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21. 发明授权

US5771098A Laser interferometric lithographic system providing automatic change of fringe spacing 失效
公开(公告)号：US5771098A
公开(公告)日：1998-06-23
申请号：US721460
申请日：1996-09-27
申请人： Amalkumar P. Ghosh , Susan K. Schwartz Jones , Gary W. Jones , Steven M. Zimmerman , Yachin Liu
发明人： Amalkumar P. Ghosh , Susan K. Schwartz Jones , Gary W. Jones , Steven M. Zimmerman , Yachin Liu
IPC分类号： G01B9/02 , G03F7/00 , G03F7/20
CPC分类号： G03F7/70408 , G03F7/001
摘要： An interferometric lithographic apparatus includes an arrangement for applying interfering laser beams to a part for producing a first interference pattern. The first interference pattern has a first fringe spacing. A mobile part holder stage is repositioned to change the interference pattern and produce a second fringe spacing. A control arrangement, automatically responsive to the repositioning of the part holder, re-aligns optical paths and optimally interferes the laser beams to produce the second fringe spacing.

22. 发明授权

US06608283B2 Apparatus and method for solder-sealing an active matrix organic light emitting diode 有权
标题翻译：用于焊接密封有源矩阵有机发光二极管的装置和方法
公开(公告)号：US06608283B2
公开(公告)日：2003-08-19
申请号：US09778797
申请日：2001-02-08
申请人： Yachin Liu , Amalkumar P. Ghosh , Steven M. Zimmerman , Christian M. Heller
发明人： Yachin Liu , Amalkumar P. Ghosh , Steven M. Zimmerman , Christian M. Heller
IPC分类号： B23K2600
CPC分类号： B23K26/324 , B23K26/32 , B23K2103/16 , B23K2103/172 , B23K2103/30 , H01L51/5246
摘要： The present invention is directed to an apparatus and method of solder-sealing an active matrix OLED display using a monochromatic solid-state laser beam (1). The solder-sealing apparatus comprises a cover assembly (13) adapted to be positioned over at least one OLED (11) on a substrate (10), a sealing band (12) surrounding each OLED, a chuck assembly (20) with an array of heat sinks (21) that align with the OLEDs, a pick-up assembly (30) with at least one aperture (33), and a flange assembly (132) to which a solder pre-form (133) is secured. The chuck assembly (20) receives, aligns and orients the substrate (10). A vacuum is then applied through each aperture (33) to align and hold the cover assembly (13) in place. The sealing band (12) and solder pre-form (133) are aligned and pressed together by the pick-up assembly (30), and the focused laser beam (1) is projected through the chuck assembly to seal the OLEDs (11) within the cover assembly (13).
摘要翻译：本发明涉及使用单色固态激光束（1）焊接密封有源矩阵OLED显示器的装置和方法。焊接密封装置包括适于定位在衬底（10）上的至少一个OLED（11）上的盖组件（13），围绕每个OLED的密封带（12），具有阵列的卡盘组件（20）与OLED对准的散热器（21），具有至少一个孔（33）的拾取组件（30）和固定有焊料预成型件（133）的凸缘组件（132）。卡盘组件（20）接收，对准和定向衬底（10）。然后通过每个孔（33）施加真空以将盖组件（13）对准并保持就位。密封带（12）和焊料预成型件（133）由拾取组件（30）对齐并压在一起，并且聚焦的激光束（1）通过卡盘组件突出以密封OLED（11）在盖组件（13）内。

23. 发明授权

US5857481A Tire inflation system and process 失效
标题翻译：轮胎通货膨胀系统和过程
公开(公告)号：US5857481A
公开(公告)日：1999-01-12
申请号：US632797
申请日：1996-04-17
申请人： Lewis Zimmerman , Steven M. Zimmerman
发明人： Lewis Zimmerman , Steven M. Zimmerman
IPC分类号： B60S5/04 , B60C29/06
CPC分类号： B60S5/043 , Y10T137/3662 , Y10T137/3724
摘要： Tire inflation system and process, especially intended for truck or heavy equipment tires. A tire inflation system of this invention comprises, in the order named, a tubular air-inlet member adapted to be connected to an air pressure source and having an on-off valve therein; a pressure regulator which is setable to a desired outlet pressure; swivel fitting; a two-step disconnect coupler having a manual actuator which, on a first actuation, releases pressure downstream of a coupler and, on a second actuation, releases an air hose which is releasably connected to the coupler on the downstream thereof; and an air hose releasably connected to the coupler and having at its outlet end a clip-on chuck for connection to an air valve of a tire to be inflated. The preferred coupler is a push-button coupler. Air flow through the system may be initiated by opening the on-off valve. When desired air pressure in the tire has been reached or when a user of the system desires to stop inflation of a tire as, for example, when a user senses an unsafe condition which may lead to blow out, the user actuates the manual actuator of the coupler once to stop air flow (if not already stopped) and to vent downstream air pressure. The user then actuates the manual actuator a second time to disconnect the air hose from the coupler. The system is safe and easy to use and meets or exceeds all current OSHA requirements.
摘要翻译：轮胎充气系统和过程，特别适用于卡车或重型设备轮胎。本发明的轮胎充气系统按照命名的方式包括适于连接到空气压力源并且在其中具有开关阀的管状空气入口构件; 压力调节器，其可设定为期望的出口压力; 旋转接头; 两级断开联接器具有手动致动器，该手动致动器在第一致动时释放耦合器下游的压力，并且在第二致动时释放在其下游可释放地连接到耦合器的空气软管; 以及可释放地连接到联接器并且在其出口端具有用于连接到待充气的轮胎的空气阀的夹式卡盘的空气软管。优选的耦合器是按钮耦合器。可以通过打开开关阀来启动通过系统的气流。当期望达到轮胎中的空气压力时，或者当系统的使用者希望阻止轮胎的充气时，例如当用户感测到可能导致吹出的不安全状态时，用户致动手动致动器联结器一旦停止气流（如果还没有停止）并排出下游空气压力。然后用户再次致动手动执行器，以将空气软管与联接器断开连接。该系统安全易用，符合或超过所有当前的OSHA要求。

24. 发明授权

US5397957A Process and structure of an integrated vacuum microelectronic device 失效
标题翻译：集成真空微电子器件的工艺和结构
公开(公告)号：US5397957A
公开(公告)日：1995-03-14
申请号：US974392
申请日：1992-11-10
申请人： Steven M. Zimmerman
发明人： Steven M. Zimmerman
IPC分类号： H01J9/02 , H01J21/10 , H01J19/24
CPC分类号： H01J21/105 , H01J9/025 , H01J2201/30457
摘要： The present invention relates generally to a new integrated Vacuum Microelectronic Device (VMD) and a method for making the same. Vacuum Microelectronic Devices require several unique three dimensional structures: a sharp field emission tip, accurate alignment of the tip inside a control grid structure in a vacuum environment, and an anode to collect electrons emitted by the tip. Also disclosed is a new structure and a process for forming diodes, triodes, tetrodes, pentodes and other similar structures. The final structure made can also be connected to other similar VMD devices or to other electronic devices.
摘要翻译：本发明一般涉及一种新的集成真空微电子器件（VMD）及其制造方法。真空微电子器件需要几种独特的三维结构：尖锐的场发射尖端，尖端在真空环境中的控制栅格结构内的精确对准以及用于收集尖端发射的电子的阳极。还公开了形成二极管，三极管，四极管，五极管和其他类似结构的新结构和工艺。所制造的最终结构也可以连接到其他类似的VMD设备或其他电子设备。

25. 发明授权

US4259430A Photoresist O-quinone diazide containing composition and resist mask formation process 失效
标题翻译：含光抗蚀剂的O-醌二叠氮化物组合物和抗蚀剂掩模形成工艺
公开(公告)号：US4259430A
公开(公告)日：1981-03-31
申请号：US699927
申请日：1976-06-25
申请人： Leon H. Kaplan , Steven M. Zimmerman
发明人： Leon H. Kaplan , Steven M. Zimmerman
IPC分类号： G03F7/022 , G03C1/54 , G03C5/00
CPC分类号： G03F7/0226
摘要： A resist composition includes an alkali soluble resin, a light sensitive diazo compound, and a thermally activated free radical initiator. Resist masks are formed from the above composition by providing a layer of resist on a substrate, exposing the layer patternwise to radiation, removing portions of the layer with a developing solution, and heating the remaining portions of the layer at a temperature which activates the initiator and cross-links the resist to improve the physical characteristics of the resist layer and minimize pattern distortion.
摘要翻译：抗蚀剂组合物包括碱溶性树脂，光敏重氮化合物和热活化的自由基引发剂。通过在基板上设置抗蚀剂层，将图案模式暴露于辐射，用显影液去除层的部分，并在激活引发剂的温度下加热层的剩余部分，从上述组合物形成抗蚀剂掩模并且交联抗蚀剂以改善抗蚀剂层的物理特性并使图案失真最小化。

26. 发明授权

US5603649A Structure and method of making field emission displays 失效
标题翻译：制作场发射显示器的结构和方法
公开(公告)号：US5603649A
公开(公告)日：1997-02-18
申请号：US448956
申请日：1995-05-24
申请人： Steven M. Zimmerman
发明人： Steven M. Zimmerman
IPC分类号： H01J9/02 , H01J1/30 , H01J9/18 , H01J9/227
CPC分类号： H01J9/025
摘要： A FED device is manufactured as a self-aligned structure that allows the FED device to be fabricated in any desired size. The FED device has a transparent face plate with a thin film phosphor layer deposited thereon. A conductive anode layer is deposited on the phosphor layer. This anode layer has apertures allowing electron impingement on the phosphor layer. One or more insulator layers serving as a spacer are deposited on the anode layer. A conductive extraction grid layer is deposited upon the insulator layers. The conductive extraction grid layer, the spacer insulator layers and said anode layer are then etched to form an array of vacuum space holes extending to said phosphor layer. A conformal layer of a material that can be selectively etched is then deposited over the structure. The conformal layer fills and forms cusps over the vacuum space holes. An electron emitter layer is deposited over the conformal layer and is molded in the form of an array of sharply pointed structures separated from the extraction grid. An emitter insulator layer is deposited on the emitter layer and in contact with it. The emitter layer and said emitter insulator are etched to form access holes communicating with the vacuum space holes. The conformal layer is then selectively etched through these access holes to again open the vacuum space holes between the cathode emitter and the phosphor layer. An envelope is sealed to the face plate enclosing the emitter layer, extraction grid layer and said phosphor layer in a vacuum.
摘要翻译： FED装置被制造为自对准结构，其允许以任何期望的尺寸制造FED装置。 FED装置具有透明面板，其上沉积有薄膜荧光体层。导电阳极层沉积在荧光体层上。该阳极层具有允许电子撞击在荧光体层上的孔。用作间隔物的一个或多个绝缘体层沉积在阳极层上。导电提取栅格层沉积在绝缘体层上。然后蚀刻导电提取栅格层，间隔绝缘体层和所述阳极层，以形成延伸到所述荧光体层的真空空间孔的阵列。然后将可选择性蚀刻的材料的共形层沉积在该结构上。保形层填充并在真空空间孔上形成尖角。电子发射体层沉积在保形层上，并以与提取栅格分离的尖锐结构阵列的形式模制。发射极绝缘体层沉积在发射极层上并与其接触。蚀刻发射极层和发射极绝缘体，形成与真空空间孔连通的通路孔。然后通过这些入孔选择性地蚀刻共形层，以再次打开阴极发射体和荧光体层之间的真空空间孔。封套封装在封装发射极层的面板，真空中的提取栅格层和所述荧光体层。

27. 发明授权

US5334908A Structures and processes for fabricating field emission cathode tips using secondary cusp 失效
标题翻译：使用二次尖点制造场致发射阴极尖端的结构和工艺
公开(公告)号：US5334908A
公开(公告)日：1994-08-02
申请号：US996369
申请日：1992-12-23
申请人： Steven M. Zimmerman
发明人： Steven M. Zimmerman
IPC分类号： H01J9/02 , H01J1/16
CPC分类号： H01J9/022
摘要： The present invention relates generally to new structures for a field emission cathode and processes for fabricating the same. The field emission is made of any material that is capable of emitting electrons under the influence of an electrical potential. The field emission cathode has several unique three dimensional structures. The basic structure comprises of a layer of material with cathode tips. For a more complex structure the cathode tip is preferably accurately aligned inside an extraction/control electrode structure, in preferably a vacuum environment. The structures of this invention can be fabricated to be connected to other similar field emission cathodes or to other electronic devices.
摘要翻译：本发明一般涉及用于场致发射阴极的新结构及其制造方法。场发射由能够在电势影响下发射电子的任何材料制成。场发射阴极具有几种独特的三维结构。基本结构包括具有阴极尖端的材料层。对于更复杂的结构，阴极尖端优选地在提取/控制电极结构内，优选在真空环境中精确地对准。本发明的结构可以制造成连接到其它类似的场致发射阴极或其他电子器件。

28. 发明授权

US5141459A Structures and processes for fabricating field emission cathodes 失效
标题翻译：用于制造场发射阴极的结构和工艺
公开(公告)号：US5141459A
公开(公告)日：1992-08-25
申请号：US839971
申请日：1992-02-21
申请人： Steven M. Zimmerman
发明人： Steven M. Zimmerman
IPC分类号： H01J9/02
CPC分类号： H01J9/022
摘要： The present invention relates generally to new structures for a field emission cathode and processes for fabricating the same. The field emission is made of any material that is capable of emitting electrons under the influence of an electrical potential. The field emission cathode has several unique three dimensional structures. The basic structure comprises of a layer of material with cathode tips. For a more complex structure the cathode tip is preferably accurately aligned inside an extraction/control electrode structure, in preferably a vacuum environment. The structures of this invention can be fabricated to be connected to other similar field emission cathodes or to other electronic devices.
摘要翻译：本发明一般涉及用于场致发射阴极的新结构及其制造方法。场发射由能够在电势影响下发射电子的任何材料制成。场发射阴极具有几种独特的三维结构。基本结构包括具有阴极尖端的材料层。对于更复杂的结构，阴极尖端优选地在提取/控制电极结构内，优选在真空环境中精确地对准。本发明的结构可以制造成连接到其它类似的场致发射阴极或其他电子器件。

29. 发明授权

US06265820B1 Heat removal system for use in organic light emitting diode displays having high brightness 有权
标题翻译：用于具有高亮度的有机发光二极管显示器的散热系统
公开(公告)号：US06265820B1
公开(公告)日：2001-07-24
申请号：US09238070
申请日：1999-01-27
申请人： Amalkumar P. Ghosh , Walter V. Johnstone , Olivier F. Prache , Steven M. Zimmerman
发明人： Amalkumar P. Ghosh , Walter V. Johnstone , Olivier F. Prache , Steven M. Zimmerman
IPC分类号： H01J162
CPC分类号： H01L51/529
摘要： A heat removal system for use in an organic light emitting diode displays is disclosed. The heat removal assembly includes a heat dissipating assembly for dissipating heat from the organic light emitting device, a heat transfer assembly for transferring heat from the top organic light emitting device to the heat dissipating assembly and a cooling assembly for cooling the organic light emitting display device.
摘要翻译：公开了一种用于有机发光二极管显示器的散热系统。除热组件包括用于从有机发光器件散发热量的散热组件，用于将热量从顶部有机发光器件传递到散热组件的传热组件和用于冷却有机发光显示器件的冷却组件。

30. 发明授权

US4414314A Resolution in optical lithography 失效
标题翻译：光刻中的分辨率
公开(公告)号：US4414314A
公开(公告)日：1983-11-08
申请号：US352929
申请日：1982-02-26
申请人： Leon H. Kaplan , Richard D. Kaplan , Steven M. Zimmerman
发明人： Leon H. Kaplan , Richard D. Kaplan , Steven M. Zimmerman
IPC分类号： G03F7/26 , G03F7/039 , G03F7/09 , G03F7/105 , G03F7/11 , H01L21/027 , G03C5/00
CPC分类号： G03F7/091
摘要： Improved resolution in optical lithography, as used in the very large scale integration of electronic circuits, is obtained by employing a thin film of 4-phenylazo-1-naphthylamine between silicon substrate and overlying layer of light sensitive photoresist. The 4-phenylazo-1-naphthylamine acts as a stable, highly light absorbent medium exhibiting chemical and physical compatibility with the silicon substrate and photoresists with ether-type solvent systems.
摘要翻译：通过在硅衬底和光敏光刻胶的上层之间使用4-苯基偶氮-1-萘胺的薄膜，可以获得在电子电路的大规模集成中使用的光学光刻中的改进的分辨率。 4-苯基偶氮-1-萘胺作为稳定的高度光吸收介质，其表现出与硅衬底和具有醚型溶剂体系的光致抗蚀剂的化学和物理相容性。

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