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11. 发明授权

US06721034B1 Stage unit, drive table, and scanning exposure apparatus using the same 失效
标题翻译：舞台装置，驱动台和使用其的扫描曝光装置
公开(公告)号：US06721034B1
公开(公告)日：2004-04-13
申请号：US09327621
申请日：1999-06-08
申请人： Hiroto Horikawa
发明人： Hiroto Horikawa
IPC分类号： G03B2742
CPC分类号： G03F7/70358 , G03F7/70716 , G03F7/70725 , G03F7/70858 , G03F7/70875
摘要： It is an object of the present invention to reduce the weight of a stage unit and suppress heat generation of the driving unit of the stage, thereby improving the surface accuracy of the stage or measurement precision of an interferometer for measuring the position of the stage. A reticle base, a scanning stage mounted on the reticle stage and moved in the scanning direction, and a fine adjustment stage mounted on the scanning stage and capable of being finely moved in the X and Y directions and in the rotational direction are provided as a reticle stage. A first electromagnetic actuator for performing driving in the scanning direction, and a second electromagnetic actuator, having a smaller thrust than that of the first electromagnetic actuator, for performing driving in a direction perpendicular to the scanning direction are provided as the driving unit of the fine adjustment stage.
摘要翻译：本发明的目的是减轻舞台单元的重量并抑制舞台的驱动单元的发热，从而提高用于测量舞台位置的干涉仪的舞台表面精度或测量精度。掩模版基座，安装在标线片台上并沿扫描方向移动的扫描台以及安装在扫描台上并能够沿X和Y方向以及沿旋转方向微细移动的微调台设置为标线片阶段设置用于沿扫描方向进行驱动的第一电磁致动器和具有比第一电磁致动器小的推力的第二电磁致动器，用于沿与扫描方向垂直的方向进行驱动，作为罚款的驱动单元调整阶段

12. 发明授权

US5991005A Stage apparatus and exposure apparatus having the same 失效
标题翻译：舞台装置和曝光装置具有相同的功能
公开(公告)号：US5991005A
公开(公告)日：1999-11-23
申请号：US826380
申请日：1997-04-09
申请人： Hiroto Horikawa , Yutaka Hayashi
发明人： Hiroto Horikawa , Yutaka Hayashi
IPC分类号： G03F7/20 , G03B27/42 , B23Q16/00 , H01L21/027
CPC分类号： G03F7/70716
摘要： A stage apparatus comprising a support device for supporting a table at its center of gravity and a drive device for driving the table at positions apart from the center of gravity of the table without contacting with the table. The stage apparatus effectively reduces stresses created in the table and/or any thermal deformation of the table. The table is connected to three pairs of table support bars on the stage through three respective plate springs so as to minimize any harmful deformation of the table, which could otherwise occur when the table is driven for motion or displacement in the Z-direction or for adjustment of the tilt of the table. The stage apparatus includes three drive units with respective drive pins for driving the stage. For example, when the three drive pins are driven simultaneously by the associated drive units, the table is caused thereby to translate along the Z-axis. The drive pins are so arranged as to provide support for the table at support points just under respective securing points on the table at which the table is secured to the plate springs and to provide a drive for the, table in the Z-direction at the support points. Thus, when driven by the drive pins, the table is only subject to compression forces acting thereon in the Z-direction and not to any moment.
摘要翻译：一种舞台装置，包括用于在其重心处支撑桌子的支撑装置和驱动装置，用于在与桌子不接触的位置离开桌子的重心的位置驱动桌子。舞台装置有效地减少桌子中产生的应力和/或桌子的任何热变形。桌子通过三个相应的板簧连接到舞台上的三对桌面支撑杆上，以便最小化桌子的任何有害变形，否则当桌子被驱动以在Z方向上移动或移位时调整桌子的倾斜度。舞台装置包括具有用于驱动舞台的相应驱动销的三个驱动单元。例如，当三个驱动销由相关联的驱动单元同时驱动时，由此使工作台沿着Z轴平移。驱动销被布置成为桌子上的支撑点处提供支撑，该支撑点恰好在桌子上的相应的固定点处，其中工作台固定到板簧上，并且在Z方向上为支持点。因此，当由驱动销驱动时，工作台仅在Z方向上作用于其上的压缩力而不是任何时刻。

13. 发明授权

US5850280A Stage unit, drive table, and scanning exposure and apparatus using same 失效
标题翻译：舞台装置，驱动台和扫描曝光以及使用它的装置
公开(公告)号：US5850280A
公开(公告)日：1998-12-15
申请号：US935445
申请日：1997-09-23
申请人： Toshiya Ohtomo , Hiroto Horikawa
发明人： Toshiya Ohtomo , Hiroto Horikawa
IPC分类号： G03F7/20 , G03B27/42 , G03B27/72 , G03B27/58
CPC分类号： G03F7/70358 , G03F7/70716 , G03F7/70725 , G03F7/70858 , G03F7/70875
摘要： It is an object of the present invention to reduce the weight of a stage unit and suppress heat generation of the driving unit of the stage, thereby improving the surface accuracy of the stage or measurement precision of an interferometer for measuring the position of the stage. A reticle base, a scanning stage mounted on the reticle stage and moved in the scanning direction, and a fine adjustment stage mounted on the scanning stage and capable of being finely moved in the X and Y directions and in the rotational direction are provided as a reticle stage. A first electromagnetic actuator for performing driving in the scanning direction, and a second electromagnetic actuator, having a smaller thrust than that of the first electromagnetic actuator, for performing driving in a direction perpendicular to the scanning direction are provided as the driving unit of the fine adjustment stage.
摘要翻译：本发明的目的是减轻舞台单元的重量并抑制舞台的驱动单元的发热，从而提高用于测量舞台位置的干涉仪的舞台表面精度或测量精度。掩模版基座，安装在标线片台上并沿扫描方向移动的扫描台以及安装在扫描台上并能够沿X和Y方向以及沿旋转方向微细移动的微调台设置为标线片阶段设置用于沿扫描方向进行驱动的第一电磁致动器和具有比第一电磁致动器小的推力的第二电磁致动器，用于沿与扫描方向垂直的方向进行驱动，作为罚款的驱动单元调整阶段

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