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    • 14. 发明公开
    • TEMPERATURE CONTROL APPARATUS
    • US20230417453A1
    • 2023-12-28
    • US18342317
    • 2023-06-27
    • SMC CORPORATION
    • Tatsuya AMANOTakafumi KOJIMA
    • F24H15/223G05D23/19G05D7/06F24H15/34F24H15/355
    • F24H15/223G05D23/1928G05D7/0676F24H15/34F24H15/355F24H15/12
    • [Object] To provide a temperature control apparatus that has a high degree of freedom in designing a heat exchanger and that is excellent in versatility in terms of the temperature of a circulating liquid even when a high-temperature circulating liquid is used.
      [Solution] A temperature control apparatus 1 includes a circulation circuit 12 that delivers a circulating liquid from the main tank 5 to a load that is external and returns the circulating liquid received from the load to the main tank again, a cooling circuit 25 that cools the circulating liquid delivered from a sub-tank 20 with a heat exchanger 33 and returns the circulating liquid to the sub-tank again, and a control unit 40 that controls the flow rate of the circulating liquid flowing through the cooling circuit. The sub-tank is connected to the main tank so as to be capable of leading excessive circulating liquid out of the main tank. A second cooling flow passage 27 of the cooling circuit includes a connecting flow passage 28 that branches from the second cooling flow passage 27 and that is connected to the main tank. A first temperature sensor 61 is provided in the circulation circuit to measure the temperature of the circulating liquid. The control unit controls the output of a cooling pump 55 provided in the cooling circuit on the basis of the measured temperature of the circulating liquid received from the first temperature sensor and controls the flow rate of the circulating liquid from the cooling circuit to the circulation circuit.