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    • 22. 发明授权
    • Image forming apparatus
    • 图像形成装置
    • US09206004B2
    • 2015-12-08
    • US13626218
    • 2012-09-25
    • Wataru Yamaguchi
    • Wataru Yamaguchi
    • B65H5/00B65H5/06B41J11/00B65H11/00G03G15/00B65H5/36
    • B65H5/068B41J11/0045B41J11/007B65H5/36B65H11/007B65H2301/5125B65H2404/1521B65H2404/60B65H2801/12G03G15/6558G03G2215/00662
    • An image forming apparatus includes an endless belt, an image forming unit configured to form an image on the recording medium conveyed by the endless belt, a guide surface configured to guide a first surface of the recording medium to the endless belt, a pressing portion configured to press a center portion, in a width direction perpendicular to a conveyance direction, of a leading end of the recording medium from a second surface toward the guide surface, a moving portion disposed upstream relative to the pressing portion in the conveyance direction and configured to contact the recording medium and move according to a pressing force to be applied from the recording medium, and a transmission portion configured to transmit movement of the moving portion to the pressing portion and reduce a pressing force of the pressing portion in accordance with the movement of the moving portion.
    • 图像形成装置包括环形带,图像形成单元,被配置为在由环形带传送的记录介质上形成图像;引导表面,被配置为将记录介质的第一表面引导到环形带;压缩部构造 将从记录介质的前端垂直于传送方向的宽度方向的中心部分从第二表面朝向引导表面按压;沿着输送方向相对于按压部分上游设置的移动部分, 接触记录介质并根据从记录介质施加的按压力移动;以及传输部分,其构造成将移动部分的运动传递到按压部分,并且根据运动部分的移动减小按压部分的按压力 移动部分。
    • 24. 发明授权
    • Image forming apparatus
    • 图像形成装置
    • US09057990B2
    • 2015-06-16
    • US13835637
    • 2013-03-15
    • Wataru Yamaguchi
    • Wataru Yamaguchi
    • G03G15/08G03G15/16G03G21/16
    • G03G15/16G03G15/1685G03G21/168
    • An image forming apparatus including an image forming unit; a belt unit with a first roller, a second roller, an endless belt, and a frame; a frame positioning member arranged in the belt unit to define a position of the frame in the axial direction with respect to a body; a first roller positioning member arranged in the belt unit to define a position of the first roller in the axial direction with respect to the frame; a guiding member arranged in a position corresponding to one of axial-end sides of the first roller along the axial direction in the endless belt; and an engageable member arranged on the one of axial-end sides of the first roller in the belt unit, is provided. The frame positioning member, the first roller positioning member, and the engageable member are arranged on the same axial-end side along the axial direction.
    • 一种图像形成装置,包括图像形成单元; 具有第一辊,第二辊,环形带和框架的带单元; 框架定位构件,布置在所述带单元中以限定所述框架相对于主体在轴向方向上的位置; 布置在所述带单元中以限定所述第一辊相对于所述框架在轴向方向上的位置的第一滚子定位构件; 引导构件,其布置在与所述环形带中的轴向方向上的所述第一辊的轴向端侧中的一个相对应的位置; 以及设置在带单元中的第一辊的轴向端侧中的一个上的可接合构件。 框架定位构件,第一辊定位构件和可接合构件沿着轴向布置在同一轴向端侧。
    • 25. 发明授权
    • Measuring apparatus and exposure device
    • 测量装置和曝光装置
    • US08902430B2
    • 2014-12-02
    • US13007006
    • 2011-01-14
    • Wataru YamaguchiRyo SasakiTakahiro Matsumoto
    • Wataru YamaguchiRyo SasakiTakahiro Matsumoto
    • G01B9/02
    • G01B9/02044G01B9/02022G01B9/0209G01B2290/35G01B2290/70
    • An apparatus includes a system configured to split a light emitted from a light source into reference light and subject light, cause the subject light to enter into an object, and combine the subject light reflected by the object with the reference light, a detection unit configured to detect coherent light between the combined subject and reference lights, an element, provided within a light path of the reference light or the subject light, configured to change a path length difference between the reference light and the subject light and a relative position between the reference light and the subject light in a light receiving surface of the detection unit, and a position-variable mechanism configured to cause a position of the optical element to be changeable, wherein, by changing a position of the element, the optical path length difference and the relative position are independently adjusted.
    • 一种设备,包括:将从光源发射的光分成参考光和被摄体光的系统,使被摄体光进入物体,并将由物体反射的被摄体光与参考光组合;检测单元, 以检测组合的对象和参考光之间的相干光,设置在参考光或被摄体光的光路内的元件,被配置为改变参考光和被摄体光之间的路径长度差,以及相对于第 参考光和被摄体光在检测单元的光接收表面中;以及位置可变机构,被配置为使得光学元件的位置可变,其中,通过改变元件的位置,光程长度差 并且相对位置被独立调整。
    • 26. 发明授权
    • Drawing apparatus and method of manufacturing article
    • 绘图装置及制作方法
    • US08729509B2
    • 2014-05-20
    • US13334247
    • 2011-12-22
    • Wataru YamaguchiTakahiro Matsumoto
    • Wataru YamaguchiTakahiro Matsumoto
    • G21K5/04H01J37/04H01J37/317
    • H01J37/04B82Y10/00B82Y40/00G21K5/04H01J37/3045H01J37/3174H01J37/3177H01J2237/24578H01J2237/31774
    • A drawing apparatus performs drawing on a substrate with a plurality of charged particle beams. The apparatus comprises a stage configured to hold the substrate and to be moved; a projection system configured to project the plurality of charged particle beams onto the substrate; a measurement device configured to detect a charged particle beam that reaches the measurement device due to a charged particle beam incident, via the projection system, on a mark formed on the substrate, to measure a position of the mark; and a controller. The controller is configured to control operations of the projection system and the measurement device so that the position of the mark is measured with at least one of the plurality of charged particle beams, in parallel with drawing on the substrate with a part of the plurality of charged particle beams.
    • 绘图装置在具有多个带电粒子束的衬底上进行绘图。 该装置包括一个被配置成保持基板并被移动的台; 投影系统,被配置为将所述多个带电粒子束投影到所述基板上; 测量装置,被配置为检测由于通过所述投影系统在形成在所述基板上的标记上入射的带电粒子束到达所述测量装置的带电粒子束,以测量所述标记的位置; 和控制器。 控制器被配置为控制投影系统和测量装置的操作,使得利用多个带电粒子束中的至少一个来测量标记的位置,与基板上的绘图平行,其中多个 带电粒子束。
    • 28. 发明授权
    • Surface shape measuring apparatus, exposure apparatus, and device manufacturing method
    • 表面形状测量装置,曝光装置和装置制造方法
    • US08564761B2
    • 2013-10-22
    • US12393767
    • 2009-02-26
    • Wataru YamaguchiTakahiro MatsumotoHideki Ina
    • Wataru YamaguchiTakahiro MatsumotoHideki Ina
    • G03B27/72
    • G01B11/2441G01B9/02063G01B9/02072G01B9/0209G01B11/0608G01B2290/70G03F9/7026G03F9/7049
    • A surface shape measuring apparatus includes an illumination system and a light receiving system. The illumination system splits wide-band light from a light source into measurement light and reference light, illuminates the measurement light to obliquely enter a surface of the film, and illuminates the reference light to obliquely enter a reference mirror. The light receiving system combines the measurement light reflected by the surface of the film and the reference light reflected by the reference mirror with each other and introduces the combined light to a photoelectric conversion element. An incident angle of the measurement light upon the surface of the film and an incident angle of the reference light upon the reference mirror are each larger than the Brewster's angle. S-polarized light and p-polarized light included in the measurement light entering a surface of the substrate have equal intensity on the photoelectric conversion element.
    • 表面形状测量装置包括照明系统和光接收系统。 照明系统将来自光源的宽带光分解为测量光和参考光,照射测量光以倾斜地进入胶片的表面,并照亮参考光以倾斜地进入参考镜。 光接收系统将由膜的表面反射的测量光与由参考反射镜反射的参考光相互组合,并将组合的光引入光电转换元件。 在薄膜表面上的测量光的入射角和参考反射镜上的参考光的入射角均大于布鲁斯特角。 入射到衬底表面的测量光中包括的S偏振光和p偏振光在光电转换元件上具有相等的强度。
    • 30. 发明申请
    • Image Forming Apparatus
    • 图像形成装置
    • US20120134727A1
    • 2012-05-31
    • US13307248
    • 2011-11-30
    • Wataru YamaguchiShigeki Hayakawa
    • Wataru YamaguchiShigeki Hayakawa
    • G03G15/00
    • G03G15/167G03G15/168G03G21/1642G03G21/1647G03G21/1695G03G2215/00139G03G2221/1654G03G2221/1684
    • An image forming apparatus is provided which includes a main body, and a belt unit removable from the main body. The belt unit includes a belt extending between a drive roller and a driven roller and configured to rotate such that a recording medium is fed in a feeding direction. The apparatus further includes a feeding device that feeds the recording medium to the belt, and a positioning section including an engaging portion and an engaged portion, the positioning section being configured to position the belt unit when the engaging portion engages the engaged portion. Also, an urging member is provided that urges the belt unit and causes a pressing force to be applied between the engaging portion and the engaged portion. An urging direction of the urging member has a component in the feeding direction.
    • 提供了一种图像形成装置,其包括主体和从主体移除的皮带单元。 带单元包括在驱动辊和从动辊之间延伸的带,其构造成旋转,使得记录介质沿进给方向进给。 所述装置还包括将所述记录介质馈送到所述带的进给装置和包括接合部分和被接合部分的定位部分,所述定位部分构造成当所述接合部分接合所述被接合部分时定位所述带单元。 此外,设置有推动带单元并且在接合部和被接合部之间施加按压力的施力构件。 推动构件的推动方向具有沿进给方向的分量。