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11. 发明申请

US20110303457A1 Electronic Device, Resonator, Oscillator and Method for Manufacturing Electronic Device 有权
标题翻译：电子设备，谐振器，振荡器和电子设备制造方法
公开(公告)号：US20110303457A1
公开(公告)日：2011-12-15
申请号：US13168561
申请日：2011-06-24
申请人： Shogo INABA , Akira SATO
发明人： Shogo INABA , Akira SATO
IPC分类号： H01L23/28
CPC分类号： B81B3/0075 , H01L24/05 , H01L2224/05554 , H01L2924/13091 , H01L2924/14 , H01L2924/1461 , H01L2924/15788 , H01L2924/00
摘要： An electronic device includes a substrate, a functional structural body formed on the substrate and a covering structure for defining a cavity part having the functional structural body disposed therein, wherein the covering structure is provided with a side wall provided on the substrate and comprising an interlayer insulating layer surrounding the cavity part and a wiring layer; a first covering layer covering an upper portion of the cavity part and having an opening penetrating through the cavity part and composed of a laminated structure including a corrosion-resistant layer; and a second covering layer for closing the opening.
摘要翻译：电子设备包括基板，形成在基板上的功能结构体和用于限定具有设置在其中的功能结构体的空腔部分的覆盖结构，其中覆盖结构设置有设置在基板上的侧壁，围绕空腔部分的绝缘层和布线层; 覆盖所述空腔部的上部的第一覆盖层，具有穿过所述空腔部的开口，由包含耐腐蚀层的层叠结构构成的第一覆盖层; 以及用于封闭开口的第二覆盖层。

12. 发明申请

US20110095383A1 MEMS DEVICE HAVING A MOVABLE ELECTRODE 有权
公开(公告)号：US20110095383A1
公开(公告)日：2011-04-28
申请号：US12981747
申请日：2010-12-30
申请人： Toru WATANABE , Akira SATO , Shogo INABA , Takeshi MORI
发明人： Toru WATANABE , Akira SATO , Shogo INABA , Takeshi MORI
IPC分类号： H01L29/84
CPC分类号： B81B3/0086 , B81B2201/0271
摘要： A microelectromechanical system (MEMS) device includes a semiconductor substrate, a MEMS including a fixed electrode and a movable electrode formed on the semiconductor substrate through an insulating layer, and a well formed in the semiconductor substrate below the fixed electrode. The well is one of an n-type well and a p-type well. The p-type well applies a positive voltage to the fixed electrode while the n-type well applies a negative voltage to the fixed electrode.

13. 发明申请

US20110031564A1 MEMS DEVICE AND FABRICATION METHOD THEREOF 有权
标题翻译： MEMS器件及其制造方法
公开(公告)号：US20110031564A1
公开(公告)日：2011-02-10
申请号：US12907337
申请日：2010-10-19
申请人： Shogo INABA , Akira SATO , Toru WATANABE , Takeshi MORI
发明人： Shogo INABA , Akira SATO , Toru WATANABE , Takeshi MORI
IPC分类号： H01L29/84
CPC分类号： B81B3/0086
摘要： A micro electro mechanical system (MEMS) device includes: a fixed electrode made of silicon and provided above a semiconductor substrate; a movable electrode made of silicon and arranged in a mechanically movable manner by having a gap from the semiconductor substrate; and a wiring layered part that is provided around the movable electrode, covers a portion of the fixed electrode and includes wiring. One of the fixed electrode and the movable electrode is implanted with an impurity ion and at least a part of the portion of the fixed electrode covered by the wiring layered part is silicidized.
摘要翻译：微电子机械系统（MEMS）装置包括：由硅制成并设置在半导体衬底之上的固定电极; 由硅制成的可移动电极，通过与半导体衬底有间隙以机械可移动的方式布置; 以及设置在可动电极周围的布线层叠部，覆盖固定电极的一部分并且包括布线。固定电极和可动电极之一注入杂质离子，被布线层叠部覆盖的固定电极的部分的至少一部分被硅化。

14. 发明申请

US20100140734A1 Electronic Device and Method for Manufacturing Thereof 有权
标题翻译：电子设备及其制造方法
公开(公告)号：US20100140734A1
公开(公告)日：2010-06-10
申请号：US12707943
申请日：2010-02-18
申请人： Akira SATO , Toru WATANABE , Shogo INABA , Takeshi MORI
发明人： Akira SATO , Toru WATANABE , Shogo INABA , Takeshi MORI
IPC分类号： H01L29/06
CPC分类号： B81C1/00246 , B81B2207/015 , B81B2207/07 , B81C2203/0136 , B81C2203/0714 , B81C2203/0735 , H01L21/7682 , H01L24/05 , H01L2924/14 , H01L2924/00
摘要： An electronic device, including a substrate, a functional structure constituting a functional element formed on the substrate, and a cover structure forming a cavity portion in which the functional structure is disposed, is disclosed. In the electronic device, the cover structure includes a laminated structure of an interlayer insulating film and a wiring layer, the laminated structure being formed on the substrate in such a way that it surrounds the cavity portion, and the cover structure has an upside cover portion covering the cavity portion from above, the upside cover portion being formed with part of the wiring layer that is disposed above the functional structure.
摘要翻译：公开了一种电子设备，包括基板，构成在基板上形成的功能元件的功能结构，以及形成其中设置有功能结构的空腔部分的盖结构。在电子设备中，盖结构包括层间绝缘膜和布线层的叠层结构，层叠结构以包围空腔部分的方式形成在基板上，并且盖结构具有上侧盖部分从上方覆盖空腔部分，上侧盖部分形成有设置在功能结构上方的布线层的一部分。

15. 发明申请

US20100109815A1 MEMS RESONATOR AND MANUFACTURING METHOD OF THE SAME 有权
标题翻译： MEMS谐振器及其制造方法
公开(公告)号：US20100109815A1
公开(公告)日：2010-05-06
申请号：US12684336
申请日：2010-01-08
申请人： Shogo INABA , Akira SATO , Toru WATANABE , Takeshi MORI
发明人： Shogo INABA , Akira SATO , Toru WATANABE , Takeshi MORI
IPC分类号： H01P7/00
CPC分类号： H03H3/0073 , H03H9/1057 , Y10S977/721
摘要： A method is for manufacturing a microelectromechanical system resonator having a semiconductor device and a microelectromechanical system structure unit formed on a substrate. The method includes: forming a lower electrode of an oxide-nitride-oxide capacitor unit included in the semiconductor device using a first silicon layer; forming, using a second silicon layer, a substructure of the microelectromechanical system structure unit and an upper electrode of the oxide-nitride-oxide capacitor unit included in the semiconductor device; and forming, using a third silicon layer, a superstructure of the microelectromechanical system structure unit and a gate electrode of a complementary metal oxide semiconductor circuit unit included in the semiconductor device.
摘要翻译：一种用于制造具有形成在基板上的半导体器件和微机电系统结构单元的微机电系统谐振器的方法。该方法包括：使用第一硅层形成包括在半导体器件中的氧化物 - 氮化物 - 氧化物电容器单元的下电极; 使用第二硅层形成微机电系统结构单元的子结构和包括在半导体器件中的氧化物 - 氮化物 - 氧化物电容器单元的上电极; 以及使用第三硅层形成所述微机电系统结构单元的上部结构和包括在所述半导体器件中的互补金属氧化物半导体电路单元的栅电极。

16. 发明申请

US20080093684A1 MEMS DEVICE AND FABRICATION METHOD THEREOF 有权
标题翻译： MEMS器件及其制造方法
公开(公告)号：US20080093684A1
公开(公告)日：2008-04-24
申请号：US11872351
申请日：2007-10-15
申请人： Shogo INABA , Akira SATO , Toru WATANABE , Takeshi MORI
发明人： Shogo INABA , Akira SATO , Toru WATANABE , Takeshi MORI
IPC分类号： H01L29/84 , H01L21/44
CPC分类号： B81B3/0086
摘要： A micro electro mechanical system (MEMS) device includes: a fixed electrode made of silicon and provided above a semiconductor substrate; a movable electrode made of silicon and arranged in a mechanically movable manner by having a gap from the semiconductor substrate; and a wiring layered part that is provided around the movable electrode, covers a portion of the fixed electrode and includes wiring. One of the fixed electrode and the movable electrode is implanted with an impurity ion and at least a part of the portion of the fixed electrode covered by the wiring layered part is silicidized.
摘要翻译：微电子机械系统（MEMS）装置包括：由硅制成并设置在半导体衬底之上的固定电极; 由硅制成的可移动电极，通过与半导体衬底有间隙以机械可移动的方式布置; 以及设置在可动电极周围的布线层叠部，覆盖固定电极的一部分并且包括布线。固定电极和可动电极之一注入杂质离子，被布线层叠部覆盖的固定电极的部分的至少一部分被硅化。

17. 发明申请

US20110254110A1 MEMS DEVICE HAVING A MOVABLE ELECTRODE 有权
标题翻译：具有可移动电极的MEMS器件
公开(公告)号：US20110254110A1
公开(公告)日：2011-10-20
申请号：US13170628
申请日：2011-06-28
申请人： Toru WATANABE , Akira SATO , Shogo INABA , Takeshi MORI
发明人： Toru WATANABE , Akira SATO , Shogo INABA , Takeshi MORI
IPC分类号： H01L29/84
CPC分类号： B81B3/0086 , B81B2201/0271
摘要： A microelectromechanical system (MEMS) device includes a semiconductor substrate, a MEMS including a fixed electrode and a movable electrode formed on the semiconductor substrate through an insulating layer, and a well formed in the semiconductor substrate below the fixed electrode. The well is one of an n-type well and a p-type well. The p-type well applies a positive voltage to the fixed electrode while the n-type well applies a negative voltage to the fixed electrode.
摘要翻译：微机电系统（MEMS）器件包括半导体衬底，包括固定电极的MEMS和通过绝缘层形成在半导体衬底上的可移动电极，以及形成在固定电极下方的半导体衬底中的阱。井是n型井和p型井之一。 p型阱对固定电极施加正电压，而n型阱对固定电极施加负电压。

18. 发明申请

US20080105951A1 Electronic Device and Method for Manufacturing Thereof 有权
标题翻译：电子设备及其制造方法
公开(公告)号：US20080105951A1
公开(公告)日：2008-05-08
申请号：US11875383
申请日：2007-10-19
申请人： Akira SATO , Toru WATANABE , Shogo INABA , Takeshi MORI
发明人： Akira SATO , Toru WATANABE , Shogo INABA , Takeshi MORI
IPC分类号： H01L29/06 , H01L21/30
CPC分类号： B81C1/00246 , B81B2207/015 , B81B2207/07 , B81C2203/0136 , B81C2203/0714 , B81C2203/0735 , H01L21/7682 , H01L24/05 , H01L2924/14 , H01L2924/00
摘要： An electronic device, including a substrate, a functional structure constituting a functional element formed on the substrate, and a cover structure forming a cavity portion in which the functional structure is disposed, is disclosed. In the electronic device, the cover structure includes a laminated structure of an interlayer insulating film and a wiring layer, the laminated structure being formed on the substrate in such a way that it surrounds the cavity portion, and the cover structure has an upside cover portion covering the cavity portion from above, the upside cover portion being formed with part of the wiring layer that is disposed above the functional structure.
摘要翻译：公开了一种电子设备，包括基板，构成在基板上形成的功能元件的功能结构，以及形成其中设置有功能结构的空腔部分的盖结构。在电子设备中，盖结构包括层间绝缘膜和布线层的叠层结构，层叠结构以包围空腔部分的方式形成在基板上，并且盖结构具有上侧盖部分从上方覆盖空腔部分，上侧盖部分形成有设置在功能结构上方的布线层的一部分。

19. 发明申请

US20110048628A1 METHOD OF MANUFACTURING A DISCRETE TRACK MEDIUM TYPE PERPENDICULAR MAGNETIC RECORDING MEDIUM 失效
标题翻译：离散轨道中型磁记录介质的制造方法
公开(公告)号：US20110048628A1
公开(公告)日：2011-03-03
申请号：US12854096
申请日：2010-08-10
申请人： Akira SATO
发明人： Akira SATO
IPC分类号： B32B38/10
CPC分类号： B32B38/10 , B32B37/02 , B32B2309/105 , B32B2429/02 , G11B5/855 , Y10T156/1052
摘要： A method of manufacturing a discrete track medium type perpendicular magnetic recording layer with reduced magnetic interference between tracks and enhanced magnetic recording density is disclosed in which protruding parts of a pattern of protrusions and recesses provided in a composite magnetic recording layer are formed in high quality having a similar film thickness and equivalent perpendicular magnetic recording performance to a perpendicular magnetic recording layer designed for a continuous film type medium. The method includes a first step of laminating at least a magnetic recording layer, a sacrifice layer, and a carbon protective layer on a nonmagnetic substrate in this order; a second step of selectively removing the resist film and the carbon protective layer at openings for forming recessed parts using a mask of a resist film pattern formed concentric to form protruding parts for constructing recording tracks; a third step of modifying the sacrifice layer and the magnetic recording layer exposing at the recessed parts into a nonmagnetic state; a fourth step of removing the resist film, the carbon protective layer, and the sacrifice layer at the protruding parts between the recessed parts; and a fifth step of depositing a carbon protective layer and a lubricant layer in this order on the recessed parts and the protruding parts.
摘要翻译：公开了一种制造具有磁道和磁记录密度之间的磁干扰减小的离散轨道介质型垂直磁记录层的方法，其中设置在复合磁记录层中的突起和凹陷图案的突出部分以高质量形成，对于连续膜型介质设计的垂直磁记录层具有相似的膜厚度和等效的垂直磁记录性能。该方法包括：依次层叠至少磁性记录层，牺牲层和碳保护层的第一步骤; 使用同心形成的抗蚀剂膜图案的掩模来形成凹部的开口处选择性地去除抗蚀剂膜和碳保护层的第二步骤，以形成用于构建记录轨道的突出部分; 将牺牲层和在所述凹陷部暴露的磁记录层修改为非磁性状态的第三步骤; 在凹部之间的突出部分除去抗蚀剂膜，碳保护层和牺牲层的第四步骤; 以及在凹部和突出部上依次沉积碳保护层和润滑剂层的第五步骤。

20. 发明申请

US20100230767A1 MEMS SENSOR, MEMS SENSOR MANUFACTURING METHOD, AND ELECTRONIC DEVICE 审中-公开
标题翻译： MEMS传感器，MEMS传感器制造方法和电子设备
公开(公告)号：US20100230767A1
公开(公告)日：2010-09-16
申请号：US12721026
申请日：2010-03-10
申请人： Shigekazu TAKAGI , Akira SATO
发明人： Shigekazu TAKAGI , Akira SATO
IPC分类号： H01L29/84 , H01L21/02
CPC分类号： G01P15/125 , B81C1/00246 , B81C2203/0714 , G01P15/0802 , G01P15/18 , G01P2015/082
摘要： An MEMS sensor includes: a movable weight which is connected with a fixed frame via an elastic deformation portion and has a cavity portion around the movable weight, wherein the movable weight has a laminated layer structure including a plurality of conductive layers, a plurality of between-layers insulation layers each of which is disposed between the adjoining conductive layers of the plural conductive layers, and plugs which are inserted into predetermined embedding groove patterns penetrating through the respective layers of the plural between-layers insulation layers and have specific gravity larger than that of the between-layers insulation layers, and the plugs formed on the respective layers have wall portions in wall shapes extending in one or plural longitudinal directions.
摘要翻译： MEMS传感器包括：可移动重物，其通过弹性变形部分与固定框架连接并且具有围绕可移动重物的空腔部分，其中可移动重物具有包括多个导电层的层压层结构，层间绝缘层，其各自布置在多个导电层的相邻的导电层之间，以及插塞，其插入穿透多个层间绝缘层的各个层的预定的嵌入槽图案，并且具有比重大的比重并且形成在各层上的塞子具有在一个或多个纵向方向上延伸的壁形状的壁部分。

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