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    • 25. 发明申请
    • Polishing compound, its production process and polishing method
    • 抛光料,其生产工艺和抛光方法
    • US20050194565A1
    • 2005-09-08
    • US11088788
    • 2005-03-25
    • Hiroyuki KamiyaKatsuyuki Tsugita
    • Hiroyuki KamiyaKatsuyuki Tsugita
    • C09G1/02C09K3/14C09K13/00C09K13/06H01L21/321
    • C09G1/02C09K3/1463H01L21/3212
    • A polishing compound for chemical mechanical polishing of a substrate, which comprises (A) abrasive grains, (B) an aqueous medium, (C) tartaric acid, (D) trishydroxymethylaminomethane and (E) at least one member selected from the group consisting of malonic acid and maleic acid, and more preferably, which further contains a compound having a function to form a protective film on the wiring metal surface to prevent dishing at the wiring metal portion, such as benzotriazole. By use of this polishing compound, the copper wirings on the surface of a semiconductor integrated circuit board can be polished at a high removal rate while suppressing formation of scars as defects in a polishing step. Particularly in a first polishing step of polishing copper wirings having a film made of tantalum or a tantalum compound as a barrier film, excellent selectivity will be obtained, dishing and erosion due to polishing are less likely to occur, and an extremely high precision flat surface of a semiconductor integrated circuit board can be obtained.
    • 一种用于基材的化学机械抛光的抛光剂,其包含(A)磨粒,(B)水性介质,(C)酒石酸,(D)三羟甲基氨基甲烷和(E)至少一种选自 丙二酸和马来酸,更优选还含有具有在布线金属表面上形成保护膜的功能的化合物,以防止布线金属部分如苯并三唑的凹陷。 通过使用该研磨用化合物,半导体集成电路基板的表面的铜布线能够以高的去除率进行抛光,同时抑制疤痕的形成,作为研磨工序的缺陷。 特别是在具有由钽或钽化合物制成的膜作为阻挡膜的铜布线的研磨的第一研磨步骤中,可以获得极好的选择性,因此不太可能发生由于抛光引起的凹陷和侵蚀,并且极高的精密平面 可以获得半导体集成电路板。
    • 26. 发明授权
    • Steering wheel
    • 方向盘
    • US06626062B1
    • 2003-09-30
    • US09635773
    • 2000-08-11
    • Kazumiki YoshitakeHirofumi OtsukaHiroyuki Kamiya
    • Kazumiki YoshitakeHirofumi OtsukaHiroyuki Kamiya
    • G05G110
    • B60Q1/0082B60K37/06B62D1/04Y10T74/20834
    • Operation switches 9 are mounted on a steering wheel for operating control apparatuses installed in an automotive vehicle. A supporting body 8 is provided which is disposed inwardly of a wheel rim 2 and substantially concentrically with the wheel rim 2 and having a cross-section partially constituted by an arc 15. The operation switches 9 are disposed on the supporting body 8 and are capable of moving in a circumferential direction of the supporting body 8. By using the operation switches 9 capable of moving in the circumferential direction of the supporting body 8, the direction in which the switches move becomes radial relative to the steering wheel, whereby a number of operation switches can be disposed on the steering wheel in a collective fashion. The direction in which a single switch is operated becomes two ways, and therefore two control functions for a control apparatus can be controlled with a single switch, thus making it possible to make an individual switch multifunctional.
    • 操作开关9安装在用于操作安装在机动车辆中的控制装置的方向盘上。 设置有支撑体8,其设置在轮缘2的内侧并且与轮缘2基本上同心地并且具有部分地由弧15构成的横截面。操作开关9设置在支撑体8上并且能够 通过使用能够在支撑体8的周向上移动的操作开关9,开关移动的方向相对于方向盘成径向的方式,由此可以将多个 操作开关可以以集体方式设置在方向盘上。 单个开关的操作方向为两种方式,因此可以通过单个开关来控制控制装置的两个控制功能,从而使单个开关成为可能。
    • 27. 发明授权
    • Survey method
    • 调查方法
    • US07284037B2
    • 2007-10-16
    • US10309107
    • 2002-12-04
    • Hiroyuki KamiyaYoshimi Washida
    • Hiroyuki KamiyaYoshimi Washida
    • G06F15/16G06F17/30G06F17/10
    • G06Q30/02
    • Provided is a generation and implementation system for the survey program, in which multi-faceted questions are easily generated as a survey program and distributed to portable terminals, a survey can be performed in a non-communicating state, and survey results of the survey program can be amassed at a management server without fail. A question preparation server receives an input of a question, configures an answer format for the question, generates a survey program configured to send the answers to a management server when a predetermined number of answers are inputted, and distributes the survey program to a portable terminal of a surveyor. At the time of survey, the question is displayed on the display unit of the portable terminal, an answer to the question is received via an input of the portable terminal and stored in a memory unit of the portable terminal, and a group of questions stored in the memory of unit is sent to the management server via a communication unit of the portable terminal. The management server has received the answer date analyzes the answer data, performs statistic processing, and generates visible survey report information.
    • 提供了一个调查方案的生成和实施系统,其中多方面的问题容易地作为调查方案生成并分发给便携式终端,可以在非沟通状态下进行调查,并且调查方案的调查结果 可以在管理服务器上积累,而不会失败。 问题准备服务器接收问题的输入,配置问题的答案格式,生成调查程序,配置为在输入预定数量的答案时将答案发送给管理服务器,并将调查程序分发到便携式终端 的测量师 在调查时,该问题显示在便携式终端的显示单元上,通过便携式终端的输入接收该问题的答案并将其存储在便携式终端的存储单元中,存储一组问题 在单元的存储器中通过便携式终端的通信单元发送到管理服务器。 管理服务器已收到答复日期,分析答案数据,执行统计处理,并生成可见的调查报告信息。