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21. 发明申请

US20060278831A1 Infrared inspection apparatus, infrared inspecting method and manufacturing method of semiconductor wafer 审中-公开
标题翻译：红外线检测装置，半导体晶片的红外检查方法及制造方法
公开(公告)号：US20060278831A1
公开(公告)日：2006-12-14
申请号：US11447997
申请日：2006-06-07
申请人： Norihisa Matsumoto , Shigeru Matsuno
发明人： Norihisa Matsumoto , Shigeru Matsuno
IPC分类号： G01N21/59
CPC分类号： G01N21/9501 , G01N21/59 , G01N21/9505
摘要： An infrared inspection apparatus includes: an infrared light source operable to irradiate an inspection object with infrared rays; an infrared lens operable to collect infrared rays which have passed through the inspection object; an infrared camera operable to receive the infrared rays collected by the infrared lens and to convert the infrared rays received into an electric signal to be output; a monitor operable to receive the electric signal from the infrared camera and to convert the electric signal into an image signal and to display an image based on the image signal; and an infrared ray leakage preventing member in at least one of a light path between the infrared light source and a periphery of the inspection object and a light path between the periphery of the inspection object and the infrared lens to prevent infrared rays from the infrared light source from reaching the infrared lens without passing through the inspection object.
摘要翻译：红外检查装置包括：红外光源，其可操作以用红外线照射检查对象; 红外透镜，其可操作以收集已经通过检查对象的红外线; 红外摄像机，其可操作以接收由红外线透镜收集的红外线，并将接收到的红外线转换成要输出的电信号; 监视器，其可操作以从所述红外摄像机接收电信号，并将所述电信号转换为图像信号并基于所述图像信号显示图像; 以及在所述红外线光源与所述检查对象周围的光路中的至少一个中的红外线泄漏防止部件以及所述被检查物体的周围与所述红外线透镜之间的光路，以防止来自所述红外线的红外线来源到达红外透镜而不通过检查对象。

22. 发明授权

US06882760B2 Polarization dispersion compensating apparatus 有权
标题翻译：极化色散补偿装置
公开(公告)号：US06882760B2
公开(公告)日：2005-04-19
申请号：US10362760
申请日：2001-06-29
申请人： Masakazu Takabayashi , Sadayuki Matsumoto , Takuya Ohira , Kiichi Yoshiara , Junichiro Hoshizaki , Hajime Takeya , Shigeru Matsuno
发明人： Masakazu Takabayashi , Sadayuki Matsumoto , Takuya Ohira , Kiichi Yoshiara , Junichiro Hoshizaki , Hajime Takeya , Shigeru Matsuno
IPC分类号： G02F1/01 , G02F1/03 , G02F1/225 , H04B10/2507 , G02B6/12 , H04B10/18
CPC分类号： H04B10/2572 , G02F1/0136 , G02F1/0147 , G02F1/0305 , G02F1/0316 , G02F1/225
摘要： A polarization dispersion compensation apparatus includes a polarization controller, a polarization beam splitter, an optical delay circuit, and a polarization beam combiner. The polarization controller controls polarization of an optical signal so that the polarization axis of the input optical signal substantially coincides with the optical axis of an optical transmission line, and the polarization beam splitter section splits the optical signal into two polarized components perpendicular to each other. The optical delay circuit section causes a difference in delay between the two polarized components, and the polarization beam combiner section combines the two polarized components output from the optical delay circuit section. Each of the polarization beam splitter section and the polarization beam combiner section includes a symmetric Mach-Zehnder interferometer having optical transmission lines in two arms, each arm including a temperature control and a birefringence portion for compensating polarization dispersion between the two polarized components.
摘要翻译：偏振色散补偿装置包括偏振控制器，偏振分束器，光延迟电路和偏振束组合器。偏振控制器控制光信号的偏振，使得输入光信号的偏振轴基本上与光传输线的光轴重合，并且偏振分束器部分将光信号分离成彼此垂直的两个偏振分量。光延迟电路部分导致两个极化分量之间的延迟差异，并且偏振束组合器部分组合从光延迟电路部分输出的两个偏振分量。偏振分束器部分和偏振束组合器部分中的每一个包括具有两个臂中的光传输线的对称马赫 - 曾德干涉仪，每个臂包括用于补偿两个偏振分量之间的偏振分散的温度控制和双折射部分。

23. 发明授权

US06807322B2 PMD compensating apparatus for controlling polarization controller based on detection of magnitude of waveform distortion 失效
标题翻译： PMD补偿装置，用于根据波形失真的大小的检测来控制偏振控制器
公开(公告)号：US06807322B2
公开(公告)日：2004-10-19
申请号：US10367994
申请日：2003-02-19
申请人： Masakazu Takabayashi , Sadayuki Matsumoto , Kiichi Yoshiara , Takuya Ohira , Junichiro Hoshizaki , Shigeru Matsuno , Ryosuke Namiki , Minoru Hashimoto
发明人： Masakazu Takabayashi , Sadayuki Matsumoto , Kiichi Yoshiara , Takuya Ohira , Junichiro Hoshizaki , Shigeru Matsuno , Ryosuke Namiki , Minoru Hashimoto
IPC分类号： G02B600
CPC分类号： G02B6/278 , G02B6/022 , G02B6/02204 , G02B6/2932 , G02B6/4246 , H04B10/2569
摘要： In a polarization mode dispersion compensating apparatus for controlling polarization mode dispersion of an optical signal, a first optical monitor detects and outputs, based on an optical signal outputted from a first optical transmission line having a grating, a first detection signal indicating magnitude of waveform distortion of the first optical transmission line, and a second optical monitor detects and outputs, based on an optical signal output from a second optical transmission line having a grating, a second detection signal indicating magnitude of waveform distortion of the second optical transmission line. A calculator circuit calculates from the first and second detection signals an output signal. A controller controls a polarization controller based on the output signal from the calculator circuit.
摘要翻译：在用于控制光信号的偏振模色散的偏振模色散补偿装置中，第一光监视器基于从具有光栅的第一光传输线输出的光信号检测并输出表示波形失真大小的第一检测信号并且第二光学监视器基于从具有光栅的第二光传输线输出的光信号检测并输出表示第二光传输线的波形失真的大小的第二检测信号。计算器电路根据第一和第二检测信号计算输出信号。控制器基于来自计算器电路的输出信号控制偏振控制器。

24. 发明授权

US06643430B2 Temperature control system for a grating 有权
标题翻译：光栅温度控制系统
公开(公告)号：US06643430B2
公开(公告)日：2003-11-04
申请号：US09891334
申请日：2001-06-27
申请人： Sadayuki Matsumoto , Takuya Ohira , Masakazu Takabayashi , Kiichi Yoshiara , Shigeru Matsuno , Hajime Takeya , Junichiro Hoshizaki
发明人： Sadayuki Matsumoto , Takuya Ohira , Masakazu Takabayashi , Kiichi Yoshiara , Shigeru Matsuno , Hajime Takeya , Junichiro Hoshizaki
IPC分类号： G02B634
CPC分类号： G02B6/02204 , G02B6/02085 , G02B6/29394
摘要： A temperature control device for controlling temperature variable devices disposed near a grating of a variable dispersion equalizer including an optical waveguide having the grating. The temperature variable devices control temperatures independently of each other. The temperature control device includes a controller for controlling the temperature variable units, and a storage device which stores temperature control patterns including combinations of control signals for the respective temperature variable units. The controller controls the temperature variable devices with a control signal of at least one of the temperature control patterns selected from the storage device.
摘要翻译：一种温度控制装置，用于控制设置在包括具有该光栅的光波导的可变色散均衡器附近的温度可变装置。温度可变装置相互独立地控制温度。温度控制装置包括用于控制温度可变单元的控制器，以及存储包括各个温度可变单元的控制信号的组合的温度控制模式的存储装置。控制器使用从存储装置中选择的至少一个温度控制模式的控制信号来控制温度可变装置。

25. 发明申请

US20090212026A1 WIRE ELECTRIC DISCHARGE MACHINING METHOD, SEMICONDUCTOR WAFER MANUFACTURING METHOD, AND SOLAR BATTERY CELL MANUFACTURING METHOD 有权
标题翻译：电线放电加工方法，半导体制造方法和太阳能电池组件制造方法
公开(公告)号：US20090212026A1
公开(公告)日：2009-08-27
申请号：US12093836
申请日：2005-11-16
申请人： Tatsushi Sato , Yoshihito Imai , Teiji Takahashi , Takeshi Sakata , Tomoko Sendai , Yoichiro Nishimoto , Shigeru Matsuno , Takeyuki Maegawa , Takaaki Iwata
发明人： Tatsushi Sato , Yoshihito Imai , Teiji Takahashi , Takeshi Sakata , Tomoko Sendai , Yoichiro Nishimoto , Shigeru Matsuno , Takeyuki Maegawa , Takaaki Iwata
IPC分类号： B23H1/00
CPC分类号： B23H7/02 , B23H9/00
摘要： Provided are a wire electric discharge machining method for poorly conductive materials, such as solar cell silicon, and a semiconductor wafer manufacturing method and a solar battery cell manufacturing method based on the wire electric discharge machining method. Electrical discharge machining of a high volume resistivity, hard and brittle materials, having a volume resistivity that is equal to or higher than 0.5 Ω·cm and equal to or lower than 5 Ω·cm is performed by applying a pulse voltage having a pulse width that is equal to or higher than 1 μsec and equal to or lower than 4 μsec and having a peak current at the time of machining a wire electrode that is equal to or higher than 10A and equal to or lower than 50A to a wire electrode and generating a discharge pulse between the wire electrode and a subject to be machined.
摘要翻译：本发明提供一种导电材料的导电放电加工方法，例如太阳能电池硅，半导体晶片的制造方法以及基于该放电加工方法的太阳能电池单元的制造方法。通过施加具有脉冲宽度的脉冲电压来执行体积电阻率等于或高于0.5Ω·cm且等于或小于5Ω·cm的高体积电阻率，硬脆性材料的放电加工等于或高于1个音箱并且等于或低于4个音箱，并且在对线电极进行等于或高于10A且等于或小于50A的线电极加工时具有峰值电流，以及在线电极和待加工对象之间产生放电脉冲。

26. 发明申请

US20080029027A1 Plasma Cvd Device 审中-公开
标题翻译：等离子Cvd设备
公开(公告)号：US20080029027A1
公开(公告)日：2008-02-07
申请号：US11577008
申请日：2005-10-07
申请人： Teruhiko Kumada , Naoki Yasuda , Hideharu Nobutoki , Norihisa Matsumoto , Shigeru Matsuno
发明人： Teruhiko Kumada , Naoki Yasuda , Hideharu Nobutoki , Norihisa Matsumoto , Shigeru Matsuno
IPC分类号： C23C16/00
CPC分类号： C23C16/38 , H01L21/318 , H01L21/76801
摘要： The present invention provides a plasma CVD device including means for supplying a compound with borazine skeleton, a plasma generator for generating a plasma, and means for applying a negative charge to an electrode for placing a substrate. According to the present invention, it is possible to provide a plasma CVD device which stably provides a low dielectric constant and a high mechanical strength over a long period of time, reducing the amount of a gas component (outgas) emitted in heating the film, and causing no trouble in a device manufacturing process.
摘要翻译：本发明提供了一种等离子体CVD装置，其包括用于提供化合物与硼嗪骨架的装置，用于产生等离子体的等离子体发生器，以及用于将负电荷施加到用于放置基板的电极的装置。根据本发明，可以提供一种能够长时间稳定地提供低介电常数和高机械强度的等离子体CVD装置，减少在加热膜时排出的气体成分（废气）的量，并且在设备制造过程中没有麻烦。

27. 发明授权

US06810179B2 Variable dispersion compensator 失效
标题翻译：可变色散补偿器
公开(公告)号：US06810179B2
公开(公告)日：2004-10-26
申请号：US10305157
申请日：2002-11-27
申请人： Takuya Ohira , Sadayuki Matsumoto , Kiichi Yoshiara , Masakazu Takabayashi , Junichiro Hoshizaki , Shigeru Matsuno , Ryosuke Namiki , Takashi Hashimoto
发明人： Takuya Ohira , Sadayuki Matsumoto , Kiichi Yoshiara , Masakazu Takabayashi , Junichiro Hoshizaki , Shigeru Matsuno , Ryosuke Namiki , Takashi Hashimoto
IPC分类号： G02B634
CPC分类号： G02B6/278 , G02B6/2932 , G02B6/29394 , G02B6/29395 , G02B6/29398
摘要： A variable dispersion compensator includes an optical waveguide, a temperature controller. The optical waveguide has a chirped grating having a Bragg wavelength changing along the longitudinal direction of the grating. A temperature distribution T1(x) is applied to a central portion of the grating, defined as a region where a distance x from an end of the grating is a range of 20 % to 80 % of total length of the grating. Temperature distribution T2(x) and T3(x) are applied to end portions of the grating, defined as two regions extending from respective ends of the grating to the central region, respectively. At least one of T2(x) and T3(x) has a distance dependence different from that of the T1(x).
摘要翻译：可变色散补偿器包括光波导，温度控制器。光波导具有沿着光栅的纵向方向改变的布拉格波长的啁啾光栅。将温度分布T1（x）施加到光栅的中心部分，其被定义为距离光栅末端的距离x为光栅总长度的20％至80％的范围的区域。温度分布T2（x）和T3（x）被施加到光栅的端部，其被定义为分别从光栅的两端延伸到中心区域的两个区域。 T2（x）和T3（x）中的至少一个具有与T1（x）不同的距离依赖性。

28. 发明授权

US06690860B2 Method of manufacturing grating 失效
标题翻译：制造光栅的方法
公开(公告)号：US06690860B2
公开(公告)日：2004-02-10
申请号：US09891319
申请日：2001-06-27
申请人： Sadayuki Matsumoto , Takuya Ohira , Masakazu Takabayashi , Kiichi Yoshiara , Shigeru Matsuno , Hajime Takeya , Junichiro Hoshizaki
发明人： Sadayuki Matsumoto , Takuya Ohira , Masakazu Takabayashi , Kiichi Yoshiara , Shigeru Matsuno , Hajime Takeya , Junichiro Hoshizaki
IPC分类号： G02B634
CPC分类号： G02B6/02152 , G02B6/02142
摘要： A method of manufacturing a grating in an optical waveguide that includes a core and a cladding covering the core. The method includes scanning a laser beam along an optical axis of the optical waveguide to modulate the refractive index of the core. The core is made of a material having a refractive index that is changeable upon irradiation by radiation. In addition, in scanning the core, the irradiation range of the laser beam is controlled and the core is scanned several times. Therefore, a predetermined distribution of irradiation is obtained in a direction of the optical axis of the grating.
摘要翻译：一种在光波导中制造光栅的方法，该光波导包括芯和覆盖芯的包层。该方法包括沿着光波导的光轴扫描激光束以调制芯的折射率。芯由具有在辐射照射时可变化的折射率的材料制成。此外，在扫描芯时，控制激光束的照射范围，并将核心扫描多次。因此，在光栅的光轴的方向上获得预定的照射分布。

29. 发明授权

US06470144B1 Vaporizer for chemical vapor deposition apparatus, chemical vapor deposition apparatus, and semiconductor device manufactured thereby 失效
标题翻译：用于化学气相沉积设备的蒸发器，化学气相沉积设备和由此制造的半导体器件
公开(公告)号：US06470144B1
公开(公告)日：2002-10-22
申请号：US09444556
申请日：1999-11-19
申请人： Masayoshi Tarutani , Tsuyoshi Horikawa , Takaaki Kawahara , Mikio Yamamuka , Shigeru Matsuno , Takehiko Sato
发明人： Masayoshi Tarutani , Tsuyoshi Horikawa , Takaaki Kawahara , Mikio Yamamuka , Shigeru Matsuno , Takehiko Sato
IPC分类号： C23C1600
CPC分类号： C23C16/4486
摘要： There are provided a vaporizer for use with a CVD apparatus and a CVD apparatus, capable of long-term, reliable and efficient production of CVD film with good properties, and a semiconductor device manufactured employing the same. The vaporizer for use with a CVD apparatus is comprised of a material introducing tube, a vaporization chamber and a cooling member. The material introducing tube transports a mixture containing a solution of a material for the CVD film and a gas carrying the solution. The vaporization chamber is connected to the material introducing tube to vaporize the material introduced through the material introducing tube. The cooling member cools that portion of the material introducing tube adjacent to the vaporization chamber.
摘要翻译：本发明提供一种能够长期，可靠，高效地生产具有良好性能的CVD膜的CVD设备和CVD设备使用的蒸发器，以及使用该蒸发器制造的半导体器件。用于CVD装置的蒸发器由材料导入管，蒸发室和冷却构件组成。材料导入管输送含有用于CVD膜的材料的溶液和携带溶液的气体的混合物。蒸发室连接到材料导入管，以蒸发通过材料导入管引入的材料。冷却部件冷却与蒸发室相邻的材料导入管的那部分。

30. 发明授权

US4756693A Apparatus to spread a sample of seat top material 失效
标题翻译：传播座椅材料样品的装置
公开(公告)号：US4756693A
公开(公告)日：1988-07-12
申请号：US948018
申请日：1986-12-31
申请人： Shigeru Matsuno
发明人： Shigeru Matsuno
IPC分类号： A47C31/02 , A47C31/12 , A47F7/16 , G09F5/04 , G09F5/00
CPC分类号： A47C31/126 , A47C31/02 , A47F7/16
摘要： A display device for upholstery material and the like including a central section and an arched surface of an upwardly inclined inner surface and downwardly inclined outer surface joined by a curved section on each side of the central section. A channel is formed at the intersection of the arched surface and the central section and channels are formed across the length and width of the central section. The material is draped over the central section and the arched surface and depressed into one or more of the channels to hold the material and to correspond to the various parts of an article on which the material is to be used.
摘要翻译：一种用于装饰材料等的显示装置，包括中央部分和向上倾斜的内表面的拱形表面，并且在中心部分的每一侧上由弯曲部分连接的向下倾斜的外表面。在拱形表面和中心部分的交点处形成通道，并且在中心部分的长度和宽度上形成通道。材料被悬挂在中心部分和拱形表面上并且被压入一个或多个通道中以保持材料并且对应于待使用材料的制品的各个部分。

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