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21. 发明授权

US07413924B2 Plasma etch process for defining catalyst pads on nanoemissive displays 失效
标题翻译：用于在纳米显示器上定义催化剂垫的等离子体蚀刻工艺
公开(公告)号：US07413924B2
公开(公告)日：2008-08-19
申请号：US11263793
申请日：2005-10-31
申请人： Donald F. Weston , William J. Dauksher , Emmett M. Howard
发明人： Donald F. Weston , William J. Dauksher , Emmett M. Howard
IPC分类号： H01L51/40
CPC分类号： H01J9/025 , B82Y10/00 , B82Y30/00 , B82Y40/00 , C01B32/162 , H01J2201/30469 , Y10S977/742
摘要： A process for forming a catalyst layer for carbon nanotube growth comprising forming a catalyst layer having a first and second portion over one of a cathode metal layer or a ballast resistor layer; patterning a photoresist over the first portion; etching the second portion with a chlorine/argon plasma; removing the photoresist with an ash process; and removing the veils and preparing the surface for carbon nanotube growth with a semi-aqueous hydroxylamine solution.
摘要翻译：一种用于形成用于碳纳米管生长的催化剂层的方法，包括在阴极金属层或镇流电阻层之一上形成具有第一和第二部分的催化剂层; 在第一部分上图案化光致抗蚀剂; 用氯/氩等离子体蚀刻第二部分; 用灰过程去除光致抗蚀剂; 并用半水羟胺溶液除去面纱并制备用于碳纳米管生长的表面。

22. 发明授权

US07125796B2 Plasma etch process for multilayer vias having an organic layer with vertical sidewalls 失效
标题翻译：用于具有垂直侧壁的有机层的多层通孔的等离子体蚀刻工艺
公开(公告)号：US07125796B2
公开(公告)日：2006-10-24
申请号：US11000832
申请日：2004-11-30
申请人： Donald F. Weston , William J. Dauksher , Ngoc V. Le
发明人： Donald F. Weston , William J. Dauksher , Ngoc V. Le
IPC分类号： H01L21/4763 , H01L21/461
CPC分类号： H01L21/76802 , H01L21/76838 , H01L23/5226 , H01L2924/0002 , H01L2924/00
摘要： A process is provided for fabricating a via 52 between bonded wafers without undercutting an organic bonding material 32. The process for forming the via 52 in a structure including a dielectric material 14 and an organic bonding material 32, comprises forming a resist material 42 on the dielectric layer 14 and etching through the dielectric layer 14 and the organic bonding material 32 with 60CF4/20Ar/60CHF3/20N2. The resist may then be removed with an anisotropic high density oxygen plasma.
摘要翻译：提供了一种用于在接合的晶片之间制造通孔52的工艺，而没有切割有机粘合材料32。在包括电介质材料14和有机接合材料32的结构中形成通孔52的工艺包括在电介质层14上形成抗蚀剂材料42，并通过电介质层14和有机接合材料32以60CF _{4 / 20Ar / 60CHF 3 / 20N 2 。然后可以用各向异性高密度氧等离子体除去抗蚀剂。}

23. 发明授权

US06214122B1 Rapid thermal processing susceptor 失效
标题翻译：快速热处理基座
公开(公告)号：US06214122B1
公开(公告)日：2001-04-10
申请号：US08819162
申请日：1997-03-17
申请人： Danny L. Thompson , Bradley M. Melnick , William J. Dauksher
发明人： Danny L. Thompson , Bradley M. Melnick , William J. Dauksher
IPC分类号： C23C1600
CPC分类号： H01L21/67103
摘要： A rapid thermal processing susceptor including a base having a planar surface and an upright sidewall extending around a periphery thereof and encircling a working portion of the planar surface. The working portion and the sidewall define a cavity. A plurality of minimum contact points extend from the working portion into the cavity and are positioned to receive thereon a semiconductor wafer. A cover is receivable by the sidewall for enclosing the cavity.
摘要翻译：一种快速热处理基座，包括具有平坦表面的基部和围绕其周边延伸并围绕所述平面的工作部分的直立侧壁。工作部分和侧壁限定一个空腔。多个最小接触点从工作部分延伸到空腔中并且定位成在其上接收半导体晶片。盖可以被侧壁容纳以封闭空腔。

24. 发明申请

US20080003485A1 Fuel cell having patterned solid proton conducting electrolytes 审中-公开
标题翻译：具有图案化固体质子传导电解质的燃料电池
公开(公告)号：US20080003485A1
公开(公告)日：2008-01-03
申请号：US11479737
申请日：2006-06-30
申请人： Ramkumar Krishnan , William J. Dauksher , Chowdary R. Koripella
发明人： Ramkumar Krishnan , William J. Dauksher , Chowdary R. Koripella
IPC分类号： H01M4/86 , H01M8/10 , B05D5/12 , H01M4/88
CPC分类号： H01M4/8885 , H01M4/8605 , H01M4/98 , H01M8/1006 , H01M8/1023 , H01M8/1039 , H01M8/1076 , Y02P70/56
摘要： A method is provided for patterning a solid proton conducting electrolyte (22, 60) for a micro fuel cell. The method comprises patterning a first side (30, 63) of a solid proton conducting electrolyte (22, 60) to increase the surface area, coating the patterned first side (22, 60) with an electrocatalyst (33, 66), providing a first electrical conductor (20) to the first side (22, 60), and providing a second electrical conductor (15, 16) to a second side (19) of the solid proton conducting electrolyte (22, 60) opposed to the first side (22, 60). One exemplary embodiment comprises depositing a solid proton conducting electrolyte (60) over a substrate (12), patterning the solid proton conducting electrolyte (60) to form a plurality of pedestals (28), each pedestal (28) having an anode side adjacent a anode region (42) and a cathode side adjacent a cathode region (43), coating the anode (42) and cathode (43) sides with an electrocatalyst (33), providing a first electrical conductor (15, 16) to the anode side (42); and providing a second electrical conductor (20) to the cathode side (43).
摘要翻译：提供了用于图案化用于微型燃料电池的固体质子传导电解质（22,60）的方法。该方法包括图案化固体质子传导电解质（22,60）的第一侧（30,63）以增加表面积，用电催化剂（33,66）涂覆图案化的第一侧（22,60），从而提供将第一电导体（20）连接到第一侧（22,60），并且向与第一侧相对的固体质子传导电解质（22,60）的第二侧（19）提供第二电导体（15,16）（22,60）。一个示例性实施例包括在基板（12）上沉积固体质子传导电解质（60），图案化固体质子传导电解质（60）以形成多个基座（28），每个基座（28）具有邻近的阳极侧阳极区域（42）和与阴极区域（43）相邻的阴极侧，用电极催化剂（33）涂覆阳极（42）和阴极（43）侧，向阳极侧提供第一电导体（15,16）（42）; 以及向阴极侧（43）提供第二电导体（20）。

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