (c) growing a film on the first substrate by supplying vapor phase material in a material line to the first chamber; (d) introducing a second substrate into a second CVD chamber; (e) raising the second substrate temperature to the predetermined value; and (f) growing a film on the second substrate by supplying the vapor phase material to the second chamber. Steps (c) and (f) supply the vapor phase material selectively to the first and second chambers, respectively. In step (f) after step (c), the chamber to which the vapor phase material is supplied is switched from the first chamber to the second chamber so that the pressure of the vapor phase material in the material line is kept substantially constant.
    • 半导体器件制造方法包括以下步骤:(a)将第一衬底引入第一CVD室; (b)将第一衬底温度升高到预定值; (c)通过将材料线中的气相材料供应到第一室,在第一基板上生长膜; (d)将第二衬底引入第二CVD室; (e)将所述第二基板温度升高到所述预定值; 和(f)通过将气相材料供应到第二室而在第二基板上生长膜。 步骤(c)和(f)分别将气相材料选择性地供应到第一和第二室。 在步骤(f)之后的步骤(f)中,将供应气相材料的室从第一室切换到第二室,使得材料管线中气相材料的压力基本上保持不变。
    • 28. 发明授权
    • Ink jet recording method and apparatus, ink and ink cartridge
    • 喷墨记录方法和装置,墨水和墨盒
    • US6084610A
    • 2000-07-04
    • US585196
    • 1996-01-11
    • Mitsuo OzakiShigeharu SuzukiShino SakaiKeita AkenoShigeyoshi UmemiyaMasahiro MoriTakefumi InagakiHiroo Ueda
    • Mitsuo OzakiShigeharu SuzukiShino SakaiKeita AkenoShigeyoshi UmemiyaMasahiro MoriTakefumi InagakiHiroo Ueda
    • B41J2/175B41J2/21
    • B41J2/2107
    • An ink jet recording method records an image on a recording medium by adhering inks of a plurality of hues on the recording medium. The ink jet recording method includes the steps of (a) carrying out a recording using two kinds of inks having different diffusibilities with respect to the recording medium for at least a predetermined one of the hues, where a first ink out of the two kinds of inks has a diffusibility which is lower than a diffusibility of an ink having a hue other than the predetermined hue, and (b) at a boundary portion on the recording medium where a first recording region which includes the predetermined hue and a second recording region which includes a hue different from the predetermined hue are adjacent to each other, recording at least a portion of the boundary region with a predetermined recording width up to the second recording region using a second ink out of the two kinds of inks having a diffusibility higher than that of the first ink and recording a remaining portion of the boundary region using the second ink.
    • 喷墨记录方法通过将多种色调的油墨粘附到记录介质上将图像记录在记录介质上。 喷墨记录方法包括以下步骤:(a)使用对于至少一个预定的色调的记录介质具有不同扩散性的两种油墨进行记录,其中两种 油墨具有低于具有除了预定色调之外的色调的油墨的扩散性的扩散性,和(b)在记录介质上的包含预定色调的第一记录区域和第二记录区域的边界部分, 包括与预定色调不同的色调彼此相邻的情况下,使用扩散率高于2的两种油墨中的第二种墨水,将具有预定记录宽度的至少一部分边界区域记录到第二记录区域 使用第二墨水记录第一墨水的边界区域的剩余部分。
    • 29. 发明授权
    • Method of and apparatus for cleaning ink jet head
    • 清洁喷墨头的方法和设备
    • US5784081A
    • 1998-07-21
    • US409094
    • 1995-03-23
    • Mitsuo OzakiShigeharu SuzukiShino SakaiKeita AkenoShigeyoshi UmemiyaYasuo Yamagishi
    • Mitsuo OzakiShigeharu SuzukiShino SakaiKeita AkenoShigeyoshi UmemiyaYasuo Yamagishi
    • B41J2/165B41J2/18B41J2/185
    • B41J2/16523
    • Disclosed are a method of and an apparatus for cleaning a plurality of nozzles of an ink jet head. This cleaning method comprises a step of covering a nozzle surface formed with the plurality of nozzles with a cap; a step of depressurizing an air space formed between the nozzle surface and the cap by use of a depressurizing element to suck the inks from the nozzles; a step of stopping the depressurization by the depressurizing element; a step of keeping the nozzle surface covered with the cap so that the inks jetted from the nozzles due to the depressurization wet-spread over the entire nozzle surface by a capillary force; and a step of retracting the cap from the nozzle surface. Further, in this cleaning apparatus, a contact angle .theta.1 between the ink and the cap internal surface and a contact angle .theta.2 between the ink and the nozzle surface are set to 90.degree. or smaller and also set such that .theta.2 is not greater than .theta.1.
    • 公开了一种用于清洁喷墨头的多个喷嘴的方法和设备。 该清洁方法包括用盖覆盖形成有多个喷嘴的喷嘴表面的步骤; 通过使用减压元件对喷嘴表面和盖子之间形成的空气空间进行减压以从喷嘴吸取墨水的步骤; 通过减压元件停止减压的步骤; 保持喷嘴表面被盖盖住的步骤,使得由于减压而从喷嘴喷射的油墨通过毛细管力在整个喷嘴表面上湿扩散; 以及从喷嘴表面缩回盖的步骤。 此外,在该清洁装置中,墨和盖内表面之间的接触角θ1和墨与喷嘴表面之间的接触角θ2设定为90度或更小,并且还设定为θ2不大 比θ1。