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21. 发明申请

US20090074137A1 ACCURATE MEASUREMENT OF LAYER DIMENSIONS USING XRF 有权
标题翻译：使用XRF精确测量层数
公开(公告)号：US20090074137A1
公开(公告)日：2009-03-19
申请号：US12272050
申请日：2008-11-17
申请人： Dileep Agnihotri , Jeremy O'Dell , Isaac Mazor , Boris Yokhin
发明人： Dileep Agnihotri , Jeremy O'Dell , Isaac Mazor , Boris Yokhin
IPC分类号： G01N23/223
CPC分类号： G01B15/02 , G01N23/223 , G01N2223/076 , H01L22/12
摘要： A method for inspection of a sample includes directing an excitation beam to impinge on an area of a planar sample that includes a feature having sidewalls perpendicular to a plane of the sample, the sidewalls having a thin film thereon. An intensity of X-ray fluorescence (XRF) emitted from the sample responsively to the excitation beam is measured, and a thickness of the thin film on the sidewalls is assessed based on the intensity. In another method, the width of recesses in a surface layer of a sample and the thickness of a material deposited in the recesses after polishing are assessed using XRF.
摘要翻译：用于检查样品的方法包括引导激发光束撞击平面样品的区域，该平面样品的区域包括具有垂直于样品平面的侧壁的特征，该侧壁在其上具有薄膜。测量响应于激发光束从样品发射的X射线荧光强度（XRF），并且基于强度来评估侧壁上的薄膜的厚度。在另一种方法中，使用XRF来评估样品的表面层中的凹陷的宽度和抛光后沉积在凹部中的材料的厚度。

22. 发明授权

US07481579B2 Overlay metrology using X-rays 有权
标题翻译：使用X射线覆盖测量
公开(公告)号：US07481579B2
公开(公告)日：2009-01-27
申请号：US11389490
申请日：2006-03-27
申请人： Boris Yokhin , Isaac Mazor , Sean Jameson , Alex Dikopoltsev
发明人： Boris Yokhin , Isaac Mazor , Sean Jameson , Alex Dikopoltsev
IPC分类号： G01D18/00
CPC分类号： G03F7/70633
摘要： A method for inspection includes directing a beam of X-rays to impinge upon an area of a sample containing first and second features formed respectively in first and second thin film layers, which are overlaid on a surface of the sample. A pattern of the X-rays diffracted from the first and second features is detected and analyzed in order to assess an alignment of the first and second features.
摘要翻译：一种检查方法包括将X射线束引导到包含分别在第一和第二薄膜层上形成的第一和第二特征的样品的区域上，该第一和第二特征覆盖在样品的表面上。检测和分析从第一和第二特征衍射的X射线的图案，以评估第一和第二特征的对准。

23. 发明申请

US20070224518A1 Overlay metrology using X-rays 有权
标题翻译：使用X射线覆盖测量
公开(公告)号：US20070224518A1
公开(公告)日：2007-09-27
申请号：US11389490
申请日：2006-03-27
申请人： Boris Yokhin , Isaac Mazor , Sean Jameson , Alex Dikopoltsev
发明人： Boris Yokhin , Isaac Mazor , Sean Jameson , Alex Dikopoltsev
IPC分类号： G03F1/00
CPC分类号： G03F7/70633
摘要： A method for inspection includes directing a beam of X-rays to impinge upon an area of a sample containing first and second features formed respectively in first and second thin film layers, which are overlaid on a surface of the sample. A pattern of the X-rays diffracted from the first and second features is detected and analyzed in order to assess an alignment of the first and second features.
摘要翻译：一种检查方法包括将X射线束引导到包含分别在第一和第二薄膜层上形成的第一和第二特征的样品的区域上，该第一和第二特征覆盖在样品的表面上。检测和分析从第一和第二特征衍射的X射线的图案，以评估第一和第二特征的对准。

24. 发明授权

US07245695B2 Detection of dishing and tilting using X-ray fluorescence 有权
标题翻译：使用X射线荧光检测凹陷和倾斜
公开(公告)号：US07245695B2
公开(公告)日：2007-07-17
申请号：US11103071
申请日：2005-04-11
申请人： Isaac Mazor , Alex Dikopoltsev , Boris Yokhin , Tzachi Rafaeli , Alex Tokar
发明人： Isaac Mazor , Alex Dikopoltsev , Boris Yokhin , Tzachi Rafaeli , Alex Tokar
IPC分类号： G01N23/223
CPC分类号： G01N23/223 , G01N2223/076
摘要： A method for testing a material applied to a surface of a sample includes directing an excitation beam, having a known beam-width and intensity cross-section, onto a region of the sample. An intensity of X-ray fluorescence emitted from the region responsively to the excitation beam is measured. A distribution of the material within the region is estimated, responsively to the measured intensity of the X-ray fluorescence and to the intensity cross-section of the excitation beam, with a spatial resolution that is finer than the beam-width.
摘要翻译：用于测试施加到样品表面的材料的方法包括将具有已知束宽度和强度横截面的激发束引导到样品的区域上。测量从响应于激发光束的区域发射的X射线荧光的强度。响应于X射线荧光的测量强度和激发光束的强度横截面，估计区域内材料的分布，其空间分辨率比光束宽度更精细。

25. 发明申请

US20060274886A1 Measurement of properties of thin films on sidewalls 有权
公开(公告)号：US20060274886A1
公开(公告)日：2006-12-07
申请号：US11487433
申请日：2006-07-17
申请人： Isaac Mazor , Boris Yokhin
发明人： Isaac Mazor , Boris Yokhin
IPC分类号： G01N23/20
CPC分类号： G01N23/20
摘要： A method for X-ray analysis of a sample includes directing a beam of X-rays to impinge on an area of a periodic feature on a surface of the sample and receiving the X-rays scattered from the surface in a reflection mode so as to detect a spectrum of diffraction in the scattered X-rays as a function of azimuth. The spectrum of diffraction is analyzed in order to determine a dimension of the feature.

26. 发明申请

US20060227931A1 Detection of dishing and tilting using x-ray fluorescence 有权
标题翻译：使用x射线荧光检测凹陷和倾斜
公开(公告)号：US20060227931A1
公开(公告)日：2006-10-12
申请号：US11103071
申请日：2005-04-11
申请人： Isaac Mazor , Alex Dikopoltsev , Boris Yokhin , Tzachi Rafaeli , Alexander Tokar
发明人： Isaac Mazor , Alex Dikopoltsev , Boris Yokhin , Tzachi Rafaeli , Alexander Tokar
IPC分类号： G01N23/223 , G01T1/36
CPC分类号： G01N23/223 , G01N2223/076
摘要： A method for testing a material applied to a surface of a sample includes directing an excitation beam, having a known beam-width and intensity cross-section, onto a region of the sample. An intensity of X-ray fluorescence emitted from the region responsively to the excitation beam is measured. A distribution of the material within the region is estimated, responsively to the measured intensity of the X-ray fluorescence and to the intensity cross-section of the excitation beam, with a spatial resolution that is finer than the beam-width.
摘要翻译：用于测试施加到样品表面的材料的方法包括将具有已知束宽度和强度横截面的激发束引导到样品的区域上。测量从响应于激发光束的区域发射的X射线荧光的强度。响应于X射线荧光的测量强度和激发光束的强度横截面，估计区域内材料的分布，其空间分辨率比光束宽度更精细。

27. 发明授权

US07113566B1 Enhancing resolution of X-ray measurements by sample motion 有权
标题翻译：通过样本运动提高X射线测量的分辨率
公开(公告)号：US07113566B1
公开(公告)日：2006-09-26
申请号：US11181746
申请日：2005-07-15
申请人： Asher Peled , Isaac Mazor , Boris Yokhin
发明人： Asher Peled , Isaac Mazor , Boris Yokhin
IPC分类号： G01N23/20 , G21K1/04 , H05G1/00
CPC分类号： G01N23/20
摘要： A method for inspection of a sample includes directing a beam of X-rays toward a sample and configuring an array of detector elements to capture the X-rays scattered from the sample. The sample is shifted in a direction parallel to the axis of the array between at least first and second positions, which positions are separated one from another by an increment that is not an integer multiple of the pitch of the array. At least first and second signals are generated by the detector elements responsively to the X-rays captured thereby while the sample is in at least the first and second positions, respectively. The first and second signals are combined so as to determine an X-ray scattering profile of the sample as a function of position along the axis.
摘要翻译：用于检查样品的方法包括将X射线束朝向样品引导并且配置检测器元件的阵列以捕获从样品散射的X射线。样本在至少第一和第二位置之间沿与阵列的轴平行的方向移位，这些位置彼此分开不是阵列的音调的整数倍的增量。响应于由此捕获的X射线，检测器元件至少产生第一和第二信号，而样品分别处于至少第一和第二位置。第一和第二信号被组合以确定样品的X射线散射分布作为沿轴的位置的函数。

28. 发明申请

US20070274447A1 Automated selection of X-ray reflectometry measurement locations 审中-公开
标题翻译：自动选择X射线反射测量位置
公开(公告)号：US20070274447A1
公开(公告)日：2007-11-29
申请号：US11798617
申请日：2007-05-15
申请人： Isaac Mazor , Alex Dikopoltsev , Boris Yokhin , Tzachi Rafaeli , Alex Tokar , David Berman , Moshe Beylin
发明人： Isaac Mazor , Alex Dikopoltsev , Boris Yokhin , Tzachi Rafaeli , Alex Tokar , David Berman , Moshe Beylin
IPC分类号： G01N23/20
CPC分类号： G01N23/201 , G01N2223/052
摘要： A computer-implemented method for inspection of a sample includes defining a plurality of locations on a surface of the sample, irradiating the surface at each of the locations with a beam of X-rays, and measuring an angular distribution of the X-rays that are emitted from the surface responsively to the beam, so as to produce a respective plurality of X-ray spectra. The X-ray spectra are analyzed to produce respective figures-of-merit indicative of a measurement quality of the X-ray spectra at the respective locations. One or more locations are selected out of the plurality of locations responsively to the figures-of-merit, and a property of the sample is estimated using the X-ray spectra measured at the selected locations.
摘要翻译：用于检查样品的计算机实现的方法包括在样品的表面上限定多个位置，用X射线照射每个位置处的表面，并测量X射线的角度分布，响应于光束从表面发射，以产生相应的多个X射线光谱。分析X射线光谱以产生各自的相应的品质指数，表示在各个位置处的X射线光谱的测量质量。响应于品质因数从多个位置中选择一个或多个位置，并且使用在所选择的位置处测量的X射线光谱来估计样品的性质。

29. 发明申请

US20060062350A1 Combined X-ray reflectometer and diffractometer 有权
$Combined X-ray reflectometer and diffractometer$
标题翻译：组合X射线反射计和衍射仪
公开(公告)号：US20060062350A1
公开(公告)日：2006-03-23
申请号：US10946426
申请日：2004-09-21
申请人： Boris Yokhin , Isaac Mazor , Tzachi Rafaeli
发明人： Boris Yokhin , Isaac Mazor , Tzachi Rafaeli
IPC分类号： G01N23/201
CPC分类号： G01N23/20008
摘要： Apparatus for analysis of a sample includes a radiation source, which is adapted to direct a converging beam of X-rays toward a surface of the sample. At least one detector array is arranged to sense the X-rays scattered from the sample as a function of elevation angle over a range of elevation angles simultaneously, and to generate output signals responsively to the scattered X-rays. The detector array has a first configuration in which the detector array senses the X-rays that are reflected from the surface of the sample at a grazing angle, and a second configuration in which the detector array senses the X-rays that are diffracted from the surface in a vicinity of a Bragg angle of the sample. A signal processor processes the output signals so as to determine a characteristic of the surface layer of the sample.
摘要翻译：用于分析样品的装置包括辐射源，其适于将X射线的会聚束引导到样品的表面。至少一个检测器阵列布置成同时检测从样品散射的X射线作为仰角范围上的仰角的函数，并且响应于散射的X射线产生输出信号。检测器阵列具有第一配置，其中检测器阵列以掠射角度感测从样品表面反射的X射线，以及第二配置，其中检测器阵列感测从衍射的X射线衍射的X射线表面在样品的布拉格角附近。信号处理器处理输出信号，以便确定样品的表面层的特性。

30. 发明授权

US06895071B2 XRR detector readout processing 有权
标题翻译： XRR检测器读出处理
公开(公告)号：US06895071B2
公开(公告)日：2005-05-17
申请号：US10635365
申请日：2003-08-06
申请人： Boris Yokhin , Alexander Dikopoltsev , Isaac Mazor , David Berman
发明人： Boris Yokhin , Alexander Dikopoltsev , Isaac Mazor , David Berman
IPC分类号： G01B15/02 , G01N23/20 , G01N23/223 , G01T1/36
CPC分类号： G01T1/36
摘要： Reflectometry apparatus includes a radiation source, adapted to irradiate a sample with radiation over a range of angles relative to a surface of the sample, and a detector assembly, positioned to receive the radiation reflected from the sample over the range of angles and to generate a signal responsive thereto. A shutter is adjustably positionable to intercept the radiation, the shutter having a blocking position, in which it blocks the radiation in a lower portion of the range of angles, thereby allowing the reflected radiation to reach the array substantially only in a higher portion of the range, and a clear position, in which the radiation in the lower portion of the range reaches the array substantially without blockage.
摘要翻译：反射仪装置包括：辐射源，其适于在相对于样品表面的一定范围的角度范围内辐射样品;以及检测器组件，其定位成在角度范围内接收从样品反射的辐射，并产生响应于此的信号。快门可调节地定位以拦截辐射，快门具有阻挡位置，其中阻挡在角度范围的下部的辐射，从而允许反射的辐射基本上仅在其中的较高部分范围和清晰的位置，其中该范围的下部的辐射基本上没有阻塞地达到阵列。

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