专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

11. 发明申请

US20070139441A1 Graphics integration into a process configuration and control environment 有权
标题翻译：图形集成到流程配置和控制环境中
公开(公告)号：US20070139441A1
公开(公告)日：2007-06-21
申请号：US10591804
申请日：2005-05-04
申请人： J. Lucas , Mark Nixon , Ling Zhou , Alper Enver , Arthur Webb
发明人： J. Lucas , Mark Nixon , Ling Zhou , Alper Enver , Arthur Webb
IPC分类号： G09G5/00
CPC分类号： G05B19/0426 , G05B19/41885 , G05B23/0267 , G05B2219/23424 , G05B2219/25067 , G05B2219/25428 , G05B2219/31467 , G05B2219/31469 , G05B2219/31472 , G05B2219/31474 , G05B2219/32128 , G05B2219/32342 , G06F8/20 , G06F8/38 , G06F9/4488 , G06F9/451 , G06N5/04 , G06Q10/06 , G06Q50/04 , G06T13/00 , H04L67/12 , H04L67/16 , H04L67/28 , H04L67/289 , H04L67/36 , H04L2012/4026 , Y02A10/46 , Y02P80/40 , Y02P90/14 , Y02P90/26 , Y02P90/265 , Y02P90/30 , Y02P90/84 , Y02P90/86 , Y10S715/965
摘要： Graphic elements and graphic displays are provided for use in a process environment to display information to one or more users about the process environment, such as the current state of device within a process plant. The graphic elements and display may be associated with various logical and physical elements within the process plant during configuration of the process plant, and may be configured and downloaded to the hardware within the process plant along with other configuration items, such as control routines. In particular, the graphic elements and graphic displays may be created and stored in a library, and may then be configured by being associated with various logical or physical entities within the plant. During the configuration process, the graphic elements and graphic displays may be associated with areas, equipment, process modules, control routines or control strategies of the plant as defined elsewhere in the plant configuration, or may be associated with interfaces or display devices, to define the hardware on which the graphic displays will execute during runtime, as well as to define the process entities to which these displays will be bound for display purposes. Still further, each of the graphic displays may be defined with a role or a functional use, such as an operator view, a maintenance view, etc., and these roles may be used to defined the proper access and use of the graphic displays within the runtime environment.
摘要翻译：图形元素和图形显示器用于在过程环境中用于向一个或多个用户显示关于过程环境的信息，例如过程工厂内的设备的当前状态。图形元素和显示可以在处理工厂的配置期间与处理工厂内的各种逻辑和物理元件相关联，并且可以与其他配置项（诸如控制例程）一起配置和下载到处理工厂内的硬件。特别地，图形元素和图形显示可以被创建并存储在库中，然后可以通过与工厂内的各种逻辑或物理实体相关联来配置。在配置过程中，图形元素和图形显示可以与工厂配置的其他地方定义的工厂的区域，设备，过程模块，控制例程或控制策略相关联，或者可以与界面或显示设备相关联以定义图形显示的硬件将在运行期间执行，以及定义这些显示将被绑定到显示目的的流程实体。此外，每个图形显示器可以用诸如操作者视图，维护视图等的角色或功能使用来定义，并且这些角色可以用于定义图形显示器的适当访问和使用运行时环境。

12. 发明申请

US20050143852A1 Chemical-mechanical planarization controller 有权
标题翻译：化学机械平面化控制器
公开(公告)号：US20050143852A1
公开(公告)日：2005-06-30
申请号：US10751228
申请日：2003-12-30
申请人： Dirk Roover , Abbas Emami-Naeini , Jon Ebert
发明人： Dirk Roover , Abbas Emami-Naeini , Jon Ebert
IPC分类号： G05B17/02 , G06F19/00
CPC分类号： G05B17/02 , G05B2219/32342 , G05B2219/45232 , Y02P90/26
摘要： The invention provides a model-based control approach to chemical-mechanical planarization (CMP) control. The preferred embodiment comprises mathematical models of the CMP process. These models play a critical role in obtaining superior control performance. Model-based Control Design involves the construction of a dynamic mathematical model of the system to be controlled, e.g. a removal rate model of a CMP system. The model can then be evaluated via computer simulations, and validated using data from the system. The invention provides a method and apparatus that processes in-situ data from a suite of real-time sensors and produces real-time commands to multiple actuators, such as applied pressures, slurry-flow rate, and wafer/pad velocity. A key aspect of the invention is an integrated model-based pressure-temperature-velocity-slurry flow control system that includes many innovations in real-time mode identification, real-time gain estimation, and real-time control.
摘要翻译：本发明提供了一种基于模型的化学机械平面化（CMP）控制方法。优选实施例包括CMP工艺的数学模型。这些型号在获得卓越的控制性能方面发挥了关键作用。基于模型的控制设计涉及构建要控制的系统的动态数学模型，例如， CMP系统的去除率模型。然后可以通过计算机模拟来评估该模型，并使用系统中的数据进行验证。本发明提供了一种方法和装置，其处理来自一组实时传感器的原位数据，并向多个致动器（例如施加的压力，浆液流速和晶片/垫速度）产生实时命令。本发明的一个关键方面是基于模型的压力 - 温度 - 速度 - 浆料流量控制系统，其包括实时模式识别，实时增益估计和实时控制的许多创新。

13. 发明授权

US11966209B2 Simulator, numerical control device, and simulation method 有权
公开(公告)号：US11966209B2
公开(公告)日：2024-04-23
申请号：US17116372
申请日：2020-12-09
申请人： FANUC CORPORATION
发明人： Nobuaki Aizawa , Wei Zhao
IPC分类号： G05B19/402 , G06F30/20
CPC分类号： G05B19/402 , G06F30/20 , G05B2219/32342 , G05B2219/34013 , G05B2219/50047
摘要： To make it possible to evaluate quantitatively whether there is a problem on a machining surface. A simulator includes a memory unit that stores machining position data to be used when a machine tool machines a machining-target object, a machining surface simulation unit that uses the machining position data that is stored to perform a simulation of a machining surface, a surface texture calculation unit that calculates a surface texture of the machining surface that is simulated through the simulation of the machining surface, and a machining surface evaluation unit that evaluates the surface texture on the basis of an evaluation condition.

14. 发明授权

US08442667B2 Applications of neural networks 有权
标题翻译：神经网络的应用
公开(公告)号：US08442667B2
公开(公告)日：2013-05-14
申请号：US12032733
申请日：2008-02-18
申请人： Patrick D. Pannese
发明人： Patrick D. Pannese
IPC分类号： G06F19/00 , G06F17/00 , G06E1/00 , G06N5/00 , G05B13/02
CPC分类号： G05B99/00 , G05B15/02 , G05B19/41865 , G05B19/41885 , G05B23/0267 , G05B2219/30 , G05B2219/31 , G05B2219/31467 , G05B2219/31472 , G05B2219/32128 , G05B2219/32267 , G05B2219/32329 , G05B2219/32335 , G05B2219/32342 , G05B2219/32351 , G05B2219/35494 , G05B2219/40411 , G05B2219/40412 , G05B2219/40413 , G05B2219/40419 , G05B2219/40424 , G05B2219/45031 , G06T7/0004 , H01L21/67161 , H01L21/67184 , H01L21/6719 , H01L21/67196 , H01L21/67201 , H01L21/67207 , H01L21/67742 , H01L21/67745 , Y02P90/18 , Y02P90/20 , Y02P90/26 , Y02P90/86
摘要： Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
摘要翻译：用于控制异构半导体制造环境中的处理的软件可以包括以晶圆为中心的数据库，使用神经网络的实时调度器和显示系统的模拟操作的图形用户界面。这些特征可以单独使用或组合使用以提供用于半导体制造过程的实时控制和监视的改进的可用性和计算效率。更一般来说，这些技术可以有用地用于各种实时控制系统中，特别是需要复杂调度决策的系统或由许多独立供应商的硬件构成的异构系统。

15. 发明授权

US08127241B2 Process plant user interface system having customized process graphic display layers in an integrated environment 有权
标题翻译：在集成环境中具有定制过程图形显示层的过程工厂用户界面系统
公开(公告)号：US08127241B2
公开(公告)日：2012-02-28
申请号：US10574824
申请日：2005-05-04
申请人： Terrence L. Blevins , Ken J. Beoughter , J. Michael Lucas , Mark J. Nixon
发明人： Terrence L. Blevins , Ken J. Beoughter , J. Michael Lucas , Mark J. Nixon
IPC分类号： G06F3/048
CPC分类号： G05B19/0426 , G05B19/41885 , G05B23/0267 , G05B2219/23424 , G05B2219/25067 , G05B2219/25428 , G05B2219/31467 , G05B2219/31469 , G05B2219/31472 , G05B2219/31474 , G05B2219/32128 , G05B2219/32342 , G06F8/20 , G06F8/38 , G06F9/4488 , G06F9/451 , G06N5/04 , G06Q10/06 , G06Q50/04 , G06T13/00 , H04L67/12 , H04L67/16 , H04L67/28 , H04L67/289 , H04L67/36 , H04L2012/4026 , Y02A10/46 , Y02P80/40 , Y02P90/14 , Y02P90/26 , Y02P90/265 , Y02P90/30 , Y02P90/84 , Y02P90/86 , Y10S715/965
摘要： A method useful for providing a user interface for a process plant includes displaying graphical depictions of process plant elements of the process plant via the user interface. Information is generated for a plurality of content layers of a process graphic display of the process plant elements by processing data regarding operation of the process plant. Content to be displayed via the user interface is determined from the generated information by determining which content layer of the plurality of content layer is to be displayed. In some embodiments, the determination may be made based on a user profile characteristic. The generated information may therefore support multiple views of the process plant via the user interface for a plurality of different types of users of the user interface, and may involve processing data regarding actual and simulated operation of the process plant. As a result, the method may also include determining whether the process plant is currently on-line to further determine the portion of the information to be displayed via the user interface.
摘要翻译：用于为过程工厂提供用户界面的方法包括通过用户界面显示过程工厂的过程工厂元件的图形描绘。通过处理关于处理工厂的操作的数据，为处理工厂元件的过程图形显示的多个内容层生成信息。通过确定要显示多个内容层的哪个内容层，从所生成的信息确定要通过用户界面显示的内容。在一些实施例中，可以基于用户简档特征来进行确定。因此，生成的信息可以经由用户界面为用户界面的多个不同类型的用户支持处理工厂的多个视图，并且可以涉及处理关于过程工厂的实际和模拟操作的数据。结果，该方法还可以包括确定过程工厂当前是否在线以进一步确定经由用户界面显示的信息的一部分。

16. 发明授权

US07702409B2 Graphics integration into a process configuration and control environment 有权
标题翻译：图形集成到流程配置和控制环境中
公开(公告)号：US07702409B2
公开(公告)日：2010-04-20
申请号：US10591804
申请日：2005-05-04
申请人： J. Michael Lucas , Mark J. Nixon , Ling Zhou , Alper Enver , Arthur Webb
发明人： J. Michael Lucas , Mark J. Nixon , Ling Zhou , Alper Enver , Arthur Webb
IPC分类号： G06F19/00 , G05B11/01 , G06G7/48
CPC分类号： G05B19/0426 , G05B19/41885 , G05B23/0267 , G05B2219/23424 , G05B2219/25067 , G05B2219/25428 , G05B2219/31467 , G05B2219/31469 , G05B2219/31472 , G05B2219/31474 , G05B2219/32128 , G05B2219/32342 , G06F8/20 , G06F8/38 , G06F9/4488 , G06F9/451 , G06N5/04 , G06Q10/06 , G06Q50/04 , G06T13/00 , H04L67/12 , H04L67/16 , H04L67/28 , H04L67/289 , H04L67/36 , H04L2012/4026 , Y02A10/46 , Y02P80/40 , Y02P90/14 , Y02P90/26 , Y02P90/265 , Y02P90/30 , Y02P90/84 , Y02P90/86 , Y10S715/965
摘要： Graphic elements and graphic displays are provided for use in a process environment to display information to one or more users about the process environment, such as the current state of device within a process plant. The graphic elements and display may be associated with various logical and physical elements within the process plant during configuration of the process plant, and may be configured and downloaded to the hardware within the process plant along with other configuration items, such as control routines. In particular, the graphic elements and graphic displays may be created and stored in a library, and may then be configured by being associated with various logical or physical entities within the plant. During the configuration process, the graphic elements and graphic displays may be associated with areas, equipment, process modules, control routines or control strategies of the plant as defined elsewhere in the plant configuration, or may be associated with interfaces or display devices, to define the hardware on which the graphic displays will execute during runtime, as well as to define the process entities to which these displays will be bound for display purposes. Still further, each of the graphic displays may be defined with a role or a functional use, such as an operator view, a maintenance view, etc., and these roles may be used to defined the proper access and use of the graphic displays within the runtime environment.
摘要翻译：图形元素和图形显示器用于在过程环境中用于向一个或多个用户显示关于过程环境的信息，例如过程工厂内的设备的当前状态。图形元素和显示可以在处理工厂的配置期间与处理工厂内的各种逻辑和物理元件相关联，并且可以与其他配置项（诸如控制例程）一起配置和下载到处理工厂内的硬件。特别地，图形元素和图形显示可以被创建并存储在库中，然后可以通过与工厂内的各种逻辑或物理实体相关联来配置。在配置过程中，图形元素和图形显示可以与工厂配置的其他地方定义的工厂的区域，设备，过程模块，控制例程或控制策略相关联，或者可以与界面或显示设备相关联以定义图形显示的硬件将在运行期间执行，以及定义这些显示将被绑定到显示目的的流程实体。此外，每个图形显示器可以用诸如操作者视图，维护视图等的角色或功能使用来定义，并且这些角色可以用于定义图形显示器的适当访问和使用运行时环境。

17. 发明授权

US07680546B2 Graphic element with multiple visualizations in a process environment 有权
标题翻译：在进程环境中具有多个可视化的图形元素
公开(公告)号：US07680546B2
公开(公告)日：2010-03-16
申请号：US10590574
申请日：2005-05-04
申请人： Stephen Gilbert , Ken J. Beoughter , J. Michael Lucas , Hao Tennyson , Mark J. Nixon
发明人： Stephen Gilbert , Ken J. Beoughter , J. Michael Lucas , Hao Tennyson , Mark J. Nixon
IPC分类号： G05B11/01 , G05B15/00
CPC分类号： G05B19/0426 , G05B19/41885 , G05B23/0267 , G05B2219/23424 , G05B2219/25067 , G05B2219/25428 , G05B2219/31467 , G05B2219/31469 , G05B2219/31472 , G05B2219/31474 , G05B2219/32128 , G05B2219/32342 , G06F8/20 , G06F8/38 , G06F9/4488 , G06F9/451 , G06N5/04 , G06Q10/06 , G06Q50/04 , G06T13/00 , H04L67/12 , H04L67/16 , H04L67/28 , H04L67/289 , H04L67/36 , H04L2012/4026 , Y02A10/46 , Y02P80/40 , Y02P90/14 , Y02P90/26 , Y02P90/265 , Y02P90/30 , Y02P90/84 , Y02P90/86 , Y10S715/965
摘要： Smart graphic elements are provided for use as portions or components of one or more graphic displays, which may be executed in a process plant to display information to users about the process plant environment, such as the current state of devices within the process plant. Each of the graphic elements is an executable object that includes a property or a variable that may be bound to an associated process entity, like a field device, and that includes multiple visualizations, each of which may be used to graphically depict the associated process entity on a user interface when the graphic element is executed as part of the graphic display. Any of the graphic element visualizations may be used in any particular graphic display and the same graphic display may use different ones of the visualizations at different times. The different visualizations associated with a graphic element make the graphic element more versatile, at they allow the same graphic element to be used in different displays using different graphical styles or norms. These visualizations also enable the same graphic element to be used in displays designed for different types of display devices, such as display devices having large display screens, standard computer screens and very small display screens, such as PDA and telephone display screens.
摘要翻译：智能图形元素被提供用作一个或多个图形显示器的部分或组件，其可以在过程工厂中执行以向用户显示关于过程工厂环境的信息，例如过程工厂内的设备的当前状态。每个图形元素是可执行对象，其包括可以绑定到相关联的进程实体（如现场设备）的属性或变量，并且包括多个可视化，每个可视化可用于图形地描绘相关联的进程实体在图形元素作为图形显示的一部分执行时，在用户界面上。任何图形元素可视化可以在任何特定的图形显示中使用，并且相同的图形显示可以在不同的时间使用不同的可视化。与图形元素相关联的不同可视化功能使图形元素更加通用，因为它们允许使用不同图形样式或规范在不同显示器中使用相同的图形元素。这些可视化还使得能够将相同的图形元素用于为不同类型的显示设备设计的显示器，例如具有大显示屏幕的显示设备，标准计算机屏幕和诸如PDA和电话显示屏幕的非常小的显示屏幕。

18. 发明申请

US20080163095A1 METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS 有权
公开(公告)号：US20080163095A1
公开(公告)日：2008-07-03
申请号：US11877180
申请日：2007-10-23
申请人： Patrick D. Pannese , Vinaya Kavathekar , Peter van der Meulen
发明人： Patrick D. Pannese , Vinaya Kavathekar , Peter van der Meulen
IPC分类号： G06F3/048
CPC分类号： G05B99/00 , G05B15/02 , G05B19/41865 , G05B19/41885 , G05B23/0267 , G05B2219/30 , G05B2219/31 , G05B2219/31467 , G05B2219/31472 , G05B2219/32128 , G05B2219/32267 , G05B2219/32329 , G05B2219/32335 , G05B2219/32342 , G05B2219/32351 , G05B2219/35494 , G05B2219/40411 , G05B2219/40412 , G05B2219/40413 , G05B2219/40419 , G05B2219/40424 , G05B2219/45031 , G06T7/0004 , H01L21/67161 , H01L21/67184 , H01L21/6719 , H01L21/67196 , H01L21/67201 , H01L21/67207 , H01L21/67742 , H01L21/67745 , Y02P90/18 , Y02P90/20 , Y02P90/26 , Y02P90/86
摘要： Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.

19. 发明申请

US20080155445A1 METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS 有权
公开(公告)号：US20080155445A1
公开(公告)日：2008-06-26
申请号：US11877191
申请日：2007-10-23
申请人： Patrick D. Pannese , Vinaya Kavathekar , Peter van der Meulen
发明人： Patrick D. Pannese , Vinaya Kavathekar , Peter van der Meulen
IPC分类号： G06F3/048
CPC分类号： G05B99/00 , G05B15/02 , G05B19/41865 , G05B19/41885 , G05B23/0267 , G05B2219/30 , G05B2219/31 , G05B2219/31467 , G05B2219/31472 , G05B2219/32128 , G05B2219/32267 , G05B2219/32329 , G05B2219/32335 , G05B2219/32342 , G05B2219/32351 , G05B2219/35494 , G05B2219/40411 , G05B2219/40412 , G05B2219/40413 , G05B2219/40419 , G05B2219/40424 , G05B2219/45031 , G06T7/0004 , H01L21/67161 , H01L21/67184 , H01L21/6719 , H01L21/67196 , H01L21/67201 , H01L21/67207 , H01L21/67742 , H01L21/67745 , Y02P90/18 , Y02P90/20 , Y02P90/26 , Y02P90/86
摘要： Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.

20. 发明申请

US20080155443A1 METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS 审中-公开
公开(公告)号：US20080155443A1
公开(公告)日：2008-06-26
申请号：US11877058
申请日：2007-10-23
申请人： Patrick D. Pannese , Vinaya Kavathekar , Peter van der Meulen
发明人： Patrick D. Pannese , Vinaya Kavathekar , Peter van der Meulen
IPC分类号： G06F3/048
CPC分类号： G05B99/00 , G05B15/02 , G05B19/41865 , G05B19/41885 , G05B23/0267 , G05B2219/30 , G05B2219/31 , G05B2219/31467 , G05B2219/31472 , G05B2219/32128 , G05B2219/32267 , G05B2219/32329 , G05B2219/32335 , G05B2219/32342 , G05B2219/32351 , G05B2219/35494 , G05B2219/40411 , G05B2219/40412 , G05B2219/40413 , G05B2219/40419 , G05B2219/40424 , G05B2219/45031 , G06F15/00 , G06T7/0004 , H01L21/67161 , H01L21/67184 , H01L21/6719 , H01L21/67196 , H01L21/67201 , H01L21/67207 , H01L21/67742 , H01L21/67745 , Y02P90/18 , Y02P90/20 , Y02P90/26 , Y02P90/86
摘要： Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式