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21. 发明申请

US20120145331A1 METHODS FOR LASER CUTTING ARTICLES FROM ION EXCHANGED GLASS SUBSTRATES 有权
标题翻译：用于从离子交换玻璃基材激光切割文章的方法
公开(公告)号：US20120145331A1
公开(公告)日：2012-06-14
申请号：US13387790
申请日：2010-08-27
申请人： Sinue Gomez , Lisa Anne Moore , Sergio Tsuda
发明人： Sinue Gomez , Lisa Anne Moore , Sergio Tsuda
IPC分类号： C03B21/00
CPC分类号： C03B33/0222 , C03B33/04 , C03B33/091 , Y10T156/1158
摘要： A method of cutting an article (172) from a chemically strengthened glass substrate (110) includes generating a pulsed laser beam (108) from a laser source (106). The pulsed laser beam (108) may have a pulse duration of less than about 1000 fs and an output wavelength such that the chemically strengthened glass substrate (110) is substantially transparent to the pulsed laser beam (108). The pulsed laser beam (108) may be focused to form a beam waist (109) that is positioned in the same horizontal plane as an inner tensile region (124) of the chemically strengthened glass substrate (110). The beam waist (109) may be translated in a first pass along a cut line (116), wherein the beam waist (109) traverses an edge (111) of the chemically strengthened glass substrate. The beam waist (113) may then be translated in a second pass along the cut line (116) such that a crack (119) propagates from the edge (113) along the cut line (116) ahead of the translated beam waist (109) during the second pass.
摘要翻译：从化学强化玻璃基板（110）切割物品（172）的方法包括从激光源（106）产生脉冲激光束（108）。脉冲激光束（108）可以具有小于约1000fs的脉冲持续时间和输出波长，使得化学强化的玻璃基板（110）对脉冲激光束（108）基本上是透明的。脉冲激光束（108）可以被聚焦以形成位于与化学强化玻璃基板（110）的内部拉伸区域（124）相同的水平平面内的光束腰部（109）。梁腰（109）可以沿着切割线（116）沿第一道次平移，其中梁腰（109）穿过化学强化的玻璃基板的边缘（111）。然后可以沿着切割线（116）在第二道次中平移梁腰（113），使得裂缝（119）沿着切割线（116）从边缘（113）沿平移的梁腰（109）前方传播）。

22. 发明授权

US08047023B2 Method for producing titania-doped fused silica glass 有权
标题翻译：制造二氧化钛掺杂熔融石英玻璃的方法
公开(公告)号：US08047023B2
公开(公告)日：2011-11-01
申请号：US09844947
申请日：2001-04-27
申请人： Bradford Giles Ackerman , Kenneth Edward Hrdina , Lisa Anne Moore , Nikki Jo Russo , C. Charles Yu
发明人： Bradford Giles Ackerman , Kenneth Edward Hrdina , Lisa Anne Moore , Nikki Jo Russo , C. Charles Yu
IPC分类号： C03B37/014
CPC分类号： C03C4/0085 , C03B19/1415 , C03B19/1453 , C03B19/1484 , C03B2201/12 , C03B2201/42 , C03B2207/32 , C03B2207/62 , C03B2207/70 , C03C3/06 , C03C3/076 , C03C2201/12 , C03C2201/42 , C03C2203/40 , Y02P40/57
摘要： A method for producing a fused silica glass containing titania includes synthesizing particles of silica and titania by delivering a mixture of a silica precursor and a titania precursor to a burner, growing a porous preform by successively depositing the particles on a deposition surface while rotating and translating the deposition surface relative to the burner, and consolidating the porous preform into a dense glass.
摘要翻译：一种制备含有二氧化钛的熔融石英玻璃的方法包括通过将二氧化硅前体和二氧化钛前体的混合物输送到燃烧器来合成二氧化硅和二氧化钛的颗粒，通过将颗粒依次沉积在沉积表面上同时旋转和平移来生长多孔预型体沉积表面相对于燃烧器，并将多孔预成型件固结成致密的玻璃。

23. 发明授权

US06265115B1 Projection lithography photomask blanks, preforms and methods of making 失效
标题翻译：投影光刻光掩模坯料，预成型件和制造方法
公开(公告)号：US06265115B1
公开(公告)日：2001-07-24
申请号：US09397577
申请日：1999-09-16
申请人： George Edward Berkey , Lisa Anne Moore , Charles Chunzhe Yu
发明人： George Edward Berkey , Lisa Anne Moore , Charles Chunzhe Yu
IPC分类号： G03F900
CPC分类号： C03C4/0085 , C03B19/1415 , C03B19/1423 , C03B19/1453 , C03B19/1469 , C03B19/1492 , C03B2201/07 , C03B2201/075 , C03B2201/12 , C03B2201/21 , C03B2207/02 , C03B2207/06 , C03B2207/20 , C03B2207/32 , C03B2207/52 , C03B2207/54 , C03B2207/66 , C03C3/06 , C03C2201/12 , C03C2201/21 , G03F1/60
摘要： The invention includes methods of making lithography photomask blanks. The invention also includes lithography photomask blanks and preforms for producing lithography photomask. The method of making a lithography photomask blank includes providing a soot deposition surface, producing SiO2 soot particles and projecting the SiO2 soot particles toward the soot deposition surface. The method includes successively depositing layers of the SiO2 soot particle on the deposition surface to form a coherent SiO2 porous glass preform body comprised of successive layers of the SiO2 soot particles and dehydrating the coherent SiO2 glass preform body to remove OH from the preform body. The SiO2 is exposed to and reacted with a fluorine containing compound and consolidated into a nonporous silicon oxyfluoride glass body with parallel layers of striae. The method further includes forming the consolidated silicon oxyfluoride glass body into a photomask blank having a planar surface with the orientation of the striae layer parallel to the photomask blank planar surface.
摘要翻译：本发明包括制造光刻光掩模坯料的方法。本发明还包括光刻光掩模坯料和用于生产光刻光掩模的预成型件。制造光刻光掩模坯料的方法包括提供烟灰沉积表面，产生SiO 2烟灰颗粒并将SiO 2烟灰颗粒投射到烟灰沉积表面。该方法包括在沉积表面上依次沉积SiO 2烟灰颗粒的层，以形成由SiO 2烟灰颗粒的连续层组成的粘结SiO 2多孔玻璃预制体，并使相干的SiO 2玻璃预制体脱水以从预成型体中去除OH。将SiO 2暴露于含氟化合物并与其反应，并固化成具有平行的条纹层的无孔氟氧化硅玻璃体。该方法还包括将固化的氟氧化硅玻璃体形成为具有平坦表面的光掩模坯料，其中条纹层的取向平行于光掩模坯料平面。

24. 发明授权

US08943855B2 Methods for laser cutting articles from ion exchanged glass substrates 有权
标题翻译：从离子交换玻璃基板激光切割制品的方法
公开(公告)号：US08943855B2
公开(公告)日：2015-02-03
申请号：US13387790
申请日：2010-08-27
申请人： Sinue Gomez , Lisa Anne Moore , Sergio Tsuda
发明人： Sinue Gomez , Lisa Anne Moore , Sergio Tsuda
IPC分类号： C03B33/02 , C03B33/04 , C03B33/09
CPC分类号： C03B33/0222 , C03B33/04 , C03B33/091 , Y10T156/1158
摘要： A method of cutting an article (172) from a chemically strengthened glass substrate (110) includes generating a pulsed laser beam (108) from a laser source (106). The pulsed laser beam (108) may have a pulse duration of less than about 1000 fs and an output wavelength such that the chemically strengthened glass substrate (110) is substantially transparent to the pulsed laser beam (108). The pulsed laser beam (108) may be focused to form a beam waist (109) that is positioned in the same horizontal plane as an inner tensile region (124) of the chemically strengthened glass substrate (110). The beam waist (109) may be translated in a first pass along a cut line (116), wherein the beam waist (109) traverses an edge (111) of the chemically strengthened glass substrate. The beam waist (113) may then be translated in a second pass along the cut line (116) such that a crack (119) propagates from the edge (113) along the cut line (116) ahead of the translated beam waist (109) during the second pass.
摘要翻译：从化学强化玻璃基板（110）切割物品（172）的方法包括从激光源（106）产生脉冲激光束（108）。脉冲激光束（108）可以具有小于约1000fs的脉冲持续时间和输出波长，使得化学强化的玻璃基板（110）对脉冲激光束（108）基本上是透明的。脉冲激光束（108）可以被聚焦以形成位于与化学强化玻璃基板（110）的内部拉伸区域（124）相同的水平平面内的光束腰部（109）。梁腰（109）可以沿着切割线（116）沿第一道次平移，其中梁腰（109）穿过化学强化的玻璃基板的边缘（111）。然后可以沿着切割线（116）在第二道次中平移梁腰（113），使得裂缝（119）沿着切割线（116）从边缘（113）沿平移的梁腰（109）前方传播）。

25. 发明授权

US08616024B2 Methods for forming grooves and separating strengthened glass substrate sheets 有权
标题翻译：形成槽和分离强化玻璃基板的方法
公开(公告)号：US08616024B2
公开(公告)日：2013-12-31
申请号：US13304811
申请日：2011-11-28
申请人： Ivan A Cornejo , Gregory Scott Glaesemann , Sinue Gomez , Lisa Anne Moore , Sergio Tsuda , Michael Henry Wasilewski
发明人： Ivan A Cornejo , Gregory Scott Glaesemann , Sinue Gomez , Lisa Anne Moore , Sergio Tsuda , Michael Henry Wasilewski
IPC分类号： C03B33/023 , C03B15/00
CPC分类号： B26F3/002 , B23K26/0624 , B23K26/0648 , B23K26/0665 , B23K26/364 , B24C1/045 , B24C1/10 , B24C3/322 , C03B23/02 , C03B33/033 , C03C15/00 , C03C23/0025 , H01L21/67092 , Y10T225/12 , Y10T428/15
摘要： Methods for separating strengthened glass articles from glass substrate sheets and strengthened glass substrate sheets are described herein. In one embodiment, a method of separating a glass article from a glass substrate sheet includes forming at least one groove on at least one surface of the glass substrate sheet. The at least one groove continuously extends around a perimeter of the glass article and extends partially through a thickness of the glass substrate sheet. The method further includes strengthening the glass substrate sheet by a strengthening process and separating the glass article from the glass substrate sheet along the at least one groove such that one or more edges of the glass article are under compressive stress. In another embodiment, a strengthened glass substrate sheet includes an ion exchanged glass having one or more grooves in one or more strengthened surface layers, the one or more grooves defining glass articles.
摘要翻译：本文描述了将玻璃制品与玻璃基片和强化玻璃基片分离的方法。在一个实施例中，将玻璃制品从玻璃基片分离的方法包括在玻璃基片的至少一个表面上形成至少一个凹槽。所述至少一个凹槽围绕所述玻璃制品的周边连续地延伸并且部分延伸穿过所述玻璃基片的厚度。该方法还包括通过加强工艺来加强玻璃基片，并沿着至少一个凹槽将玻璃制品与玻璃基片分开，使得玻璃制品的一个或多个边缘处于压应力下。在另一个实施例中，强化的玻璃基板包括在一个或多个加强表面层中具有一个或多个凹槽的离子交换玻璃，所述一个或多个凹槽限定玻璃制品。

26. 发明申请

US20120196071A1 STRENGTHENED GLASS SUBSTRATE SHEETS AND METHODS FOR FABRICATING GLASS PANELS FROM GLASS SUBSTRATE SHEETS 有权
标题翻译：强化玻璃基板和玻璃基板制作玻璃面板的方法
公开(公告)号：US20120196071A1
公开(公告)日：2012-08-02
申请号：US13018904
申请日：2011-02-01
申请人： Ivan A. Cornejo , Sinue Gomez , Lisa Anne Moore , Sergio Tsuda
发明人： Ivan A. Cornejo , Sinue Gomez , Lisa Anne Moore , Sergio Tsuda
IPC分类号： B65D65/28 , C03C17/00 , C03C21/00 , C03B33/00
CPC分类号： B28D1/00 , B23K26/0624 , B23K26/382 , B23K26/40 , B23K2103/50 , C03C3/083 , C03C3/091 , C03C15/02 , C03C21/002 , G02F1/133351 , Y10T428/15
摘要： Strengthened glass substrate sheets and methods of fabricating glass panels from glass substrate sheets are disclosed. In one embodiment, a method includes forming at least one series of holes through a thickness of the glass substrate sheet, wherein the at least one series of holes defines a perimeter of the glass panel to be separated from the glass substrate sheet. The method further includes strengthening the glass substrate sheet by a strengthening process, and separating the glass panel from the glass substrate sheet along the at least one series of holes. At least a portion of one or more edges of the glass panel has an associated edge compressive layer. In another embodiment, a strengthened glass substrate sheet includes at least one series of holes that defines a perimeter of one or more glass panels to be separated from the strengthened glass substrate sheet.
摘要翻译：公开了玻璃基板的加强玻璃基板和从玻璃基片制造玻璃面板的方法。在一个实施例中，一种方法包括通过玻璃基板的厚度形成至少一系列孔，其中至少一系列孔限定玻璃板的与玻璃基板分离的周长。该方法还包括通过强化工艺来加强玻璃基片，以及沿着至少一系列的孔将玻璃面板与玻璃基片分开。玻璃面板的一个或多个边缘的至少一部分具有相关联的边缘压缩层。在另一个实施例中，强化的玻璃基板包括至少一系列的孔，其限定要从强化玻璃基板分离的一个或多个玻璃板的周边。

27. 发明申请

US20120135177A1 METHODS FOR FORMING GROOVES AND SEPARATING STRENGTHENED GLASS SUBSTRATE SHEETS 有权
标题翻译：用于形成沟槽和分离强化玻璃基板的方法
公开(公告)号：US20120135177A1
公开(公告)日：2012-05-31
申请号：US13304811
申请日：2011-11-28
申请人： Ivan A. Cornejo , Gregory Scott Glaesemann , Sinue Gomez , Lisa Anne Moore , Sergio Tsuda , Michael Henry Wasilewski
发明人： Ivan A. Cornejo , Gregory Scott Glaesemann , Sinue Gomez , Lisa Anne Moore , Sergio Tsuda , Michael Henry Wasilewski
IPC分类号： B32B3/00 , B26F3/00
CPC分类号： B26F3/002 , B23K26/0624 , B23K26/0648 , B23K26/0665 , B23K26/364 , B24C1/045 , B24C1/10 , B24C3/322 , C03B23/02 , C03B33/033 , C03C15/00 , C03C23/0025 , H01L21/67092 , Y10T225/12 , Y10T428/15
摘要： Methods for separating strengthened glass articles from glass substrate sheets and strengthened glass substrate sheets are described herein. In one embodiment, a method of separating a glass article from a glass substrate sheet includes forming at least one groove on at least one surface of the glass substrate sheet. The at least one groove continuously extends around a perimeter of the glass article and extends partially through a thickness of the glass substrate sheet. The method further includes strengthening the glass substrate sheet by a strengthening process and separating the glass article from the glass substrate sheet along the at least one groove such that one or more edges of the glass article are under compressive stress. In another embodiment, a strengthened glass substrate sheet includes an ion exchanged glass having one or more grooves in one or more strengthened surface layers, the one or more grooves defining glass articles.
摘要翻译：本文描述了将玻璃制品与玻璃基片和强化玻璃基片分离的方法。在一个实施例中，将玻璃制品从玻璃基片分离的方法包括在玻璃基片的至少一个表面上形成至少一个凹槽。所述至少一个凹槽围绕所述玻璃制品的周边连续地延伸并且部分延伸穿过所述玻璃基片的厚度。该方法还包括通过加强工艺来加强玻璃基片，并沿着至少一个凹槽将玻璃制品与玻璃基片分开，使得玻璃制品的一个或多个边缘处于压应力下。在另一个实施例中，强化的玻璃基板包括在一个或多个加强表面层中具有一个或多个凹槽的离子交换玻璃，所述一个或多个凹槽限定玻璃制品。

28. 发明授权

US07964522B2 F-doped silica glass and process of making same 失效
标题翻译：掺杂F的石英玻璃及其制造方法
公开(公告)号：US07964522B2
公开(公告)日：2011-06-21
申请号：US11891984
申请日：2007-08-14
申请人： Lisa Anne Moore , Charlene Marie Smith
发明人： Lisa Anne Moore , Charlene Marie Smith
IPC分类号： C03C3/06 , C03C3/112 , C03B19/06 , C03B15/00 , C03B32/00 , C03B17/00
CPC分类号： C03B19/1461 , C03B19/12 , C03B19/14 , C03B19/1453 , C03B2201/07 , C03B2201/075 , C03B2201/12 , C03B2201/21 , C03B2201/23 , C03C3/061 , C03C2201/11 , C03C2201/12 , C03C2201/21 , C03C2201/22 , C03C2201/40 , C03C2201/50 , Y02P40/57
摘要： An F-doped silica glass, a process for making the glass, an optical member comprising the glass, and an optical system comprising such optical member. The glass material comprises 0.1-5000 ppm by weight of fluorine. The glass material according to certain embodiments of the present invention has low polarization-induced birefringence, low LIWFD and low induced absorption at 193 nm.
摘要翻译： F掺杂石英玻璃，制造玻璃的方法，包括玻璃的光学构件和包括这种光学构件的光学系统。玻璃材料包含0.1-5000ppm重量的氟。根据本发明的某些实施方案的玻璃材料在193nm处具有低偏振诱发双折射，低LIWFD和低诱导吸收。

29. 发明授权

US07928026B2 Synthetic silica material with low fluence-dependent-transmission and method of making the same 有权
标题翻译：合成二氧化硅材料，具有低通量依赖性传输和制作相同的方法
公开(公告)号：US07928026B2
公开(公告)日：2011-04-19
申请号：US11261005
申请日：2005-10-28
申请人： Dana Craig Bookbinder , Kenneth Edward Hrdina , Glenn Eric Kohnke , Lisa Anne Moore , Susan Lee Schiefelbein , Charlene Marie Smith , Ulrich W H Neukirch
发明人： Dana Craig Bookbinder , Kenneth Edward Hrdina , Glenn Eric Kohnke , Lisa Anne Moore , Susan Lee Schiefelbein , Charlene Marie Smith , Ulrich W H Neukirch
IPC分类号： C03C3/06 , C03B32/00 , C03B15/00 , C03B17/00 , C03B19/00 , C03B19/06
CPC分类号： C03C3/06 , C03C4/0071 , C03C4/0085 , C03C2201/21 , C03C2201/23 , C03C2201/54
摘要： Disclosed in the application are a synthetic silica glass having low fluence-dependent transmission, particularly at about 193 nm, and a process for making the same. The glass may desirably exhibit a low level of fluorescence at 290 and 390 nm when activated at about 248 nm. The glass may desirably exhibit low level of LIWFD, [SiH*] and/or [ODC].
摘要翻译：在本申请中公开了具有低注射度依赖性透射率，特别是约193nm的合成二氧化硅玻璃及其制造方法。当在约248nm激活时，该玻璃可期望地在290和390nm处表现出低水平的荧光。玻璃可能期望显示低水平的LIWFD，[SiH *]和/或[ODC]。

30. 发明授权

US06783898B2 Projection lithography photomask blanks, preforms and method of making 失效
标题翻译：投影光刻光掩模坯料，预成型件和制造方法
公开(公告)号：US06783898B2
公开(公告)日：2004-08-31
申请号：US09876194
申请日：2001-06-06
申请人： George Edward Berkey , Lisa Anne Moore , Charles Chunzhe Yu
发明人： George Edward Berkey , Lisa Anne Moore , Charles Chunzhe Yu
IPC分类号： G03F900
CPC分类号： C03B23/07 , C03B19/1415 , C03B19/1423 , C03B19/1453 , C03B19/1469 , C03B19/1492 , C03B23/043 , C03B23/045 , C03B23/051 , C03B2201/07 , C03B2201/075 , C03B2201/12 , C03B2201/21 , C03B2207/02 , C03B2207/06 , C03B2207/20 , C03B2207/32 , C03B2207/52 , C03B2207/54 , C03B2207/66 , C03C3/06 , C03C4/0085 , C03C2201/12 , C03C2201/21 , C03C2203/50 , G03F1/60
摘要： The invention includes methods of making lithography photomask blanks. The invention also includes lithography photomask blanks and preforms for producing lithography photomask. The method of making a lithography photomask blank includes providing a soot deposition surface, producing SiO2 soot particles and projecting the SiO2 soot particles toward the soot deposition surface. The method includes successively depositing layers of the SiO2 soot particle on the deposition surface to form a coherent SiO2 porous glass preform body comprised of successive layers of the SiO2 soot particles and dehydrating the coherent SiO2 glass preform body to remove OH from the preform body. The SiO2 is exposed to and reacted with a fluorine containing compound and consolidated into a nonporous silicon oxyfluoride glass body with parallel layers of striae. The method further includes forming the consolidated silicon oxyfluoride glass body into a photomask blank having a planar surface with the orientation of the striae layer parallel to the photomask blank planar surface.
摘要翻译：本发明包括制造光刻光掩模坯料的方法。本发明还包括光刻光掩模坯料和用于生产光刻光掩模的预成型件。制造光刻光掩模坯料的方法包括提供烟灰沉积表面，产生SiO 2烟灰颗粒并将SiO 2烟灰颗粒投射到烟灰沉积表面。该方法包括在沉积表面上依次沉积SiO 2烟灰颗粒的层，以形成由SiO 2烟灰颗粒的连续层组成的粘结SiO 2多孔玻璃预制体，并使相干的SiO 2玻璃预制体脱水以从预成型体中去除OH。将SiO 2暴露于含氟化合物并与其反应，并固化成具有平行的条纹层的无孔氟氧化硅玻璃体。该方法还包括将固化的氟氧化硅玻璃体形成为具有平坦表面的光掩模坯料，其中条纹层的取向平行于光掩模坯料平面。

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