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    • 16. 发明授权
    • Non-contact edge detector
    • 非接触边缘检测器
    • US5739913A
    • 1998-04-14
    • US693469
    • 1996-08-02
    • John D. Wallace
    • John D. Wallace
    • G03F7/20G03F9/00G01B11/00
    • B65H9/18G03F7/70716G03F7/70733G03F7/7075G03F9/70B65H2553/46
    • A non-contact substrate alignment system for a lithography system is disclosed that comprises three substrate edge detectors. Each edge detector comprises a projector, preferably located above the substrate, that projects a light field down onto a substrate and a stage. The light field has a predetermined shadow line that is straight and runs perpendicularly to the direction of the substrate's edge. A camera is also located above the substrate and detects the light from the light field. The height differential between the substrate and stage causes a shift in the shadow line from the perspective of the camera. A controller connected to the camera utilizes this shift to locate the edge of the substrate. The problems associated with the mechanical banking techniques are thus avoided. Moreover, the technique uses detectors and projectors that can be located entirely above the substrate; specially designed stages with incorporated detectors or projectors are not required. The technique is also very tolerant of different types of substrates with different edge characteristics.
    • 公开了一种用于光刻系统的非接触式衬底对准系统,其包括三个衬底边缘检测器。 每个边缘检测器包括优选地位于基板上方的投影仪,其将光场向下突出到基板和台上。 光场具有预定的阴影线,其是直的并且垂直于衬底的边缘的方向延伸。 相机也位于基板上方并检测来自光场的光。 基板和平台之间的高度差导致从相机的角度看阴影线的偏移。 连接到相机的控制器利用该移位来定位基板的边缘。 因此避免了与机械银行技术相关的问题。 此外,该技术使用可以完全位于衬底上方的检测器和投影仪; 不需要专门设计的带有检测器或投影仪的阶段。 该技术也非常容忍具有不同边缘特性的不同类型的基板。