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11. 发明授权

US08519809B1 MEMS electrical switch 有权
标题翻译： MEMS电气开关
公开(公告)号：US08519809B1
公开(公告)日：2013-08-27
申请号：US13042333
申请日：2011-03-07
申请人： Yee-Chung Fu
发明人： Yee-Chung Fu
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H1/0036 , H01H2001/0078 , H01P1/127
摘要： A micro-electromechanical (MEMS) switch includes a substrate, stationary actuator comb teeth extending from a stationary actuator pad supported above the substrate, stationary contact comb teeth extending from a stationary contact pad supported above the substrate, and a body suspended over the substrate for rotation about an axis perpendicular to the substrate. The body includes movable actuator comb teeth interdigitated in-plane with the stationary actuator comb teeth where the shortest distance between adjacent movable and stationary actuator comb teeth has a first value. The body further includes movable contact comb teeth interdigitated in-plane with the stationary contact comb teeth where the shortest distance between adjacent movable and stationary contact comb teeth has a second value smaller than the first value.
摘要翻译：微机电（MEMS）开关包括基板，从支撑在基板上方的固定致动器垫延伸的固定致动器梳齿，从支撑在基板上方的固定接触垫延伸的固定接触梳齿，以及悬挂在基板上的主体，围绕垂直于衬底的轴旋转。主体包括与固定致动器梳齿平面内的可移动致动器梳齿，其中相邻的可动和静止致动器梳齿之间的最短距离具有第一值。主体还包括与固定接触梳齿平面地交叉指向的可动接触梳齿，其中相邻的可动和固定接触梳齿之间的最短距离具有小于第一值的第二值。

12. 发明授权

US07426066B2 MEMS scanning mirror with tunable natural frequency 有权
标题翻译： MEMS扫描镜具有可调谐的自然频率
公开(公告)号：US07426066B2
公开(公告)日：2008-09-16
申请号：US11273772
申请日：2005-11-14
申请人： Yee-Chung Fu , Ting-Tung Kuo
发明人： Yee-Chung Fu , Ting-Tung Kuo
IPC分类号： G02B26/10
CPC分类号： G02B26/0841
摘要： In one embodiment of the invention, a MEMS structure includes a first electrode, a second electrode, and a mobile element. The first electrode is coupled to a first voltage source. The second electrode is coupled to a second voltage source. The mobile element includes a third electrode coupled to a third voltage source. A steady voltage difference between the first electrode and the third electrode is used to tune the natural frequency of the structure to a scanning frequency of an application. An oscillating voltage difference between the second electrode and the third electrode at the scanning frequency of the application is used to oscillate the mobile element. In one embodiment, the mobile unit is a mirror.
摘要翻译：在本发明的一个实施例中，MEMS结构包括第一电极，第二电极和移动元件。第一电极耦合到第一电压源。第二电极耦合到第二电压源。移动元件包括耦合到第三电压源的第三电极。使用第一电极和第三电极之间的稳定的电压差来将结构的固有频率调谐到应用的扫描频率。使用在应用的扫描频率下的第二电极和第三电极之间的振荡电压差来振荡移动元件。在一个实施例中，移动单元是镜子。

13. 发明授权

US07402255B2 MEMS scanning mirror with trenched surface and I-beam like cross-section for reducing inertia and deformation 有权
标题翻译：具有沟槽表面和I型梁的MEMS扫描镜，用于减小惯性和变形
公开(公告)号：US07402255B2
公开(公告)日：2008-07-22
申请号：US11370417
申请日：2006-03-07
申请人： Yee-Chung Fu
发明人： Yee-Chung Fu
IPC分类号： B29D11/00
CPC分类号： G02B26/0841
摘要： A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. The mirror can include a top flange and a bottom flange joined by a web, wherein the top and the bottom flanges form the top and the bottom surfaces, respectively. The rotational comb teeth can have a tapered shape. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror.
摘要翻译：微电子机械系统（MEMS）装置包括具有沟槽的顶表面的反射镜，连接到反射镜的光束，连接到光束的旋转梳齿，以及将光束连接到接合焊盘的一个或多个弹簧。镜子可以具有用于反射光的底面。镜子可以包括顶部凸缘和由腹板连接的底部凸缘，其中顶部和底部凸缘分别形成顶部和底部表面。旋转梳齿可具有锥形形状。固定梳齿可以与旋转梳齿在平面内或平面外相互交错。旋转和固定梳齿之间的稳定或振荡电压差可用于振荡或调谐镜子。

14. 发明申请

US20070242342A1 MEMS MIRROR WITH PARALLEL SPRINGS AND ARCHED SUPPORT FOR BEAMS 有权
标题翻译：具有平行弹簧和架构支撑的MEMS镜
公开(公告)号：US20070242342A1
公开(公告)日：2007-10-18
申请号：US11263795
申请日：2005-10-31
申请人： Yee-Chung Fu
发明人： Yee-Chung Fu
IPC分类号： G02B26/00
CPC分类号： G02B26/0841
摘要： A micro-electro-mechanical system (MEMS) mirror device includes (1) a mirror, (2) a first group of spring elements coupled to one half of the mirror, (3) a first beam coupled to the first group of spring elements, (4) a first spring coupled to the first beam, and (5) a first stationary pad coupled to the first spring. The device further includes (6) a second group of spring elements coupled in parallel to another half of the mirror, (7) a second beam coupled to the second group of spring elements, (8) a second spring coupled to the second beam, (9) and a second stationary pad coupled to the second spring. The device further includes a third beam that rigidly interconnects the first and the second beams so they rotate the mirror in unison.
摘要翻译：微电子机械系统（MEMS）镜装置包括（1）反射镜，（2）耦合到反射镜的一半的第一组弹簧元件，（3）耦合到第一组弹簧元件的第一光束，（4）耦合到所述第一梁的第一弹簧，以及（5）联接到所述第一弹簧的第一固定垫。该装置还包括（6）平行于反射镜的另一半耦合的第二组弹簧元件，（7）耦合到第二组弹簧元件的第二光束，（8）耦合到第二光束的第二弹簧，（9）和耦合到第二弹簧的第二固定垫。该装置还包括第三梁，其将第一和第二梁刚性互连，使得它们一致地旋转反射镜。

15. 发明申请

US20060203326A1 Trimming a MEMS device to fine tune natural frequency 失效
公开(公告)号：US20060203326A1
公开(公告)日：2006-09-14
申请号：US11077099
申请日：2005-03-09
申请人： Yee-Chung Fu
发明人： Yee-Chung Fu
IPC分类号： G02B26/00
CPC分类号： G02B26/0841
摘要： A mirror device includes a mirror, an anchor, and a spring coupling the mirror to the anchor. The anchor and/or mirror can define one or more rows of holes adjacent to the coupling location of the spring. The natural frequency of the device can be adjusted by removing material between the perimeter of the mirror/anchor and the outermost holes, and between adjacent holes in the same row. Another mirror device includes a mirror, anchors, and springs coupling the mirror to the anchors. The natural frequency of the device can be adjusted by decoupling one or more springs coupling the mirror to the anchors. The mirror of both devices can includes one or more sacrificial portions. The natural frequencies of the both devices can also be adjusted by trimming the sacrificial portions.

16. 发明申请

US20060166444A1 MEMS scanning mirror with trenched surface and i-beam like cross-section for reducing inertia and deformation 有权
标题翻译： MEMS扫描镜具有沟槽表面和i-beam像横截面，以减少惯性和变形
公开(公告)号：US20060166444A1
公开(公告)日：2006-07-27
申请号：US11370417
申请日：2006-03-07
申请人： Yee-Chung Fu
发明人： Yee-Chung Fu
IPC分类号： H01L21/336
CPC分类号： G02B26/0841
摘要： A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. The mirror can include a top flange and a bottom flange joined by a web, wherein the top and the bottom flanges form the top and the bottom surfaces, respectively. The rotational comb teeth can have a tapered shape. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror.
摘要翻译：微电子机械系统（MEMS）装置包括具有沟槽的顶表面的反射镜，连接到反射镜的光束，连接到光束的旋转梳齿，以及将光束连接到接合焊盘的一个或多个弹簧。镜子可以具有用于反射光的底面。镜子可以包括顶部凸缘和由腹板连接的底部凸缘，其中顶部和底部凸缘分别形成顶部和底部表面。旋转梳齿可具有锥形形状。固定梳齿可以与旋转梳齿在平面内或平面外相互交错。旋转和固定梳齿之间的稳定或振荡电压差可用于振荡或调谐镜子。

17. 发明授权

US06769616B2 Bidirectional MEMS scanning mirror with tunable natural frequency 有权
标题翻译：具有可调自然频率的双向MEMS扫描镜
公开(公告)号：US06769616B2
公开(公告)日：2004-08-03
申请号：US10302387
申请日：2002-11-22
申请人： Yee-Chung Fu , Ting-Tung Kuo
发明人： Yee-Chung Fu , Ting-Tung Kuo
IPC分类号： G06K710
CPC分类号： G02B6/359 , G02B6/3518 , G02B6/357 , G02B6/3584 , G02B6/3586 , G02B26/0841 , G02B26/101
摘要： In one embodiment of the invention, a MEMS structure includes a first electrode, a second electrode, and a mobile element. The first electrode is coupled to a first voltage source. The second electrode is coupled to a second voltage source. The mobile element includes a third electrode coupled to a third voltage source. A steady voltage difference between the first electrode and the third electrode is used to tune the natural frequency of the structure to a scanning frequency of an application. An oscillating voltage difference between the second electrode and the third electrode at the scanning frequency of the application is used to oscillate the mobile element. In one embodiment, the mobile unit is a mirror.
摘要翻译：在本发明的一个实施例中，MEMS结构包括第一电极，第二电极和移动元件。第一电极耦合到第一电压源。第二电极耦合到第二电压源。移动元件包括耦合到第三电压源的第三电极。使用第一电极和第三电极之间的稳定的电压差来将结构的固有频率调谐到应用的扫描频率。使用在应用的扫描频率下的第二电极和第三电极之间的振荡电压差来振荡移动元件。在一个实施例中，移动单元是镜子。

18. 发明授权

US09201239B1 Two-dimensional electrostatic scanner with distributed springs 有权
标题翻译：具有分布弹簧的二维静电扫描仪
公开(公告)号：US09201239B1
公开(公告)日：2015-12-01
申请号：US14201668
申请日：2014-03-07
申请人： Yee-Chung Fu
发明人： Yee-Chung Fu
IPC分类号： G02B26/08 , G02B26/10
CPC分类号： G02B26/101 , G02B26/0841
摘要： A two-dimensional electrostatic scanner with distributed springs is disclosed. The two-dimensional electrostatic scanner comprises a frame, a mirror, one or more first-directional comb drives, two or more second-directional comb drives, four or more first-directional springs, and two or more second-directional springs. The four or more first-directional springs may connect to different electrical voltage source or electrical ground.
摘要翻译：公开了一种具有分布弹簧的二维静电扫描仪。二维静电扫描器包括框架，反射镜，一个或多个第一方向梳状驱动器，两个或更多个第二方向梳状驱动器，四个或更多个第一方向弹簧和两个或更多个第二方向弹簧。四个或更多个第一方向弹簧可以连接到不同的电压源或电接地。

19. 发明授权

US08636911B2 Process for MEMS scanning mirror with mass remove from mirror backside 有权
标题翻译：从镜面背面去除质量的MEMS扫描镜的工艺
公开(公告)号：US08636911B2
公开(公告)日：2014-01-28
申请号：US12924873
申请日：2010-10-07
申请人： Jun Chen , Guomin Mao , Tom Zhong , Wei Cao , Yee-Chung Fu , Chyu-Jiuh Torng
发明人： Jun Chen , Guomin Mao , Tom Zhong , Wei Cao , Yee-Chung Fu , Chyu-Jiuh Torng
IPC分类号： B81C1/00
CPC分类号： B81B3/0045 , B81B2201/042 , G02B26/0841
摘要： Two methods of fabricating a MEMS scanning mirror having a tunable resonance frequency are described. The resonance frequency of the mirror is set to a particular value by mass removal from the backside of the mirror during fabrication.
摘要翻译：描述制造具有可调共振频率的MEMS扫描反射镜的两种方法。反射镜的共振频率通过在制造期间从反射镜的背面质量去除而被设定为特定的值。

20. 发明申请

US20130167482A1 VACUUM SEALING PROCESS OF A MEMS PACKAGE 审中-公开
标题翻译： MEMS封装的真空密封工艺
公开(公告)号：US20130167482A1
公开(公告)日：2013-07-04
申请号：US13607618
申请日：2012-09-07
申请人： Yee-Chung Fu , Peter Wing-Kau Tang
发明人： Yee-Chung Fu , Peter Wing-Kau Tang
IPC分类号： B65B31/04
CPC分类号： B65B31/04 , B81C1/00269 , B81C2203/035
摘要： A vacuum sealing process of a micro-electrical-mechanical-system (MEMS) package is provided. Solder is applied to the rimmed bottom of a lid for the package. A micro-electro-mechanical system (MEMS) device is attached to a substrate for the package. Solder is applied to a lipped top of the substrate. The lid and the substrate are sealed in an elevated temperature and vacuum environment.
摘要翻译：提供了微机电系统（MEMS）封装的真空密封工艺。将焊料施加到用于封装的盖的边缘底部。微机电系统（MEMS）装置附接到用于封装的基板。将焊料施加到基底的唇形顶部。盖子和基板在高温和真空环境中密封。

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