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21. 发明申请

US20090064521A1 HEIGHT POSITION DETECTOR FOR WORK HELD ON CHUCK TABLE 有权
标题翻译：高度位置检测器在工作台上工作
公开(公告)号：US20090064521A1
公开(公告)日：2009-03-12
申请号：US12189910
申请日：2008-08-12
申请人： Taiki Sawabe , Keiji Nomaru
发明人： Taiki Sawabe , Keiji Nomaru
IPC分类号： G01D15/00
CPC分类号： G01B11/0608 , B23K26/048 , B23K26/40 , B23K26/53 , B23K2101/40 , B23K2103/50
摘要： A height position detector for detecting the height position of an upper surface of a work held on a chuck table, including: an annular spot forming part by which the spot shape of a laser beam oscillated by a laser beam oscillator is formed into an annular shape; a first beam splitter by which the laser beam with the spot shape formed into the annular shape is guided into a first path; a light condenser by which the laser beam guided into the first path is condensed to irradiate the work therewith; a second beam splitter for splitting the reflected light reflected by the work; a first light receiving element for receiving the reflected light transmitted through the second beam splitter; a second light receiving element for receiving the reflected light reflected by the second beam splitter; a light reception region restricting part for restricting the light reception region for the reflected light received by the second light receiving element; and a controller for determining the height position of the upper surface of the work on the basis of the ratio between the quantity of light received by the first light receiving element and the quantity of light received by the second light receiving element.
摘要翻译：一种高度位置检测器，用于检测夹持在卡盘台上的工件的上表面的高度位置，该环形点形成部分由激光束振荡器振荡的激光束的光点形状形成为环形形状 ; 具有形成为环状的点状激光的第一分束器被引导到第一路径中; 引导到第一路径的激光束被聚光以照射工件的光聚光器; 用于分离由工件反射的反射光的第二分束器; 第一光接收元件，用于接收透射通过第二分束器的反射光; 第二光接收元件，用于接收由第二分束器反射的反射光; 用于限制由第二光接收元件接收的反射光的光接收区域的光接收区域限制部分; 以及控制器，用于根据由第一光接收元件接收的光量与由第二光接收元件接收的光量之比来确定工件的上表面的高度位置。

22. 发明授权

US07499185B2 Measuring device for workpiece held on chuck table 有权
标题翻译：夹持在工作台上的工件测量装置
公开(公告)号：US07499185B2
公开(公告)日：2009-03-03
申请号：US12028470
申请日：2008-02-08
申请人： Keiji Nomaru , Taiki Sawabe
发明人： Keiji Nomaru , Taiki Sawabe
IPC分类号： G01B11/24 , G01B11/14
CPC分类号： G01B11/0608 , B23K26/04 , B23K26/046 , B23K26/0853 , G01B2210/50
摘要： A measuring device for measuring the height of a workpiece held on a chuck table provided in a processing machine. The measuring device includes a white light source for emitting white light, an acousto-optic deflecting unit for separating the white light emitted from the white light source to produce a flux of diffracted light and for swinging the flux of the diffracted light over a predetermined angular range by applying a voltage, a pinhole mask for passing light having a part of the wavelengths of the diffracted light produced by the acousto-optic deflecting unit, and a chromatic aberration lens for focusing the light passed through the pinhole mask and for applying the focused light to the workpiece held on the chuck table.
摘要翻译：一种用于测量保持在设置在加工机器中的卡盘台上的工件的高度的测量装置。测量装置包括用于发射白光的白光源，声光偏转单元，用于分离从白光源发射的白光，以产生衍射光束，并将衍射光的光束摆动在预定角度通过施加电压的范围，用于通过具有由声光偏转单元产生的衍射光的一部分波长的光的针孔掩模和用于聚焦通过针孔掩模的光并用于施加聚焦的色差透镜光照到卡盘上的工件。

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