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    • 11. 发明授权
    • Optical measurement system for determination of an object profile
    • 用于确定物体轮廓的光学测量系统
    • US5102226A
    • 1992-04-07
    • US463579
    • 1990-01-11
    • Kazunari YoshimuraShinji Okamoto
    • Kazunari YoshimuraShinji Okamoto
    • G01B11/24
    • G01B11/24
    • An optical object profile measurement system utilizes a light beam to scan an object surface and a position detector which receives a light beam reflected from the object surface to obtain position data of individual scanned points on the object surface. The position data is processed to determine a profile of the object profile along the scanned points. The position detector comprises a number of light receiving elements arranged in at least two linear arrays each extending in the direction of following the light beam moving across the object surface and is divided into subdivisions having one or more of the light receiving elements. The arrays are disposed side-by-side to receive the light beam. In a first one of the arrays, the light receiving elements are designated by first values which have differing subdivisions such that the elements designated by the same first value are coupled to provide a single first output when any one of such elements detects the light beam. In a second one of the arrays, the light receiving elements are designated by the second values which are different within each subdivision but are common to those of the other subdivisions such that the elements designated by the same second values are coupled to provide a single second output when any one of such elements detects the light beam. The first and second values are combined to provide the position data in a coded form for surface profile analysis.
    • 光学对象轮廓测量系统利用光束扫描物体表面,以及位置检测器,其接收从物体表面反射的光束,以获得物体表面上各个扫描点的位置数据。 处理位置数据以确定沿着扫描点的对象轮廓的轮廓。 位置检测器包括布置在至少两个线性阵列中的多个光接收元件,每个线性阵列沿着沿着穿过物体表面移动的光束的方向延伸,并且被划分为具有一个或多个光接收元件的细分。 阵列并排设置以接收光束。 在第一阵列中,光接收元件由具有不同细分的第一值指定,使得当相同第一值指定的元件被耦合以在这些元件中的任一个检测到光束时提供单个第一输出。 在阵列中的第二个阵列中,光接收元件由在每个细分中不同的第二值指定,但是与其他细分的那些共同,使得由相同的第二值指定的元件被耦合以提供单个秒 当这些元件中的任何一个检测到光束时输出。 组合第一和第二值以提供用于表面轮廓分析的编码形式的位置数据。
    • 12. 发明授权
    • Alternating current detection coil
    • 交流电流检测线圈
    • US07307410B2
    • 2007-12-11
    • US11562005
    • 2006-11-21
    • Akimi ShiokawaEiji IwamiYasuo IchimuraAkihiro IshibashiKazunari Yoshimura
    • Akimi ShiokawaEiji IwamiYasuo IchimuraAkihiro IshibashiKazunari Yoshimura
    • G01R19/00H01F27/28
    • H01F5/003G01R15/181
    • The AC detection coil is a toroidal coil and includes plural radial-line conductors which are formed on a front face and a rear face of a substrate, conductive connection parts and conductive through-holes which connect electrically each end of radial-line conductors, wherein plural winding turns are consecutively formed by a connection of each radial-line conductor on the front and the rear faces, respectively, and include a forward coil and a backward coil, and each shape on the front and the rear faces of the radial-line conductors and the conductive connection parts are identical with each other. Consequently, when seen from a thickness direction of the substrate, areas of the forward coil and the backward coil are equal to each other, and an external, unneeded to be detected, magnetic field can be canceled each other by the forward coil and the backward coil, then a current detection accuracy can be improved.
    • 交流检测线圈是环形线圈,并且包括形成在基板的正面和背面上的多个径向线导体,导电连接部分和导电通孔,导电通孔连接在径向线导体的每一端,其中 通过分别在前表面和后表面之间的每个径向线导体的连接来连续形成多个绕组匝,并且包括前线圈和后线圈,并且在径向线的前表面和后表面上的每个形状 导体和导电连接部分彼此相同。 因此,当从基板的厚度方向观察时,正向线圈和后向线圈的面积彼此相等,并且不需要检测的外部磁场可以通过正向线圈和向后线圈相互抵消 线圈,则可以提高电流检测精度。