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    • 26. 发明授权
    • Magnetic field detecting element and method for manufacturing the same
    • 磁场检测元件及其制造方法
    • US07041526B2
    • 2006-05-09
    • US10784479
    • 2004-02-23
    • Dong-sik ShimKyung-won NaSang-on ChoiHae-seok ParkJun-sik Hwang
    • Dong-sik ShimKyung-won NaSang-on ChoiHae-seok ParkJun-sik Hwang
    • G01R33/02H01L21/00
    • G01R33/02G01R33/04G01R33/05H01F17/0006H01F41/046
    • A method for manufacturing a magnetic field detecting element having a soft magnetic core formed on a substrate, first and second coils, each having coil lines, arranged above and below the core, the method including forming a seed film on the substrate, removing a portion of the seed film using a predetermined pattern so that coil lines constituting the first coil subsequently formed on the seed film are separated, forming a first plating mold having grooves corresponding to the predetermined pattern on an upper portion of the seed film, forming coil lines constituting the first coil by filling the grooves of the first plating mold with metal, forming the soft magnetic core and the second coil on an upper portion of the substrate and on the seed film where the first coil is formed, and cutting off edges of the substrate so that the separated coil lines are insulated.
    • 一种用于制造具有形成在基板上的软磁芯的磁场检测元件的方法,所述方法包括在所述基板上方和下方形成具有线圈的第一和第二线圈,所述方法包括在所述基板上形成种子膜, 的种子薄膜,使得构成在种子薄膜上随后形成的第一线圈的线圈线分离,在种子薄膜的上部形成具有对应于预定图案的槽的第一电镀模,形成线圈线, 第一线圈通过用金属填充第一电镀模具的凹槽,在基板的上部和形成第一线圈的种子膜上形成软磁芯和第二线圈,并切断基板的边缘 使分离的线圈线绝缘。