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21. 发明授权

US07250353B2 Method and system of releasing a MEMS structure 有权
标题翻译：释放MEMS结构的方法和系统
公开(公告)号：US07250353B2
公开(公告)日：2007-07-31
申请号：US11094101
申请日：2005-03-29
申请人： Steven S. Nasiri , Anthony Francis Flannery, Jr. , Martin Lim
发明人： Steven S. Nasiri , Anthony Francis Flannery, Jr. , Martin Lim
IPC分类号： H01L21/46 , H01L21/78 , H01L21/326
CPC分类号： B81C1/00333
摘要： A MEMs (microelectromechanical systems) structure is provided. In one implementation, the MEMs structure includes a substrate wafer including a MEMs device formed on a surface of the substrate wafer, and a MEMs cover structure to cover the MEMs device formed on the surface of the substrate wafer. The MEMs cover structure comprises a first wafer bonded to a second wafer, in which only the first wafer of the MEMs cover structure is sawed through and not the second wafer of the MEMs cover structure during dicing of the MEMs structure.
摘要翻译：提供了MEM（微机电系统）结构。在一个实施方式中，MEM结构包括：衬底晶片，其包括形成在衬底晶片的表面上的MEMs器件;以及覆盖形成在衬底晶片表面上的MEM器件的MEM盖结构。所述MEM覆盖结构包括结合到第二晶片的第一晶片，其中只有所述MEM的覆盖结构的所述第一晶片被锯切穿过，而在所述MEM结构的切割期间，所述MEM的第二晶片不覆盖所述结构。

22. 发明授权

US06892575B2 X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging 有权
标题翻译： X-Y轴双质量音叉陀螺仪，具有垂直集成电子和晶片级密封包装
公开(公告)号：US06892575B2
公开(公告)日：2005-05-17
申请号：US10690224
申请日：2003-10-20
申请人： Steven S. Nasiri , Joseph Seeger
发明人： Steven S. Nasiri , Joseph Seeger
IPC分类号： G01C19/00 , G01P9/04
CPC分类号： G01C19/5712 , G01C19/5719 , H03H2009/02354
摘要： An angular velocity sensor has two masses which are laterally disposed in an X-Y plane and indirectly connected to a frame. The two masses are linked together by a linkage such that they necessarily move in opposite directions along Z. Angular velocity of the sensor about the Y axis can be sensed by driving the two masses into Z-directed antiphase oscillation and measuring the angular oscillation amplitude thereby imparted to the frame.In a preferred embodiment, the angular velocity sensor is fabricated from a bulk MEMS gyroscope wafer, a cap wafer and a reference wafer. In a further preferred embodiment, this assembly of wafers provides a hermetic barrier between the masses and an ambient environment.
摘要翻译：角速度传感器具有横向设置在X-Y平面中并间接连接到框架的两个质量块。两个质量通过联动使得它们必须沿着相反方向移动。传感器绕Y轴的角速度可以通过将两个质量驱动成Z向反相振荡并测量角振荡幅度来感测传给框架。在优选实施例中，角速度传感器由体MEMS陀螺仪晶片，盖晶片和参考晶片制成。在另一优选实施例中，晶片组件提供了质量和周围环境之间的密封屏障。

23. 发明授权

US06480320B2 Microelectromechanical mirror and mirror array 失效
公开(公告)号：US06480320B2
公开(公告)日：2002-11-12
申请号：US09779189
申请日：2001-02-07
申请人： Steven S. Nasiri
发明人： Steven S. Nasiri
IPC分类号： G02B2600
CPC分类号： G02B26/0841 , B81B3/0062
摘要： A freely rotatable microelectromechanical mirror and mirror array. Each mirror is connected to a plate flexibly suspended from a plurality of actuators by a plurality of plate flexures. The actuators are flexibly suspended from a support structure by a plurality of actuator flexures. The support structure is held above and electrically isolated from a reference layer by a plurality of standoff posts. The reference layer contains a plurality of actuation means such as control electrodes to move the actuators in first and second directions when actuated. Control voltages can be selectively applied to selective control electrodes to selectively move the actuators, and extend the plurality of plate flexures. The extended plate flexures create a net restoring force or torque to translate or rotate the freely movable plate. The plate and attached mirror are thereby translated or rotated about an arbitrary axis of rotation without stress.

24. 发明授权

US08997564B2 Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics 有权
标题翻译：具有MEMS惯性感应和嵌入式数字电子技术的集成运动处理单元（MPU）
公开(公告)号：US08997564B2
公开(公告)日：2015-04-07
申请号：US13492717
申请日：2012-06-08
申请人： Steven S. Nasiri , David Sachs , Babak Taheri
发明人： Steven S. Nasiri , David Sachs , Babak Taheri
IPC分类号： G01P1/02 , G01P15/00 , G01P15/18 , G01P15/08 , G01P15/125 , G01C19/5769
CPC分类号： G01C19/5776 , G01C19/5769 , G01P1/023 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/0845 , G01P2015/0865 , G01P2015/088
摘要： A module operable to be mounted onto a surface of a board. The module includes a linear accelerometer to provide a first measurement output corresponding to a measurement of linear acceleration in at least one axis, and a first rotation sensor operable to provide a second measurement output corresponding to a measurement of rotation about at least one axis. The accelerometer and the first rotation sensor are formed on a first substrate. The module further includes an application specific integrated circuit (ASIC) to receive both the first measurement output from the linear accelerometer and the second measurement output from the first rotation sensor. The ASIC includes an analog-to-digital converter and is implemented on a second substrate. The first substrate is vertically bonded to the second substrate.
摘要翻译：一种可操作以安装在电路板表面上的模块。该模块包括线性加速度计，以提供对应于至少一个轴线性加速度的测量的第一测量输出，以及第一旋转传感器，其可操作以提供对应于围绕至少一个轴线的旋转测量的第二测量输出。加速度计和第一旋转传感器形成在第一基板上。该模块还包括专用集成电路（ASIC），用于接收来自线性加速度计的第一测量输出和来自第一旋转传感器的第二测量输出。 ASIC包括模数转换器并且被实现在第二基板上。第一衬底垂直地结合到第二衬底。

25. 发明授权

US08462109B2 Controlling and accessing content using motion processing on mobile devices 有权
标题翻译：使用移动设备上的运动处理来控制和访问内容
公开(公告)号：US08462109B2
公开(公告)日：2013-06-11
申请号：US12485823
申请日：2009-06-16
申请人： Steven S. Nasiri , David Sachs
发明人： Steven S. Nasiri , David Sachs
IPC分类号： G06F3/033 , G09G5/08
CPC分类号： A63F13/428 , A63F13/06 , A63F13/211 , A63F13/92 , A63F2300/105 , A63F2300/204 , A63F2300/6676 , G03B17/00 , G06F1/1626 , G06F1/1694 , G06F3/017 , G06F3/0346 , G06F3/0485 , G06F2200/1614 , G06F2200/1637 , G06F2203/04806 , H04M1/72583 , H04M2250/12
摘要： Various embodiments provide systems and methods capable of facilitating interaction with handheld electronics devices based on sensing rotational rate around at least three axes and linear acceleration along at least three axes. In one aspect, a handheld electronic device includes a subsystem providing display capability, a set of motion sensors sensing rotational rate around at least three axes and linear acceleration along at least three axes, and a subsystem which, based on motion data derived from at least one of the motion sensors, is capable of facilitating interaction with the device.
摘要翻译：各种实施例提供了能够基于感测至少三个轴周围的旋转速度和沿着至少三个轴的线性加速度来促进与手持电子设备的交互的系统和方法。在一个方面，一种手持电子设备包括提供显示能力的子系统，一组感测至少三个轴周围的旋转速度的运动传感器以及至少三个轴线的线性加速度;以及子系统，其基于至少从运动传感器之一能够促进与装置的交互。

26. 发明授权

US08384134B2 MEMS device including an electrical interconnect through a substrate 有权
标题翻译： MEMS器件包括通过衬底的电互连
公开(公告)号：US08384134B2
公开(公告)日：2013-02-26
申请号：US13455494
申请日：2012-04-25
申请人： Michael J. Daneman , Steven S. Nasiri , Martin Lim
发明人： Michael J. Daneman , Steven S. Nasiri , Martin Lim
IPC分类号： H01L27/148 , H01L29/84 , H01L21/00
CPC分类号： A45D27/42 , B81C1/00238 , B81C2203/0792 , H01L21/76898
摘要： A MEMS device is disclosed. The MEMS device comprises a MEMS substrate and a CMOS substrate having a front surface, a back surface and one or more metallization layers. The front surface being bonded to the MEMS substrate. The MEMS device includes one or more conductive features on the back surface of the CMOS substrate and electrical connections between the one or more metallization layers and the one or more conductive features.
摘要翻译：公开了MEMS器件。 MEMS器件包括MEMS衬底和具有前表面，后表面和一个或多个金属化层的CMOS衬底。前表面接合到MEMS基板上。 MEMS器件包括在CMOS衬底的背面上的一个或多个导电特征以及一个或多个金属化层与一个或多个导电特征之间的电连接。

27. 发明授权

US07934423B2 Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics 有权
标题翻译：垂直集成的3轴MEMS角加速度计与集成电子
公开(公告)号：US07934423B2
公开(公告)日：2011-05-03
申请号：US11953762
申请日：2007-12-10
申请人： Steven S. Nasiri , Goksen G. Yaralioglu , Joseph Seeger , Babak Taheri
发明人： Steven S. Nasiri , Goksen G. Yaralioglu , Joseph Seeger , Babak Taheri
IPC分类号： G01P15/08 , G01P15/125
CPC分类号： G01P15/0888 , B60R2021/01327 , G01P15/0802 , G01P15/125 , G01P15/18
摘要： Sensors for measuring angular acceleration about three mutually orthogonal axes, X, Y, Z or about the combination of these axes are disclosed. The sensor comprises a sensor subassembly. The sensor subassembly further comprises a base which is substantially parallel to the X-Y sensing plane; a proof mass disposed in the X-Y sensing plane and constrained to rotate substantially about the X, and/or Y, and/or Z, by at least one linkage and is responsive to angular accelerations about the X, and/or Y, and/or Z directions. Finally, the sensor includes at least one electrode at the base plate or perpendicular to the base plate and at least one transducer for each sensing direction of the sensor subassembly responsive to the angular acceleration. Multi-axis detection is enabled by adjusting a configuration of flexures and electrodes.
摘要翻译：公开了用于测量围绕三个相互正交的轴X，Y，Z或围绕这些轴的组合的角加速度的传感器。传感器包括传感器子组件。传感器子组件还包括基本上平行于X-Y感测平面的基座; 设置在XY感测平面中并被约束以基于X和/或Y和/或Z 1至少一个连杆旋转的检测质量体，并响应于围绕X和/或Y的角加速度和/ 或Z方向。最后，传感器在基板处包括至少一个电极或垂直于基板，以及至少一个传感器，用于响应于角加速度的传感器子组件的每个感测方向。通过调整弯曲和电极的配置可实现多轴检测。

28. 发明申请

US20080314147A1 VERTICALLY INTEGRATED 3-AXIS MEMS ACCELEROMETER WITH ELECTRONICS 有权
标题翻译：具有电子学功能的垂直集成三轴MEMS加速度计
公开(公告)号：US20080314147A1
公开(公告)日：2008-12-25
申请号：US11766776
申请日：2007-06-21
申请人： Steven S. Nasiri , Joseph Seeger , Goksen Yaralioglu
发明人： Steven S. Nasiri , Joseph Seeger , Goksen Yaralioglu
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P15/18 , G01P2015/0814 , G01P2015/0831
摘要： A system and method in accordance with the present invention provides for a low cost, bulk micromachined accelerometer integrated with electronics. The accelerometer can also be integrated with rate sensors that operate in a vacuum environment. The quality factor of the resonances is suppressed by adding dampers. Acceleration sensing in each axis is achieved by separate structures where the motion of the proof mass affects the value of sense capacitors differentially. Two structures are used per axis to enable full bridge measurements to further reduce the mechanical noise, immunity to power supply changes and cross axis coupling. To reduce the sensitivity to packaging and temperature changes, each mechanical structure is anchored to a single anchor pillar bonded to the top cover.
摘要翻译：根据本发明的系统和方法提供了一种与电子器件集成的低成本，体积微机械加速度计。加速度计也可以与在真空环境中运行的速率传感器集成。通过加入阻尼器来抑制谐振的品质因数。每个轴上的加速度感测通过单独的结构实现，其中检测质量的运动差异地影响感测电容器的值。每个轴使用两个结构，以实现全桥测量，以进一步降低机械噪声，对电源变化的抗扰度和交叉轴耦合。为了降低对包装和温度变化的敏感性，每个机械结构被锚定到结合到顶盖的单个锚柱上。

29. 发明授权

US06939473B2 Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging 有权
标题翻译：制造具有垂直集成电子元件和晶片级密封包装的X-Y轴双质量音叉陀螺仪的方法
公开(公告)号：US06939473B2
公开(公告)日：2005-09-06
申请号：US10691472
申请日：2003-10-20
申请人： Steven S. Nasiri , Anthony Francis Flannery, Jr.
发明人： Steven S. Nasiri , Anthony Francis Flannery, Jr.
IPC分类号： G01C19/56 , H01L21/00
CPC分类号： G01C19/5719
摘要： A method for making an angular velocity sensor having two masses which are laterally disposed in an X-Y plane and indirectly connected to a frame provided. The two masses are linked together by a linkage such that they necessarily move in opposite directions along Z. Angular velocity of the sensor about the Y axis can be sensed by driving the two masses into Z-directed antiphase oscillation and measuring the angular oscillation amplitude thereby imparted to the frame. In a preferred embodiment, the angular velocity sensor is fabricated from a bulk MEMS gyroscope wafer, a cap wafer and a reference wafer. In a further preferred embodiment, this assembly wafers provides a hermetic barrier between the masses and an ambient environment.
摘要翻译：一种用于制造具有两个质量的角速度传感器的方法，其横向设置在X-Y平面中并间接地连接到设置的框架。两个质量通过联动使得它们必须沿着相反方向移动。传感器绕Y轴的角速度可以通过将两个质量驱动成Z向反相振荡并测量角振荡幅度来感测传给框架。在优选实施例中，角速度传感器由体MEMS陀螺仪晶片，盖晶片和参考晶片制成。在另一优选实施例中，该组装晶片提供了质量和周围环境之间的密封屏障。

30. 发明授权

US08960002B2 Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics 有权
公开(公告)号：US08960002B2
公开(公告)日：2015-02-24
申请号：US13096732
申请日：2011-04-28
申请人： Steven S. Nasiri , Goksen G. Yaralioglu , Joseph Seeger , Babak Taheri
发明人： Steven S. Nasiri , Goksen G. Yaralioglu , Joseph Seeger , Babak Taheri
IPC分类号： G01P15/08 , G01P15/125 , G01P15/18 , B60R21/0132
CPC分类号： G01P15/0888 , B60R2021/01327 , G01P15/0802 , G01P15/125 , G01P15/18
摘要： Sensors for measuring angular acceleration about three mutually orthogonal axes, X, Y, Z or about the combination of these axes are disclosed. The sensor comprises a sensor subassembly. The sensor subassembly further comprises a base which is substantially parallel to the X-Y sensing plane; a proof mass disposed in the X-Y sensing plane and constrained to rotate substantially about the X, and/or Y, and/or Z, by at least one linkage and is responsive to angular accelerations about the X, and/or Y, and/or Z directions. Finally, the sensor includes at least one electrode at the base plate or perpendicular to the base plate and at least one transducer for each sensing direction of the sensor subassembly responsive to the angular acceleration. Multi-axis detection is enabled by adjusting a configuration of flexures and electrodes.

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