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    • 13. 发明授权
    • Method of fabricating a silicon wafer including steps of different temperature ramp-up rates and cool-down rates
    • 制造硅晶片的方法包括不同温度升温速率和冷却速率的步骤
    • US06642123B2
    • 2003-11-04
    • US10156180
    • 2002-05-29
    • Young-Hee MunGun KimSung-Ho Yoon
    • Young-Hee MunGun KimSung-Ho Yoon
    • H01L2176
    • C30B33/00C30B29/06H01L21/3225
    • A method of fabricating a silicon wafer, which includes the steps of preparing a silicon wafer by slicing, grinding, and cleaning an ingot, inserting the silicon wafer in a diffusion furnace having an ambience of one of Ar, N2 and inert gas including Ar and N2, pre-heating and maintaining the diffusion furnace at about 500° C., changing the ambience into one of H2, Ar and inert gas including H2 and Ar successively, increasing a temperature of the diffusion furnace by a temperature-increasing speed of 50˜70° C./min between 500˜800° C., 10˜50° C./min between 800˜900° C., 0.5˜10° C./min between 900˜1000° C., and 0.1˜0.5° C./min between 1000˜1250° C., maintaining the diffusion furnace at 1200˜1250° C. for 1˜120 min, changing the ambience inside the diffusion furnace into one of Ar, N2 and inert gas ambience including Ar and N2 successively, and decreasing the temperature of the diffusion furnace down to 500 ° C. by a temperature-decreasing speed of 0.1˜0.5° C./min between 1000˜1250° C., 0.5˜10° C./min between 900˜1000° C., 10˜50° C./min between 800˜900° C., and 50˜70° C./min between 500˜800° C.
    • 一种制造硅晶片的方法,包括以下步骤:通过切片,研磨和清洁锭来制备硅晶片,将硅晶片插入具有Ar,N2和包括Ar的惰性气体之一的扩散炉中, N2,将扩散炉预热并维持在约500℃,连续地将气氛改变为包括H 2和Ar的H 2,Ar和惰性气体中的一种,将扩散炉的温度升高50℃ 在500〜800℃之间为〜70℃/分钟,800〜900℃之间为10〜50℃/分钟,900〜1000℃为0.5〜10℃/分钟, 在1000〜1250℃之间为0.5℃/分钟,将扩散炉保持在1200〜1250℃1〜120分钟,将扩散炉内的氛围改变为Ar,N2和惰性气体环境中的一种,包括Ar N2连续下降,扩散炉温度降至500℃,降温速度为0.1〜0.5℃/ min,1000〜 在900〜1000℃之间为0.5〜10℃/分钟,800〜900℃为10〜50℃/分钟,500〜800℃为50〜70℃/分钟 C。