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21. 发明申请

US20090151871A1 SYSTEMS FOR DETECTING UNCONFINED-PLASMA EVENTS 有权
标题翻译：用于检测不确定等离子体事件的系统
公开(公告)号：US20090151871A1
公开(公告)日：2009-06-18
申请号：US12101804
申请日：2008-04-11
申请人： John Pease , Seved Jafar Jafarian-Tchrani
发明人： John Pease , Seved Jafar Jafarian-Tchrani
IPC分类号： C23F1/00
CPC分类号： C23F4/00 , H01J37/32935 , H05H1/0081
摘要： A system for detecting unconfined-plasma events in a plasma processing chamber is disclosed. The system may include a sensor disposed in the plasma processing chamber for providing a current when unconfined plasma is present in the plasma processing chamber. The system may also include a converter for converting the current into a voltage and a filter for removing noise from the voltage to provide a first signal. The system may also include a detector for determining presence of the unconfined plasma using an amplified level of the first signal and/or the first signal. The system may also include a conductor for coupling the sensor and the converter to conduct the current from the sensor to the converter. The system may also include a shield for enclosing at least a portion of the conductor to at least reduce electromagnetic noise received by the conductor.
摘要翻译：公开了一种用于检测等离子体处理室中的无约束等离子体事件的系统。该系统可以包括设置在等离子体处理室中的传感器，用于当等离子体处理室中存在无约束等离子体时提供电流。该系统还可以包括用于将电流转换成电压的转换器和用于从电压去除噪声以提供第一信号的滤波器。该系统还可以包括用于使用第一信号和/或第一信号的放大电平来确定无约束等离子体的存在的检测器。该系统还可以包括用于耦合传感器和转换器以将电流从传感器传导到转换器的导体。该系统还可以包括用于封闭导体的至少一部分以至少降低由导体接收的电磁噪声的屏蔽。

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