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21. 发明授权

US5650568A Gimballed vibrating wheel gyroscope having strain relief features 失效
标题翻译：具有应变消除特征的Gimballed振动轮陀螺仪
公开(公告)号：US5650568A
公开(公告)日：1997-07-22
申请号：US440536
申请日：1995-05-12
申请人： Paul Greiff , Bernard M. Antkowiak
发明人： Paul Greiff , Bernard M. Antkowiak
IPC分类号： B81B3/00 , G01C19/5712 , G01P15/08 , G01P15/125 , G01P9/04
CPC分类号： G01C19/5712 , B81B3/0051 , G01P15/0802 , G01P15/125 , B81B2201/0242 , B81B2203/056 , B81B2203/058
摘要： A gimballed vibrating wheel gyroscope for detecting rotational rates in inertial space. The gyroscope includes a support oriented in a first plane and a wheel assembly disposed over the support parallel to the first plane. The wheel assembly is adapted for vibrating rotationally at a predetermined frequency in the first plane and is responsive to rotational rates about a coplanar input axis for providing an output torque about a coplanar output axis. The gyroscope also includes a post assembly extending between the support and the wheel assembly for supporting the wheel assembly. The wheel assembly has an inner hub, an outer wheel, and spoke flexures extending between the inner hub and the outer wheel and being stiff along both the input and output axes. A flexure is incorporated in the post assembly between the support and the wheel assembly inner hub and is relatively flexible along the output axis and relatively stiff along the input axis. Also provided is a single semiconductor crystal fabrication technique and a dissolved wafer fabrication technique. In one embodiment, the gyroscope includes comb drive electrodes. Also described is a box-shaped strain relief structure for use in the spoke flexures and additional strain relief features.
摘要翻译：用于检测惯性空间中的旋转速度的摇摆陀螺陀螺仪。陀螺仪包括定位在第一平面中的支撑件和布置在平行于第一平面的支撑件上的车轮组件。车轮组件适于在第一平面中以预定频率旋转地旋转，并且响应于围绕共面输入轴的旋转速率，以提供围绕共面输出轴的输出扭矩。陀螺仪还包括在支撑件和车轮组件之间延伸的支柱组件的支柱组件。车轮组件具有内轮毂，外轮和在内轮毂和外轮之间延伸并且沿着输入轴和输出轴线都是刚性的轮辐弯曲件。在支架和车轮组件内轮毂之间的后组件中并入弯曲部，并且沿着输出轴线相对柔性并且沿着输入轴线相对刚性。还提供了单个半导体晶体制造技术和溶解晶片制造技术。在一个实施例中，陀螺仪包括梳状驱动电极。还描述了一种用于辐条弯曲和附加应变消除特征的箱形应变消除结构。

22. 发明授权

US5144184A Micromechanical device with a trimmable resonant frequency structure and method of trimming same 失效
标题翻译：具有可调谐谐振频率结构的微机械装置及其修整方法
公开(公告)号：US5144184A
公开(公告)日：1992-09-01
申请号：US470938
申请日：1990-01-26
申请人： Paul Greiff
发明人： Paul Greiff
IPC分类号： G01P15/097 , G01P15/10 , H03H3/013 , H03H9/24
CPC分类号： H03H9/24 , G01P15/097 , H03H3/013
摘要： A micromechanical device having a frequency trimmable, resonant structure, including a semiconductor substrate forming a support frame. First and second flexures flexibly couple and support a structure within the support frame, to permit rotation with a resonant frequency about a first axis which passes through the flexures. First and second elongated openings located proximate the first and second flexures form first and second tension relief beams adjacent the flexures, for providing stress relief of the tensile forces between the resonant structure and the flexures, and for establishing and trimming the resonant frequency of the resonant structure. The resonant structure may also include first and second regions located proximate the elongated openings, the regions having a thickness which is substantially less than the thickness of the remainder of the resonant structure, to permit removal of at least a portion of the regions thereby enlarging the elongated openings and further trimming the resonant frequency of the resonant structure. Also disclosed is a method of trimming the resonant frequency of such a micromechanical device.
摘要翻译：一种具有可调谐的谐振结构的微机械装置，包括形成支撑框架的半导体衬底。第一和第二挠曲件柔性地联接和支撑支撑框架内的结构，以允许围绕穿过弯曲部的第一轴线的共振频率旋转。位于第一和第二挠曲附近的第一和第二细长开口形成邻近弯曲部的第一和第二张力释放梁，用于提供在谐振结构和挠曲之间的张力的应力消除，以及用于建立和修整谐振的谐振频率结构体。谐振结构还可以包括位于细长开口附近的第一和第二区域，该区域具有基本上小于谐振结构的其余部分的厚度的厚度，以允许去除区域的至少一部分，从而扩大细长的开口并进一步修整谐振结构的谐振频率。还公开了一种修整这种微机械装置的谐振频率的方法。

23. 发明授权

US5111693A Motion restraints for micromechanical devices 失效
标题翻译：微机械装置的运动约束
公开(公告)号：US5111693A
公开(公告)日：1992-05-12
申请号：US560374
申请日：1990-07-30
申请人： Paul Greiff
发明人： Paul Greiff
IPC分类号： G01C19/5719
CPC分类号： B81B3/0051 , G01C19/5719 , B81B2201/0235
摘要： Motion restraints and a method for their fabrication are provided for use with a micromechanical transducer, such as a gyroscope or an accelerometer, to limit the motion of resiliently supported transducer elements, preventing extreme lateral or rotational displacement of the elements. The motion restraints are fabricated of a material such as gold that prevents or reduces the sticking of the transducer elements at points of contact between them. In one embodiment, the motion restraints include cantilevered depositions that extend from the substrate over the transducer element. In a further embodiment, the restraints includes a metal capped post and close-tolerance lateral restraints.
摘要翻译：运动约束及其制造方法被提供用于诸如陀螺仪或加速度计的微机械换能器，以限制弹性支撑的换能器元件的运动，从而防止元件的极端横向或旋转位移。运动限制由诸如金的材料制成，其防止或减少换能器元件在它们之间的接触点处的粘附。在一个实施例中，运动约束包括在换能器元件上从衬底延伸的悬臂沉积。在另一个实施例中，约束包括金属封盖柱和紧密公差横向约束。

24. 发明授权

US4067037A Transistor having high f.sub.t at low currents 失效
标题翻译：晶体管具有高f {hd t {b在低电流下
公开(公告)号：US4067037A
公开(公告)日：1978-01-03
申请号：US676019
申请日：1976-04-12
申请人： Paul Greiff
发明人： Paul Greiff
IPC分类号： H01L21/033 , H01L29/08 , H01L29/10 , H01L29/732 , H01L29/72 , H01L27/02 , H01L27/12
CPC分类号： H01L29/0804 , H01L21/033 , H01L29/1004 , H01L29/7322 , Y10S148/106
摘要： A transistor structure capable of high frequency operation with low collector currents is obtained by fabricating the transistor using nitride techniques to minimize the emitter area and base width area beyond that obtainable by conventional masking techniques. The emitter is surrounded on three sides by low capacitance dielectric which reduces its emitter-to-collector capacitance and hence improves high frequency performance.
摘要翻译：通过使用氮化物技术制造晶体管可以获得能够以低集电极电流进行高频操作的晶体管结构，以将发射极面积和基极宽度面积最小化超过通过常规掩蔽技术获得的面积和基极宽度发射极在三面被低电容电介质环绕，从而降低了发射极对集电极的电容，从而提高了高频性能。

25. 发明授权

US08633373B2 Sub-micrometer gap thermophotovoltaic structure (MTPV) and fabrication method therefor 有权
标题翻译：亚微米间隙热光伏结构（MTPV）及其制造方法
公开(公告)号：US08633373B2
公开(公告)日：2014-01-21
申请号：US12152195
申请日：2008-05-12
申请人： Paul Greiff , Robert DiMatteo , Eric Brown , Christopher Leitz
发明人： Paul Greiff , Robert DiMatteo , Eric Brown , Christopher Leitz
IPC分类号： H01L31/058
CPC分类号： H02S10/30
摘要： An MTPV thermophotovoltaic chip comprising a photovoltaic cell substrate, micron/sub-micron gap-spaced from a juxtaposed heat or infrared radiation-emitting substrate, with a radiation-transparent intermediate window substrate preferably compliantly adhered to the photovoltaic cell substrate and bounding the gap space therewith.
摘要翻译：一种MTPV热光伏芯片，其包括光伏电池基板，与并置的热或红外辐射发射基板间隔开的微米/亚微米间隙，其具有辐射透明的中间窗口基板，优选地柔顺地粘附到所述光伏电池基板并且限定所述间隙空间随之而来。

26. 发明授权

US08076569B2 Method and structure, using flexible membrane surfaces, for setting and/or maintaining a uniform micron/sub-micron gap separation between juxtaposed photosensitive and heat-supplying surfaces of photovoltaic chips and the like for the generation of electrical power 有权
标题翻译：使用柔性膜表面的方法和结构，用于设置和/或保持在光伏芯片等的并置感光和供热表面之间的均匀的微米/亚微米间隙分离以产生电力
公开(公告)号：US08076569B2
公开(公告)日：2011-12-13
申请号：US12152196
申请日：2008-05-12
申请人： Paul Greiff , Robert DiMatteo , Eric Brown , Christopher Leitz
发明人： Paul Greiff , Robert DiMatteo , Eric Brown , Christopher Leitz
IPC分类号： H01L31/00 , H01L35/00 , H01L37/00 , H01L35/34
CPC分类号： H01L31/024 , H02S10/30
摘要： A near-field energy conversion structure and method of assembling the same, utilizing a sub-micrometer “near field” gap between juxtaposed photocell infrared radiation receiver and heat emitter surfaces, wherein compliant membrane structures, preferably fluid-filled, are interposed in the structure.
摘要翻译：近场能量转换结构及其组装方法，利用并置的光电池红外辐射接收器和发热表面之间的亚微米“近场”间隙，其中优选流体填充的柔性膜结构插入结构中。

27. 发明申请

US20110209748A1 Thermally resistant spacers for a submicron gap thermo-photo-voltaic device and method 有权
标题翻译：用于亚微米间隙热电光装置的耐热间隔件和方法
公开(公告)号：US20110209748A1
公开(公告)日：2011-09-01
申请号：US13068207
申请日：2011-05-05
申请人： Paul Greiff
发明人： Paul Greiff
IPC分类号： H01L31/02 , H01L31/18
CPC分类号： H01L31/024 , H02S10/30 , Y02E10/50
摘要： A micron gap thermo-photo-voltaic device including a photovoltaic substrate, a heat source substrate, and a plurality of spacers separating the photovoltaic substrate from the heat source substrate by a submicron gap. Each spacer includes an elongated thin-walled structure disposed in a well formed in the heat source substrate and having a top surface less than a micron above the heat source substrate. Also disclosed are methods of making the spacers.
摘要翻译：一种微米间隙热电装置，包括光伏基板，热源基板和多个间隔件，其通过亚微米间隙将光伏基板与热源基板隔离开。每个间隔物包括细长的薄壁结构，其设置在形成于热源基底中的阱中，并具有在热源基底上方小于微米的顶表面。还公开了制造间隔物的方法。

28. 发明授权

US07977135B2 Micron gap thermal photovoltaic device and method of making the same 有权
标题翻译：微米间隙热电光伏器件及其制作方法
公开(公告)号：US07977135B2
公开(公告)日：2011-07-12
申请号：US12154120
申请日：2008-05-20
申请人： Paul Greiff , Robert Stephen DiMatteo
发明人： Paul Greiff , Robert Stephen DiMatteo
IPC分类号： H01L21/00
CPC分类号： H02S10/30
摘要： A method of making a micron gap thermal photovoltaic device includes forming at least one standoff on a photovoltaic substrate, depositing a sacrificial layer on the photovoltaic substrate and about the standoff, forming an emitter attached to the standoff and having a lower planar surface separated from the photovoltaic substrate by the sacrificial layer, and removing the sacrificial layer to form a sub-micron gap between the photovoltaic substrate and the lower planar surface of the emitter.
摘要翻译：一种制造微米间隙热光伏器件的方法包括在光伏基板上形成至少一个支座，在光伏基板上并围绕支座沉积牺牲层，形成附着在支座上的发射器，并且具有与通过牺牲层去除光电衬底，以及去除牺牲层以在光伏衬底和发射极的下平面表面之间形成亚微米间隙。

29. 发明申请

US20090277488A1 Method and structure, using flexible membrane surfaces, for setting and/or maintaining a uniform micron/sub-micron gap separation between juxtaposed photosensitive and heat-supplying surfaces of photovoltaic chips and the like for the generation of electrical power 有权
标题翻译：使用柔性膜表面的方法和结构，用于设置和/或保持在光伏芯片等的并置感光和供热表面之间的均匀的微米/亚微米间隙分离以产生电力
公开(公告)号：US20090277488A1
公开(公告)日：2009-11-12
申请号：US12152196
申请日：2008-05-12
申请人： Paul Greiff , Robert DiMatteo , Eric Brown , Christopher Leitz
发明人： Paul Greiff , Robert DiMatteo , Eric Brown , Christopher Leitz
IPC分类号： H01L37/00 , H01L35/34
CPC分类号： H01L31/024 , H02S10/30
摘要： A near-field energy conversion structure and method of assembling the same, utilizing a sub-micrometer “near field” gap between juxtaposed photocell infrared radiation receiver and heat emitter surfaces, wherein compliant membrane structures, preferably fluid-filled, are interposed in the structure.
摘要翻译：近场能量转换结构及其组装方法，利用并置的光电池红外辐射接收器和发热表面之间的亚微米“近场”间隙，其中优选流体填充的柔性膜结构插入结构中。

30. 发明授权

US06230567B1 Low thermal strain flexure support for a micromechanical device 有权
标题翻译：用于微机械装置的低热应变挠曲支撑
公开(公告)号：US06230567B1
公开(公告)日：2001-05-15
申请号：US09366462
申请日：1999-08-03
申请人： Paul Greiff
发明人： Paul Greiff
IPC分类号： G01P1500
CPC分类号： G01P1/006 , G01P15/08 , G01P15/125 , G01P2015/0831
摘要： A low thermal strain flexure support for a micromechanical device includes a substrate; a micromechanical device having a rotational axis and a longitudinal axis; an anchor structure disposed on the substrate proximate the longitudinal axis of the micromechanical device; first and second support members extending outwardly oppositely from the anchor structure; and first and second flexures extending inwardly in the direction of the axis of rotation of the micromechanical device from the first and second support members, respectively, to the micromechanical device for suspending the micromechanical device from the substrate.
摘要翻译：用于微机械装置的低热应变挠曲支撑件包括基底; 具有旋转轴线和纵向轴线的微机械装置; 锚定结构，其设置在靠近所述微机械装置的纵向轴线的所述基板上; 第一和第二支撑构件从锚结构向外相对地延伸; 以及分别从微机械装置的旋转轴线的方向从第一和第二支撑构件向内延伸到用于将微机械装置从衬底悬挂的微机械装置的第一和第二挠曲。

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