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    • 30. 发明申请
    • SEMICONDUCTOR DEVICE FABRICATING METHOD
    • 半导体器件制造方法
    • US20110117709A1
    • 2011-05-19
    • US12618585
    • 2009-11-13
    • Chih-Ping LINShih-Ming CHENHsiao-Ying YANGWen-Hsien LIUPo-Sheng HU
    • Chih-Ping LINShih-Ming CHENHsiao-Ying YANGWen-Hsien LIUPo-Sheng HU
    • H01L21/8238
    • H01L21/823462
    • A semiconductor device fabricating method is described. The semiconductor device fabricating method includes providing a substrate. A first gate insulating layer and a second gate insulating layer are formed on the substrate, respectively. A gate layer is blanketly formed. A portion of the gate layer, the first gate insulating layer and the second gate insulating layer are removed to form a first gate, a remaining first gate insulating layer, a second gate and a remaining second gate insulating layer. The remaining first gate insulating layer not covered by the first gate has a first thickness, and the remaining second gate insulating layer not covered by the second gate has a second thickness, wherein a ratio between the first thickness and the second thickness is about 10 to 20. A pair of first spacers and a pair of second spacers are formed on sidewalls of the first gate and the second gate, respectively.
    • 描述半导体器件制造方法。 半导体器件制造方法包括提供衬底。 分别在基板上形成第一栅极绝缘层和第二栅极绝缘层。 门层完全形成。 去除栅极层,第一栅极绝缘层和第二栅极绝缘层的一部分以形成第一栅极,剩余的第一栅极绝缘层,第二栅极和剩余的第二栅极绝缘层。 未被第一栅极覆盖的剩余的第一栅极绝缘层具有第一厚度,并且未被第二栅极覆盖的剩余的第二栅极绝缘层具有第二厚度,其中第一厚度和第二厚度之间的比率为约10度 分别在第一栅极和第二栅极的侧壁上形成一对第一间隔物和一对第二间隔物。