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    • 25. 发明授权
    • Excimer laser patterning of a novel resist
    • 新型抗蚀剂的准分子激光图案化
    • US4780177A
    • 1988-10-25
    • US152510
    • 1988-02-05
    • Robert J. WojnarowskiCharles W. Eichelberger
    • Robert J. WojnarowskiCharles W. Eichelberger
    • G03F7/20H01L23/538H05K3/00H05K3/06B44C1/22B29C37/00C03C15/00C23F1/02
    • G03F7/2006H01L23/5389H05K3/0082H01L2924/0002H05K2203/0505H05K2203/0577H05K2203/107H05K3/0032H05K3/064Y10T29/49155Y10T428/12361Y10T428/24322Y10T428/31504
    • A dual layer resist configuration is employed for photopatterning high resolution conductive patterns on underlying polymeric or ceramic substrates, particularly substrates exhibiting surface roughness and non-planar design features such as channels, bosses and ridges. More particularly, a thin underlayer of ablatable photoabsorptive polymer is disposed on a metal coated substrate, after which a thicker layer of substantially transparent material is disposed over the polymer. A beam of laser energy, such as that produced by an ultraviolet excimer laser, is directed through the upper layer and is absorbed by the lower layer which is ablated and simultaneously removes the thick layer above it. This results in the ability to etch high resolution features on polymeric and other substrates, particularly copper coated polyetherimide circuit boards. The resist system is also applicable to VLSI wafers even though such wafers usually do not exhibit surface roughness on the scale generally considered herein. It is also equally applicable in various high density interconnect systems used for the direct connection of chip devices. A mask for patterning and a method for making it are also seen to be desirable because of the high laser energy densities generally desired for thorough ablation.
    • 采用双层抗蚀剂构造来在下面的聚合物或陶瓷衬底上,特别是表现出表面粗糙度和非平面设计特征的衬底(如通道,凸台和脊)上的高分辨率导电图案进行光刻图形化。 更具体地说,将可消融的光吸收聚合物的薄的底层设置在金属涂覆的基底上,之后在该聚合物上设置较厚的基本上透明的材料层。 诸如由紫外准分子激光器产生的激光能量束被引导通过上层,并被被消融的下层吸收并同时去除其上方的厚层。 这导致在聚合物和其它基底,特别是铜涂覆的聚醚酰亚胺电路板上蚀刻高分辨率特征的能力。 抗蚀剂体系也适用于VLSI晶圆,即使这样的晶片通常在本文通常考虑的刻度上不表现出表面粗糙度。 它也同样适用于用于直接连接芯片器件的各种高密度互连系统。 由于通常需要彻底消融的高激光能量密度,用于图案的掩模和用于制造掩膜的方法也被认为是期望的。
    • 27. 发明授权
    • Alternate field luminance enhancement in a spectrum conserving
television system
    • 频谱保存电视系统中的替代场亮度增强
    • US4646149A
    • 1987-02-24
    • US697560
    • 1985-02-01
    • Robert J. WojnarowskiCharles W. Eichelberger
    • Robert J. WojnarowskiCharles W. Eichelberger
    • H04N7/08H04N7/12H04N11/10H04N7/04H04N11/06
    • H04N11/10H04N7/0806H04N7/12
    • An improved television bandwidth compression system allows two television programs to simultaneously utilize the bandwidth normally allowed for one television program. The basic bandwidth compression system comprises a transmitter which receives composite video signals from two program sources. The video processing circuitry of the transmitter provides an output signal wherein time-compressed chrominance information for the two program sources is sent on alternate lines during the normal horizontal retrace time and the luminance information for both program sources is sent during the active video time for each line. The receiver synthesizes a composite video signal of a selected program from the output signal transmitted from the transmitter. This basic system is improved by interlacing high and low bandwidth-limited luminance signals for alternating fields of each program in a manner such that when a high bandwidth-limited luminance signal is transmitted for one program, a low bandwidth-limited luminance signal is transmitted for the other program so that the total bandwidth allocated for the luminance signals is not exceeded.
    • 改进的电视带宽压缩系统允许两个电视节目同时利用通常允许一个电视节目的带宽。 基本带宽压缩系统包括从两个节目源接收复合视频信号的发射机。 发射机的视频处理电路提供一个输出信号,其中两个节目源的时间压缩色度信息在正常的水平回扫时间期间以交替的线路发送,并且在两个节目源的亮度信息在每个 线。 接收机根据从发射机发射的输出信号,合成所选节目的复合视频信号。 通过以每个程序的交变场交错高和低带宽限制亮度信号的方式来改进该基本系统,使得当为一个程序发送高带宽限制的亮度信号时,发送低带宽限制的亮度信号用于 另一个程序使得不超过分配给亮度信号的总带宽。
    • 29. 发明授权
    • Electrical conductors arranged in multiple layers
    • 电导体多层布置
    • US4522888A
    • 1985-06-11
    • US497977
    • 1983-05-25
    • Charles W. EichelbergerRobert J. Wojnarowski
    • Charles W. EichelbergerRobert J. Wojnarowski
    • H05K1/09H05K3/18H05K3/24H05K3/46C23C3/02H05K3/00
    • H05K3/246H05K3/46H05K1/095H05K2201/0347H05K3/18Y10S428/901Y10T428/12014
    • A low-cost electrical conductor is prepared by applying a mixture of a metallic powder and a polymer on a substrate, curing the polymer, effecting an augmentation replacement reaction to replace some of the metallic powder with a more noble metal in such a way that the total volume of deposited metal at the surface exceeds that of the original metal powder replaced, and thereafter applying a dielectric material to selected areas of the conductor thus formed. Imperfections such as pin holes and screen marks can be eliminated by heating the dielectric material to cause a degree of flow. Multiple layer interconnected conductors can be prepared by reapplying the mixture of metallic powder and polymer such that a portion thereof contacts the first prepared conductor, curing the polymer and effecting an augmentation replacement reaction with a metal which is more noble than the powder metal and the replacement metal of the first conductor.
    • 通过将金属粉末和聚合物的混合物施加在基材上,固化聚合物,进行增加置换反应以用更贵金属代替一些金属粉末,制备低成本电导体,使得 表面上沉积金属的总体积超过原来金属粉末的总体积,然后将电介质材料施加到如此形成的导体的选定区域。 可以通过加热介电材料以导致流动程度来消除诸如针孔和丝网痕迹的缺陷。 可以通过重新使用金属粉末和聚合物的混合物来制备多层互连导体,使得其一部分接触第一制备的导体,固化聚合物并且利用比粉末金属更高的金属和替换的金属进行增强置换反应 第一导体的金属。