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    • 16. 发明申请
    • Rotary Flexure Micropositioning Stage with Large Rotational Range
    • 具有大转动范围的旋转弯曲微定位台
    • US20160041378A1
    • 2016-02-11
    • US14454845
    • 2014-08-08
    • UNIVERSITY OF MACAU
    • Qingsong XU
    • G02B21/26F16M11/18
    • G02B21/26F16M11/18G02B21/32G02B21/34
    • A stage assembly for supporting articles, the stage assembly uses one or more intermediate stage modules. Each module has a plurality of compound radial flexures (CRFs), extending radially from a base or an intermediate stage module, and allowing rotational movement about a center axis. The CRFs each have a flat profile, with a long side of the profile aligned perpendicularly to the direction of rotation of the stage modules so that the CRFs have more flexibility in the direction of rotation than obliquely to the direction of rotation. Movement of a last of the stage modules results in deflection of the CRFs between each successive stage module, with partial movement of each stage module between the base and the last of the stage modules, the last of the stage modules provided as a primary stage module.
    • 用于支撑物品的舞台组件,舞台组件使用一个或多个中间舞台模块。 每个模块具有从基座或中间级模块径向延伸并且允许围绕中心轴的旋转运动的多个复合径向挠曲件(CRF)。 CRF各自具有平坦的轮廓,其轮廓的长边垂直于载物台模块的旋转方向排列,使得CRF在旋转方向上比在旋转方向上具有更大的灵活性。 最后一个级模块的移动导致CRF在每个连续级模块之间的偏转,每个级模块在基座和最后级模块之间的部分移动,最后的级模块被提供为主级模块 。