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    • 22. 发明授权
    • Method and apparatus for redressing defective photomask
    • 用于纠正有缺陷的光掩模的方法和装置
    • US4463073A
    • 1984-07-31
    • US394642
    • 1982-07-01
    • Tateoki MiyauchiKatsuro MizukoshiMikio HongoMasao MitaniMasaaki OkunakaTakao KawanabeIsao Tanabe
    • Tateoki MiyauchiKatsuro MizukoshiMikio HongoMasao MitaniMasaaki OkunakaTakao KawanabeIsao Tanabe
    • G03F1/00G03F1/72H01L21/027H01L21/30G03F9/00
    • G03F1/72H01L21/30Y10S430/139Y10S430/146
    • A method and apparatus for repairing defect portions of a photomask. A complex material from which a light shading material can be deposited is applied over the photomask. A white (blank) defect region is irradiated with a continuous wave laser light beam projected in a slit-like light image to thereby convert the complex material into the shading material. After washing, a half-deposited portion formed in a peripheral portion of the light shading region is further deposited by a post-baking process. Those portions of the light shading film which depart from the desired mask pattern are removed together with black (solid) defect portion originally present in the photomask through irradiation with a pulse laser light beam. The pulse laser is constituted by a Dye-laser, while the continuous wave laser is constituted by an Ar-laser. A specific half-mirror which transmits therethrough Ar-laser light while reflecting Dye-laser light is displaceable provided. The white and the black defects are selectively centered on a same optical axis of an optical projection system including a slit and a condenser lens, whereby the white and the black defect portions are each removed through irradiation with the associated laser light projected thereto in a slit-like light image through the same optical projection system.
    • 一种用于修复光掩模的缺陷部分的方法和装置。 将光阴影材料沉积的复合材料施加在光掩模上。 用投影在狭缝状光图像中的连续波激光束照射白色(空白)缺陷区域,从而将复合材料转换成遮光材料。 洗涤后,通过后烘烤处理进一步沉积形成在遮光区域的周边部分中的半沉积部分。 通过照射脉冲激光,与原来存在于光掩模中的黑色(实心)缺陷部分一起除去遮光膜的偏离所需掩模图案的那些部分。 脉冲激光由染料激光器构成,而连续波激光由Ar激光器构成。 通过反射染料激光而透过其的Ar激光的特定半反射镜是可置换的。 白色和黑色缺陷选择性地集中在包括狭缝和聚光透镜的光学投影系统的相同光轴上,由此白色和黑色缺陷部分通过照射投射到狭缝中的相关激光而被去除 类似的光图像通过相同的光学投影系统。
    • 24. 发明授权
    • Semiconductor chip, semiconductor wafer, semiconductor device and method of manufacturing the semiconductor device
    • 半导体芯片,半导体晶片,半导体器件及半导体器件的制造方法
    • US06403476B2
    • 2002-06-11
    • US09917208
    • 2001-07-30
    • Jin MurayamaMasao Mitani
    • Jin MurayamaMasao Mitani
    • H01L2144
    • H01L21/481B41J2/1603B41J2/1631B41J2/1632Y10S438/945
    • An object of the present invention is forming a concave portion (including a penetration hole) in a semiconductor substrate by a sandblast method without causing a defect such as a chip or a crack in processing ends of the concave portion. In order to achieve the object, in a semiconductor wafer in which a plurality of semiconductor chips are formed, a metal film is formed on the semiconductor substrate at least in a region of a predetermined range in an inside and an outside of an circumferential portion except for a central portion and its vicinity of a region in that the concave portion (including the penetration hole) of the respective semiconductor chips is to be formed. Then, the entire surface of the semiconductor wafer including the metal film is masked except for the region in that the concave portion of the respective semiconductor chips is to be formed. With this state, the concave portion is formed in the respective semiconductor chips formed on the semiconductor wafer by the sandblast method.
    • 本发明的目的是通过喷砂法在半导体衬底中形成凹部(包括穿透孔),而不会在凹部的处理端部引起诸如芯片或裂纹的缺陷。 为了实现该目的,在其中形成有多个半导体芯片的半导体晶片中,至少在周向部分的内部和外部的至少一个预定范围的区域中在半导体衬底上形成金属膜,除了 对于要形成各个半导体芯片的凹部(包括贯通孔)的区域的中心部分及其附近。 然后,除了要形成各个半导体芯片的凹部的区域之外,掩模包括金属膜的半导体晶片的整个表面。 在这种状态下,通过喷砂法在凹凸部分形成在半导体晶片上形成的各个半导体芯片中。
    • 28. 发明授权
    • Thermal fixing device
    • 热固定装置
    • US5386281A
    • 1995-01-31
    • US64805
    • 1993-05-21
    • Masao MitaniKazuo Shimizu
    • Masao MitaniKazuo Shimizu
    • G03G15/20G03G21/00
    • G03G15/2064
    • A thermal fixing device including a pair of rotating rollers which are press-contacted to each other, a heating section associated with at least one of the rollers and an image supporter having an unfixed toner image which is passed through a gap between the rollers so that the unfixed toner image is thermally (melt) fixed, the heating section having an integral structure type heating and cooling device which includes a cooler and a heater acting as a support, and wherein the fixing device further includes a thin endless metal belt which rotates while contacting the integral structure type device and which has a non-adhesive film on the outer surface of the belt, and a drive roller which drives the endless metal belt for rotation while applying tension to the endless metal belt. The surface temperature at a portion where the endless metal belt is in pressure-contact with the image supporter is first increased to a temperature (Tm) near the melting point of the toner and then cooled so that the image supporter can be stripped prior to the endless metal belt, and so that the temperature is higher than the glass transition point of the toner and lower than the softening point of the toner.
    • 一种热定影装置,包括彼此压接的一对旋转辊,与至少一个辊相关联的加热部分和具有通过辊之间的间隙的未定影调色剂图像的图像载体,使得 未定影的调色剂图像被热(熔融)固定,加热部分具有包括冷却器和作为支撑件的加热器的整体结构型加热和冷却装置,并且其中定影装置还包括薄的环形金属带,其旋转同时 接触一体结构型装置,并且在带的外表面上具有非粘性膜;以及驱动辊,其驱动环形金属带旋转同时向环形金属带施加张力。 首先将环形金属带与图像载体压力接触的部分的表面温度升高到接近调色剂熔点的温度(Tm),然后冷却,使图像支持体在 并且使得温度高于调色剂的玻璃化转变点并低于调色剂的软化点。
    • 29. 发明授权
    • Electrophotographic recording apparatus and system including a
dielectric belt and transfer and fixing means
    • 电磁记录装置和系统,包括电介质带和传送和固定装置
    • US5216466A
    • 1993-06-01
    • US858088
    • 1992-03-26
    • Masao Mitani
    • Masao Mitani
    • G03G21/16G03G15/00G03G15/01G03G15/05G03G15/18G03G15/20G03G21/00
    • G03G15/18G03G15/0194G03G2215/0119G03G2215/0497G03G2215/1685
    • In the improved electrophotographic recording apparatus, exposure is performed on a photoreceptor drum 7 in response to a signal from an optical head 13 provided in the vicinity of the drum 7, a thin endless metal belt 4 having a dielectric layer on the outer surface being brought into contact with the drum 7 so as to form an electrostatic latent image on the belt 4 and, thereafter, the latent image being developed with a toner 9 to produce a toner image which is then transferred onto a transfer medium 10 and permanently fixed to record the final image. This apparatus is free from deterioration of the photoreceptor and it is only the toner which is one of the consumables that needs maintenance, thereby reducing not only the economic burden on the part of the user but also the number of parts or components. Two or more units of this apparatus may be arranged in series in a geometric pattern to construct a multi-color printing electrophotographic recording system.
    • 在改进的电子照相记录装置中,响应于来自设置在鼓7附近的光学头13的信号,对感光鼓7进行曝光,在外表面上具有介电层的薄的环形金属带4 与滚筒7接触,以在皮带4上形成静电潜像,然后用调色剂9显影潜像,以产生调色剂图像,然后转印到转印介质10上并永久固定记录 最后的形象。 该装置没有感光体的劣化,并且仅仅是需要维护的消耗品之一的调色剂,从而不仅减少了使用者的经济负担,而且减少了部件或部件的数量。 该装置的两个或多个单元可以以几何图案串联布置以构成多色印刷电子照相记录系统。