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    • 12. 发明授权
    • Method for manufacturing semiconductor device
    • 制造半导体器件的方法
    • US06958279B2
    • 2005-10-25
    • US10642158
    • 2003-08-18
    • Manabu Kojima
    • Manabu Kojima
    • H01L21/265H01L21/336H01L21/8234H01L21/8238H01L27/088H01L27/092
    • H01L29/6659H01L21/823814H01L21/823864H01L29/665H01L29/6653H01L29/6656
    • A gate insulator film and a gate electrode are formed on a semiconductor substrate, and then a layered stack of a SiO2 film and a SiN film is formed on the entire surface. Subsequently, sidewalls made of polysilicon film are formed adjacent to the gate electrode via the layered stack of the SiO2 film and the SiN film. Then, using as a mask the gate electrode, portions of the layered stack adjacent to the gate electrode, and the sidewalls, an ion dopant is implanted into a device active region to thereby form source/drains therein, and the sidewalls are then removed. At this stage, since the gate insulator film is completely covered with the layered stack, the gate insulator film is not ablated or retreated even on a device isolation insulator film.
    • 在半导体衬底上形成栅极绝缘体膜和栅电极,然后在整个表面上形成SiO 2膜和SiN膜的叠层体。 随后,通过SiO 2膜和SiN膜的层叠堆叠形成由多晶硅膜制成的侧壁与栅电极相邻。 然后,使用栅极电极,与栅电极相邻的层叠堆叠部分和侧壁,将离子掺杂剂注入器件有源区,从而在其中形成源极/漏极,然后除去侧壁。 在这个阶段,由于栅极绝缘膜被层叠的堆叠完全覆盖,即使在器件隔离绝缘膜上,栅极绝缘膜也不会烧蚀或退火。
    • 16. 发明授权
    • Monochromator
    • 单色器
    • US6081332A
    • 2000-06-27
    • US217842
    • 1998-12-22
    • Manabu Kojima
    • Manabu Kojima
    • G01J3/06G01J3/18
    • G01J3/06G01J3/18
    • A monochromator including an incident portion upon which light to be measured is made incident; a first lens for converting the incident light to be measured into parallel rays of light; a diffraction grating for receiving the light to be measured converted into the parallel rays of light and for outputting the light at an angle which differs depending on wavelength; a second lens for condensing the output light outputted from the diffraction grating at a certain angle; an output portion for outputting the output light thus condensed; and an angle changing device for making variable at least a relative angle between the diffraction grating and the second lens by one of rotation of the diffraction grating and movement of arrangement of the first and second lenses centering around the diffraction grating.
    • 包括入射部分的单色仪,使入射光被测量; 用于将待测量的入射光转换为平行光线的第一透镜; 衍射光栅,用于将待测光转换成平行光,并以与波长不同的角度输出光; 第二透镜,用于以一定角度聚焦从衍射光栅输出的输出光; 输出部分,用于输出如此冷凝的输出光; 以及角度改变装置,用于通过衍射光栅的旋转和围绕衍射光栅的第一和第二透镜的布置的移动来使衍射光栅和第二透镜之间的至少相对角度变化。
    • 17. 发明授权
    • Lateral bipolar transistor and method of producing the same
    • 侧面双极晶体管及其制造方法
    • US5376823A
    • 1994-12-27
    • US127119
    • 1993-09-27
    • Manabu KojimaNaoshi Higaki
    • Manabu KojimaNaoshi Higaki
    • H01L21/331H01L29/73H01L29/72
    • H01L29/66265H01L29/7317
    • A lateral bipolar transistor includes an insulating substrate, a single crystal semiconductor layer having a first conductivity, a mask layer which has a substantially vertical side surface and which is in contact with the single crystal semiconductor layer, and an insulating sidewall formed along the side surface of the mask layer. A base region is located under the insulating sidewall and formed in the single crystal semiconductor layer. The base region has a second conductivity opposite to the first conductivity and contains an impurity implanted by an ion implantation process. The single crystal semiconductor layer has an underlying portion on which the mask layer and the insulating sidewall are formed. An emitter region is formed in a first portion of the single crystal semiconductor layer other than the underlying portion. A collector region is formed in a second portion of the single crystal semiconductor layer other than the underlying portion.
    • 横向双极晶体管包括绝缘基板,具有第一导电性的单晶半导体层,具有基本上垂直的侧表面并与单晶半导体层接触的掩模层,以及沿着侧表面形成的绝缘侧壁 的掩模层。 基极区域位于绝缘侧壁下方并形成在单晶半导体层中。 基极区具有与第一导电性相反的第二导电性,并且含有通过离子注入工艺注入的杂质。 单晶半导体层具有其上形成有掩模层和绝缘侧壁的基底部分。 发射极区域形成在除下层部分之外的单晶半导体层的第一部分中。 集电极区域形成在除下层部分之外的单晶半导体层的第二部分中。