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21. 发明申请

US20050212627A1 Permalloy loaded transmission lines for high-speed interconnect applications 有权
标题翻译：坡莫合金加载传输线用于高速互连应用
公开(公告)号：US20050212627A1
公开(公告)日：2005-09-29
申请号：US11018924
申请日：2004-12-22
申请人： Pingshan Wang , Edwin Kan
发明人： Pingshan Wang , Edwin Kan
IPC分类号： H01P3/08
CPC分类号： H01P3/08
摘要： To facilitate high frequency operation, transmission lines for high-speed interconnect applications in CMOS technologies are loaded with patterned permalloy or other ferromagnetic material films. Patterning the permalloy films as a plurality of segments results in control of the domain structures in the permalloy segments such that ferromagnetic resonance (FMR) effects are eliminated and eddy-current effects are reduced, thereby allowing operation of the transmission lines at frequencies of 20 GHz or higher. In addition, the patterned permalloy reduces the magnetic field coupling between two adjacent transmission lines. A novel ferromagnetic thin film characterization method is also employed to measure the microwave permeability of the patterned permalloy films and verify their high frequency operational characteristics.
摘要翻译：为了便于高频操作，CMOS技术中用于高速互连应用的传输线被加载有图案化的坡莫合金或其它铁磁材料膜。将坡莫合金膜图案化为多个段导致对坡莫合金段中的畴结构的控制，使得铁磁共振（FMR）效应被消除并且涡流效应被降低，从而允许在20GHz的频率下运行传输线或更高。此外，图案化的坡莫合金减少了两个相邻传输线之间的磁场耦合。还采用新型的铁磁薄膜表征方法来测量图案化坡莫合金薄膜的微波渗透性，并验证其高频操作特性。

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