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    • 20. 发明申请
    • Method and Structure for III-V FinFET
    • III-V FinFET的方法和结构
    • US20160163844A1
    • 2016-06-09
    • US15045325
    • 2016-02-17
    • International Business Machines Corporation
    • Effendi Leobandung
    • H01L29/775H01L29/205H01L29/66H01L29/15
    • H01L29/775H01L29/1033H01L29/155H01L29/205H01L29/401H01L29/66522H01L29/66545H01L29/66553H01L29/66795H01L29/6681H01L29/785H01L2029/7857
    • A method for fabricating a semiconductor device comprises forming a fin in a layer of III-V compound semiconductor material on a silicon-on-insulator substrate; forming a semiconductor extension on the fin, the semiconductor extension comprising a III-V compound semiconductor material that is different from a material forming the fin in the Ill-V compound semiconductor layer; forming a dummy gate structure and a spacer across and perpendicular to the fin; forming a source/drain layer on a top surface of the substrate adjacent to the dummy gate structure; planarizing the source/drain layer; removing the dummy gate structure to expose a portion of the semiconductor extension on the fin; removing the exposed portion of the semiconductor extension; etching the semiconductor extension to undercut the spacer; and forming a replacement gate structure in place of the removed dummy gate structure and removed exposed portion of the semiconductor extension.
    • 一种用于制造半导体器件的方法包括在绝缘体上硅衬底上形成III-V族化合物半导体材料层中的散热片; 在所述翅片上形成半导体延伸部,所述半导体延伸部包括与所述III-V族化合物半导体层中形成所述散热片的材料不同的III-V族化合物半导体材料; 在翅片上横跨并垂直于翅片形成虚拟栅极结构和间隔物; 在与所述虚拟栅极结构相邻的所述衬底的顶表面上形成源极/漏极层; 平坦化源极/漏极层; 去除所述伪栅极结构以使所述鳍上的所述半导体延伸部的一部分露出; 去除所述半导体延伸部的暴露部分; 蚀刻半导体延伸部以切割间隔物; 以及形成替代栅极结构来代替去除的虚拟栅极结构并去除半导体延伸部的暴露部分。