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    • 27. 发明授权
    • Digital X-ray detecting panel and method for manufacturing the same
    • 数字X射线检测面板及其制造方法
    • US08242495B2
    • 2012-08-14
    • US12699033
    • 2010-02-02
    • Fang-An ShuLee-Tyng ChenHenry WangWei-Chou Lan
    • Fang-An ShuLee-Tyng ChenHenry WangWei-Chou Lan
    • H01L29/10H01L29/12H01L27/01H01L27/12
    • H01L31/105H01L27/14659H01L31/1085H01L31/115
    • A digital X-ray detecting panel includes a wavelength transforming layer and a photoelectric detecting plate. The wavelength transforming layer is configured for transforming X-ray into visible light. The photoelectric detecting plate is disposed under the wavelength transforming layer. The photoelectric detecting plate includes a substrate and a number of photoelectric detecting units disposed on the substrate and arranged in an array. Each of the photoelectric detecting units includes a thin film transistor and a photodiode electrically connected to the thin film transistor. The thin film transistor has an oxide semiconductor layer. The digital X-ray detecting panel can avoid a photocurrent in the thin film transistor, and thereby improving detecting accuracy of the digital X-ray detecting panel. A method for manufacturing the digital X-ray detecting panel is also provided.
    • 数字X射线检测面板包括波长转换层和光电检测板。 波长转换层被配置为将X射线转换成可见光。 光电检测板设置在波长转换层的下方。 光电检测板包括基板和设置在基板上并排列成阵列的多个光电检测单元。 每个光电检测单元包括薄膜晶体管和与薄膜晶体管电连接的光电二极管。 薄膜晶体管具有氧化物半导体层。 数字X射线检测面板可以避免薄膜晶体管中的光电流,从而提高数字X射线检测面板的检测精度。 还提供了一种用于制造数字X射线检测面板的方法。