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21. 发明授权

US06688155B2 Calibration element for adjustable nozzle 有权
标题翻译：校准元件可调喷嘴
公开(公告)号：US06688155B2
公开(公告)日：2004-02-10
申请号：US10334301
申请日：2002-12-31
申请人： Alexander Sou-Kang Ko , Duane DeMore
发明人： Alexander Sou-Kang Ko , Duane DeMore
IPC分类号： B65G6500
CPC分类号： H01L21/67259 , B08B3/02 , H01L21/67051 , H01L21/67253
摘要： In one aspect, a spin-rinse-dry chamber comprises an adjustable nozzle. A calibration element may be positioned in the spin-rinse-dry chamber at which the adjustable nozzle may be directed. Targets (for example cross-hairs in one embodiment) may be located on the calibration element at a position corresponding to where it is desired to direct a fluid flow from the adjustable nozzle. Another aspect provides a method of calibrating a spin-rinse-dry chamber having an adjustable nozzle comprising inserting a calibration element having a similar contour as a substrate into the spin-rinse-dry chamber. Fluid is then directed through the adjustable nozzle at a selected target position located on the surface of the calibration element.
摘要翻译：一方面，旋转漂洗干燥室包括可调喷嘴。校准元件可以定位在可旋转冲洗干燥室中，可调节喷嘴可以在该冲洗干燥室中被引导。目标（例如一个实施例中的交叉毛发）可以位于对应于期望从可调节喷嘴引导流体流的地方的校准元件上。另一方面提供了一种校准具有可调节喷嘴的旋转冲洗干燥室的方法，包括将具有与基底相似的轮廓的校准元件插入旋转漂洗干燥室中。然后将流体引导到位于校准元件表面上的选定目标位置处的可调节喷嘴。

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