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11. 发明申请

US20150273538A1 SUBSTRATE LIQUID PROCESSING APPARATUS AND METHOD, AND COMPUTER-READABLE RECORDING MEDIUM WITH SUBSTRATE LIQUID PROCESSING PROGRAM RECORDED THEREIN 有权
标题翻译：基板液体处理装置和方法以及具有基板液化处理程序的计算机可读记录介质
公开(公告)号：US20150273538A1
公开(公告)日：2015-10-01
申请号：US14666896
申请日：2015-03-24
申请人： Tokyo Electron Limited
发明人： Daisuke Saiki , Shogo Mizota , Takashi Yabuta , Jun Nonaka , Tatsuya Nagamatsu , Koji Tanaka , Tomiyasu Maezono
IPC分类号： B08B3/14
CPC分类号： B08B3/14 , B01D36/04 , B01D37/04 , B24B57/02 , C11D11/0047 , H01L21/67017
摘要： Disclosed are a substrate liquid processing apparatus and method for performing a liquid processing on a substrate using a processing liquid, and a computer-readable recording medium with a substrate liquid processing program recorded therein. In the method, a first chemical liquid supply step is performed to supply a first chemical liquid from a first chemical liquid supply unit to a processing liquid storage unit, a first chemical liquid purifying step is performed to purify the first chemical liquid in a chemical liquid purifying unit, a second chemical liquid supply step is performed to supply a second chemical liquid from a second chemical liquid supply unit to the processing liquid storage unit, and a processing liquid supply step is performed to supply the processing liquid obtained by mixing the first and second chemical liquids from the processing liquid supply unit to substrate liquid processing units.
摘要翻译：公开了一种用于使用处理液在基板上进行液体处理的基板液体处理装置和方法，以及记录有基板液体处理程序的计算机可读记录介质。在该方法中，进行第一药液供给工序，将第一药液从第一药液供给部供给至处理液储存部，进行第一化学液净化工序，对化学液中的第一药液进行净化净化单元，执行第二化学液体供给步骤，将第二化学液体从第二药液供给单元供给到处理液储存单元，并且进行处理液供给工序，供给通过混合第一和第第二化学液体从处理液体供应单元到基板液体处理单元。

12. 发明申请

US20140246380A1 EXTENDED-LIFE OIL MANAGEMENT SYSTEM AND METHOD OF USING SAME 有权
标题翻译：延长寿命油管理系统及其使用方法
公开(公告)号：US20140246380A1
公开(公告)日：2014-09-04
申请号：US14180514
申请日：2014-02-14
申请人： Fram Group IP LLC
发明人： Ronald P. Rohrbach , Gerard W. Bilski , Brian Artz
IPC分类号： B01D35/00
CPC分类号： B01D35/005 , B01D37/025 , B01D37/04 , B01D37/041 , F01M9/02 , F01M11/10 , F01M2001/1014 , F01M2011/0091 , F01M2011/1466
摘要： An oil management system to reduce and remove the amount of soot, rust or other contaminating particles in oil used in an engine, the oil management system comprising an oil filter assembly including a filter element and an additive cartridge, the additive cartridge configured to provide a means for continuously dispersing a small quantity of additive into the oil; an oxidation prevention means to prevent or diminish oxidation of metal in the oil management system; and an oil condition monitoring sensor to measure various aspects of the oil in the oil management system.
摘要翻译：一种油管理系统，用于减少和去除发动机中使用的油中的烟灰，锈蚀或其它污染颗粒的量，所述油管理系统包括包括过滤元件和添加剂筒的油过滤器组件，所述添加剂盒构造成提供用于将少量添加剂连续分散到油中的装置; 防止或减少石油管理系统中金属氧化的氧化防止手段; 和一个油状态监测传感器，用于测量石油管理系统中的各种油。

13. 发明申请

US20130206699A1 Method for the Open-Loop Control and/or Closed-Loop Control of Filter Systems with a Media Filter 审中-公开
标题翻译：具有介质过滤器的过滤系统的开环控制和/或闭环控制的方法
公开(公告)号：US20130206699A1
公开(公告)日：2013-08-15
申请号：US13751607
申请日：2013-01-28
申请人： KRONES AG
发明人： Dirk Scheu , Jörg Zacharias
IPC分类号： B01D24/48
CPC分类号： B01D24/48 , B01D37/04 , C02F1/001 , C02F1/008 , C02F2209/006 , C02F2303/16
摘要： A method for the open-loop control and/or closed-loop control of a filter system for the filtration of an untreated fluid with a media filter, particularly with a gravel bed filter, multilayer filter or activated charcoal filter, whereby the open-loop control and/or closed-loop control takes place on the basis of the fuzzy logic and/or artificial neural networks.
摘要翻译：用于过滤系统的开环控制和/或闭环控制的方法，用于过滤具有介质过滤器的未处理流体，特别是用于砾石床过滤器，多层过滤器或活性炭过滤器，由此开环在模糊逻辑和/或人造神经网络的基础上进行控制和/或闭环控制。

14. 发明申请

US20120074069A1 SMART FILTER MONITOR 审中-公开
标题翻译：智能过滤器监视器
公开(公告)号：US20120074069A1
公开(公告)日：2012-03-29
申请号：US12838953
申请日：2010-07-19
申请人： David L. Ripley , Brian E. Hemesath
发明人： David L. Ripley , Brian E. Hemesath
IPC分类号： B01D35/143 , G01N11/02 , B01D35/147
CPC分类号： B01D35/1435 , B01D35/147 , B01D37/04 , G01N11/08
摘要： An enhanced system for monitoring clogging of a fluid filter. A differential pressure sensor connects to fluid lines on opposite sides of the filter to measure a pressure difference across the filter. A viscosity-indicating property sensor connects to one of the fluid lines to measure a viscosity-indicating property of the fluid. A filter monitor in communication with the differential pressure sensor and the viscosity-indicating property sensor issues an operator alert when the pressure difference across the filter exceeds a differential pressure set point. The differential pressure set point is a function of the viscosity-indicating property of the fluid in the fluid line. In one embodiment, a fluid flow rate device in communication with the filter monitor indicates a flow rate of the fluid through the filter. The differential pressure set point is additionally a function of the flow rate of fluid through the filter.
摘要翻译：一种用于监测流体过滤器堵塞的增强系统。差压传感器连接到过滤器相对侧的流体管线，以测量过滤器两端的压差。粘度指示性传感器连接到一条流体管线，以测量流体的粘度指示性质。与差压传感器和粘度指示特性传感器通信的过滤器监控器在过滤器上的压差超过压差设定点时发出操作者警报。压差设定点是流体管路中的流体粘度指示性质的函数。在一个实施例中，与过滤器监视器连通的流体流量装置指示通过过滤器的流体的流速。压差设定值另外是通过过滤器的流体的流量的函数。

15. 发明申请

US20110136064A1 FLUID FILTRATION METHOD, FLUID FILTERED THEREBY, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACUTRING METHOD 有权
标题翻译：流体过滤方法，流体过滤器，光刻设备和设备制造方法
公开(公告)号：US20110136064A1
公开(公告)日：2011-06-09
申请号：US13029828
申请日：2011-02-17
申请人： Martinus Cornelis Maria Verhagen , Roelof Frederik De Graaf , Johannes Henricus Wilhelmus Jacobs , Hans Jansen , Marco Koert Stavenga , Jacobus Johannus Leonardus Hendricus Verspay
发明人： Martinus Cornelis Maria Verhagen , Roelof Frederik De Graaf , Johannes Henricus Wilhelmus Jacobs , Hans Jansen , Marco Koert Stavenga , Jacobus Johannus Leonardus Hendricus Verspay
IPC分类号： G03F7/20 , B01D29/56 , B01D35/00 , G03F7/00 , G03B27/52
CPC分类号： B01D37/04 , Y10S210/90
摘要： A method for filtering a fluid to obtain a fluid having a known purity is described. The fluid is filtered with a filtration system, and upstream of a final filtration stage of the filtration system, a purity of the fluid is measured. A purity of the fluid filtered by the filtration system is determined by correcting the measured purity with a filtration behavior of the final filtration stage. In an embodiment, the fluid comprises an ultra pure water for use as an immersion liquid in a lithographic apparatus.
摘要翻译：描述了用于过滤流体以获得具有已知纯度的流体的方法。流体用过滤系统过滤，并且在过滤系统的最终过滤阶段的上游，测量流体的纯度。通过过滤系统过滤的流体的纯度通过用最终过滤阶段的过滤行为校正测量的纯度来确定。在一个实施例中，流体包括用作光刻设备中的浸没液体的超纯水。

16. 发明授权

US07914687B2 Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method 有权
标题翻译：流体过滤法，流体过滤器，光刻设备和器件制造方法
公开(公告)号：US07914687B2
公开(公告)日：2011-03-29
申请号：US12078846
申请日：2008-04-07
申请人： Martinus Cornelis Maria Verhagen , Roelof Frederik De Graaf , Johannes Henricus Wilhelmus Jacobs , Hans Jansen , Marco Koert Stavenga , Jacobus Johannus Leonardus Hendricus Verspay
发明人： Martinus Cornelis Maria Verhagen , Roelof Frederik De Graaf , Johannes Henricus Wilhelmus Jacobs , Hans Jansen , Marco Koert Stavenga , Jacobus Johannus Leonardus Hendricus Verspay
IPC分类号： G03F7/20 , B01D37/00
CPC分类号： B01D37/04 , Y10S210/90
摘要： A method for filtering a fluid to obtain a fluid having a known purity is described. The fluid is filtered with a filtration system, and upstream of a final filtration stage of the filtration system, a purity of the fluid is measured. A purity of the fluid filtered by the filtration system is determined by correcting the measured purity with a filtration behavior of the final filtration stage. In an embodiment, the fluid comprises an ultra pure water for use as an immersion liquid in a lithographic apparatus.
摘要翻译：描述了用于过滤流体以获得具有已知纯度的流体的方法。流体用过滤系统过滤，并且在过滤系统的最终过滤阶段的上游，测量流体的纯度。通过过滤系统过滤的流体的纯度通过用最终过滤阶段的过滤行为校正测量的纯度来确定。在一个实施例中，流体包括用作光刻设备中的浸没液体的超纯水。

17. 发明授权

US07815808B2 Hot-gas pressure-filter apparatus 有权
标题翻译：热气压滤机
公开(公告)号：US07815808B2
公开(公告)日：2010-10-19
申请号：US10501208
申请日：2003-01-21
申请人： Steve C. Benesi , Patrick J. Costelloe
发明人： Steve C. Benesi , Patrick J. Costelloe
IPC分类号： B01D37/00
CPC分类号： B01D29/09 , B01D29/60 , B01D29/6415 , B01D29/6423 , B01D29/72 , B01D29/78 , B01D29/843 , B01D37/04 , B01D2201/54 , C02F11/128
摘要： A pressure-filter is disclosed along with its peripheral equipment that permit the automatic controlled operation of the filter for extracting liquids from a fluid liquid/solid slurry and for the formation of a substantially dry filter cake. The efficiency of the filter apparatus is increased by the use of hot gas as a material for treating the cake within the filter for extracting the liquids as filtrate. The hot gas may be hot air, hot inert gas, steam, or combinations thereof in controlled sequences. The filter is adapted to be able to operate under vacuum or elevated pressure and at elevated temperatures.
摘要翻译：公开了压滤器及其外围设备，其允许用于从流体液体/固体浆料中提取液体的过滤器的自动控制操作以及形成基本上干燥的滤饼。通过使用热气作为处理过滤器中的滤饼的材料来提取过滤装置的效率来提取液体作为滤液。热气体可以是受控制的顺序的热空气，热惰性气体，蒸汽或其组合。过滤器适于能够在真空或升高的压力下和在升高的温度下操作。

18. 发明申请

US20060027509A1 Hot-gas pressure-filter apparatus 有权
标题翻译：热气压滤器
公开(公告)号：US20060027509A1
公开(公告)日：2006-02-09
申请号：US10501208
申请日：2003-01-21
申请人： Steve Benesi , Patrick Costelloe
发明人： Steve Benesi , Patrick Costelloe
IPC分类号： C02F1/00
CPC分类号： B01D29/09 , B01D29/60 , B01D29/6415 , B01D29/6423 , B01D29/72 , B01D29/78 , B01D29/843 , B01D37/04 , B01D2201/54 , C02F11/128
摘要： A pressure-filter is disclosed along with its peripheral equipment that permit the automatic controlled operation of the filter for extracting liquids from a fluid liquid/solid slurry and for the formation of a substantially dry filter cake. The efficiency of the filter apparatus is increased by the use of hot gas as an material for treating the cake within the filter for extracting the liquids as filtrate. The hot gas may be hot air, hot inert gas, steam, or combinations thereof in controlled sequences. The filter is adapted to be able to operate under vacuum or elevated pressure and at elevated temperatures.
摘要翻译：公开了压滤器及其外围设备，其允许用于从流体液体/固体浆料中提取液体的过滤器的自动控制操作以及形成基本上干燥的滤饼。通过使用热气作为处理过滤器中的滤饼的材料来提取过滤装置的效率来提取液体作为滤液。热气体可以是受控制的顺序的热空气，热惰性气体，蒸汽或其组合。过滤器适于能够在真空或升高的压力下和在升高的温度下操作。

19. 发明授权

US06979397B2 Dynamic particle removing flushing system 有权
标题翻译：动态除尘冲洗系统
公开(公告)号：US06979397B2
公开(公告)日：2005-12-27
申请号：US10392318
申请日：2003-03-19
申请人： Steven R. Evanovich , Alexander D. Kiderman
发明人： Steven R. Evanovich , Alexander D. Kiderman
IPC分类号： B01D35/143 , B01D37/04 , B08B9/02
CPC分类号： B01D35/143 , B01D37/04 , B01D2201/54
摘要： A portable, controllable fluid filtration flushing system with automated feedback, remote access, and documented operation is designed for hydraulic fluid or the like and has a base mounted on wheels for transporting the system. A filtration system mounted on the base is connectable to the hydraulic fluid system of the machine to be flushed. Feedback sensors mounted on the base, such as a particulate sensor or particle counter, are coupled to the filtration system. A programmable logic controller (PLC) is mounted on the base to control and document the operation of the flushing system. An operator input mechanism, such as a touch screen or keypad, may be on the base. The PLC is remotely accessible by an operator such as through the Internet, hardwire connection, RF connection, or the like.
摘要翻译：具有自动反馈，远程访问和文件化操作的便携式可控流体过滤冲洗系统设计用于液压流体等，并具有安装在车轮上用于运输系统的基座。安装在基座上的过滤系统可连接到要冲洗的机器的液压系统。安装在基座上的反馈传感器，例如颗粒传感器或颗粒计数器，耦合到过滤系统。可编程逻辑控制器（PLC）安装在基座上，以控制和记录冲洗系统的操作。操作员输入机构，例如触摸屏或键盘，可以在基础上。 PLC可由操作者远程访问，例如通过因特网，硬线连接，RF连接等。

20. 发明授权

US06890242B2 Method of fabricating a semiconductor device 失效
标题翻译：制造半导体器件的方法
公开(公告)号：US06890242B2
公开(公告)日：2005-05-10
申请号：US10781009
申请日：2004-02-18
申请人： Motoyuki Tsuihiji , Hirofumi Iinuma
发明人： Motoyuki Tsuihiji , Hirofumi Iinuma
IPC分类号： B01D25/164 , B01D29/15 , B01D29/27 , B01D36/02 , B01D37/02 , B01D63/08 , B01D69/14 , C02F1/32 , C02F1/44 , C02F1/52 , C02F9/00 , H01L21/00 , B24B1/00
CPC分类号： C02F1/444 , B01D25/164 , B01D29/15 , B01D29/27 , B01D29/39 , B01D29/52 , B01D29/56 , B01D29/58 , B01D29/70 , B01D29/86 , B01D36/02 , B01D36/04 , B01D37/02 , B01D37/04 , B01D63/082 , B01D69/14 , C02F1/32 , C02F1/441 , C02F1/52 , C02F2103/02 , C02F2103/346 , H01L21/67028 , Y02P70/605 , Y02W10/37
摘要： Techniques for recycling waste particles may include solidifying particles, which were generated by machining a crystal ingot into a wafer or by machining a semiconductor wafer, into a cake, and melting the cake, for example, into an ingot.
摘要翻译：用于回收废粒子的技术可以包括通过将晶锭加工成晶片或通过机加工半导体晶片而生成的固化颗粒，并将其熔化成锭。

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