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    • 28. 发明授权
    • MOS varactor property detection method and MOS varactor manufacturing method using the same
    • MOS变容二极管属性检测方法和MOS变容二极管制造方法相同
    • US07647218B2
    • 2010-01-12
    • US11585454
    • 2006-10-24
    • Jung Hyun Choi
    • Jung Hyun Choi
    • G06F17/50G06F17/10
    • H01L29/93H01L29/94
    • Disclosed is a method for detecting properties of a Metal Oxide Silicon (MOS) varactor, which includes: establishing a MOS varactor model equation in conjunction with an area of a gate; calculating values of the coefficients of the MOS varactor model equation through measurements for test materials; and extracting the properties of a capacitor of the MOS varactor using the calculated values of the coefficients. According to the method, the MOS varactor model equation can be expressed by Cgate=[Cigate×Area+Cpgate×Perimeter]×N, wherein, Cgate denotes gate capacitance for voltage applied to the gate, Cigate denotes intrinsic gate capacitance, Cpgate denotes perimeter gate capacitance, and N denotes the number of gate fingers. The MOS varactor model equation can be applicable to various sized capacitors, so that it is possible to estimate a gate capacitance for voltage applied to a gate, considering the differences due to the surface shapes of a device.
    • 公开了一种用于检测金属氧化物硅(MOS)变容二极管的性能的方法,其包括:与栅极的区域一起建立MOS变容二极管模型方程; 通过测试材料计算MOS变容二极管模型方程的系数值; 以及使用所计算的系数值来提取MOS变容二极管的电容器的特性。 根据该方法,可以通过Cgate = [CigatexArea + CpgatexPerimeter] xN表示MOS变容二极管模型方程,其中,Cgate表示施加到栅极的电压的栅极电容,Cigate表示本征栅极电容,Cpgate表示周边栅极电容,N 表示门指的数量。 考虑到由于器件的表面形状的差异,MOS变容二极管模型方程式可以适用于各种尺寸的电容器,从而可以估计施加到栅极的电压的栅极电容。