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    • 12. 发明授权
    • Three dimensional transducer
    • 三维传感器
    • US08844366B2
    • 2014-09-30
    • US14004138
    • 2012-03-09
    • Oden Lee WarrenSyed Amanulla Syed AsifYunje OhYuxin FengEdward CyrankowskiRyan Major
    • Oden Lee WarrenSyed Amanulla Syed AsifYunje OhYuxin FengEdward CyrankowskiRyan Major
    • G01B7/16
    • G01B7/16G01D5/2417G01L5/165G01N3/42G01N2203/0286G01Q60/366
    • A testing instrument for mechanical testing at nano or micron scale includes a transducer body, and a coupling shaft coupled with a probe tip. A transducer body houses a capacitor. The capacitor includes first and second counter electrodes and a center electrode assembly interposed therebetween. The center electrode assembly is movable with the coupling shaft relative to the first and second counter electrodes, for instance in one or more of dimensions including laterally and normally. The center electrode assembly includes a center plate coupled with the coupling shaft and one or more springs extending from the center plate. Upper and lower plates are coupled with the center plate and cover the center plate and the one or more springs. A shaft support assembly includes one or more support elements coupled along the coupling shaft. The shaft support assembly provides lateral support to the coupling shaft.
    • 用于纳米或微米级的机械测试的测试仪器包括换能器主体和耦合轴与探针尖端耦合。 传感器体容纳电容器。 该电容器包括第一和第二对置电极和介于其间的中心电极组件。 中心电极组件可以通过联接轴相对于第一和第二对电极移动,例如在横向和正常的一个或多个维度中。 中心电极组件包括与联接轴联接的中心板和从中心板延伸的一个或多个弹簧。 上板和下板与中心板连接并覆盖中心板和一个或多个弹簧。 轴支撑组件包括沿联接轴联接的一个或多个支撑元件。 轴支撑组件为联接轴提供横向支撑。