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    • 21. 发明申请
    • STRUCTURE OF METAL E-FUSE
    • 金属电子熔断器的结构
    • US20120126363A1
    • 2012-05-24
    • US12952317
    • 2010-11-23
    • Ping-Chuan WangChunyan E. TianRonald FilippiWai-ki Li
    • Ping-Chuan WangChunyan E. TianRonald FilippiWai-ki Li
    • H01L23/525
    • H01L23/5256H01L2924/0002H01L2924/00
    • Structures of electronic fuses (e-fuse) are provided. An un-programmed e-fuse includes a via of a first conductive material having a bottom and sidewalls with a portion of the sidewalls being covered by a conductive liner and the bottom of the via being formed on top of a dielectric layer, and a first and a second conductive path of a second conductive material formed on top of the dielectric layer with the first and second conductive paths being conductively connected through, and only through, the via at the sidewalls. A programmed e-fuse includes a via; a first conductive path at a first side of the via and being separated from sidewalls of the via by a void; and a second conductive path at a second different side of the via and being in conductive contact with the via through sidewalls of the via.
    • 提供电子保险丝(e-fuse)的结构。 未编程的电子熔断器包括具有底部和侧壁的第一导电材料的通孔,侧壁的一部分被导电衬垫覆盖,并且通孔的底部形成在电介质层的顶部上,并且第一 以及形成在电介质层顶部上的第二导电材料的第二导电路径,其中第一和第二导电路径通过侧壁导通地连接,并且仅通过通孔。 编程的电子熔丝包括通孔; 在通孔的第一侧处的第一导电路径,并且通过空隙与通路的侧壁分离; 以及在所述通孔的第二不同侧的第二导电路径,并且与通孔通过所述通孔的侧壁导电接触。
    • 24. 发明授权
    • Structure of metal e-fuse
    • 金属电熔丝的结构
    • US08299567B2
    • 2012-10-30
    • US12952317
    • 2010-11-23
    • Ping-Chuan WangChunyan E TianRonald FilippiWai-kin Li
    • Ping-Chuan WangChunyan E TianRonald FilippiWai-kin Li
    • H01L29/00
    • H01L23/5256H01L2924/0002H01L2924/00
    • Structures of electronic fuses (e-fuse) are provided. An un-programmed e-fuse includes a via of a first conductive material having a bottom and sidewalls with a portion of the sidewalls being covered by a conductive liner and the bottom of the via being formed on top of a dielectric layer, and a first and a second conductive path of a second conductive material formed on top of the dielectric layer with the first and second conductive paths being conductively connected through, and only through, the via at the sidewalls. A programmed e-fuse includes a via; a first conductive path at a first side of the via and being separated from sidewalls of the via by a void; and a second conductive path at a second different side of the via and being in conductive contact with the via through sidewalls of the via.
    • 提供电子保险丝(e-fuse)的结构。 未编程的电子熔断器包括具有底部和侧壁的第一导电材料的通孔,侧壁的一部分被导电衬垫覆盖,并且通孔的底部形成在电介质层的顶部上,并且第一 以及形成在电介质层顶部上的第二导电材料的第二导电路径,其中第一和第二导电路径通过侧壁导通地连接,并且仅通过通孔。 编程的电子熔丝包括通孔; 在通孔的第一侧处的第一导电路径,并且通过空隙与通路的侧壁分离; 以及在所述通孔的第二不同侧的第二导电路径,并且与通孔通过所述通孔的侧壁导电接触。