专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

11. 发明授权

US07724003B1 Substrate conditioning for corona charge control 有权
标题翻译：基底调理电晕充电控制
公开(公告)号：US07724003B1
公开(公告)日：2010-05-25
申请号：US11938355
申请日：2007-11-12
申请人： NanChang Zhu , Jainou Shi , Min Xiang , ZiangHua Liu , Goujun Zhang , Xiafang Zhang , Shiyou Pei , Liang-Guo Wang , Joseph R. Laia, Jr.
发明人： NanChang Zhu , Jainou Shi , Min Xiang , ZiangHua Liu , Goujun Zhang , Xiafang Zhang , Shiyou Pei , Liang-Guo Wang , Joseph R. Laia, Jr.
IPC分类号： G01R31/26
CPC分类号： H01L22/14
摘要： A measurement system for taking a reading in a test zone on a surface of a substrate. A chamber forms an environment, a surface treatment station dispenses a stabilizing chemical in the test zone, a charge deposition station deposits a charge in the test zone, and a QV measurement station takes a QV based measurement in the test zone. Where the surface treatment station, the charge deposition station, and the QV measurement station all interact with the substrate within the chamber. In this manner, reliable QV measurements are taken on the substrate by controlling charge spreading with the stabilizing chemical. QV measurement stability is also improved by reducing the influence of the time trending on substrates with reactive dielectrics, such as on silicon oxynitride and high-k surfaces.
摘要翻译：用于在基板表面上的测试区域读取的测量系统。室形成环境，表面处理站在测试区域中分配稳定化学品，电荷沉积站在测试区域中沉积电荷，QV测量站在测试区域进行基于QV的测量。表面处理站，电荷沉积站和QV测量站都与室内的基板相互作用。以这种方式，通过用稳定化学品控制电荷扩散，在衬底上进行可靠的QV测量。通过减少时间趋势对具有反应性电介质的衬底（例如氮氧化硅和高k表面）的影响也可改善QV测量稳定性。

12. 发明授权

US06667527B2 Temperature sensor with shell 失效
标题翻译：温度传感器带外壳
公开(公告)号：US06667527B2
公开(公告)日：2003-12-23
申请号：US10144216
申请日：2002-05-10
申请人： Brian Lue , Tetsuya Ishikawa , Liang-Guo Wang
发明人： Brian Lue , Tetsuya Ishikawa , Liang-Guo Wang
IPC分类号： H01L31058
CPC分类号： G01K11/3213 , G01K11/20
摘要： In at least one embodiment, the invention is a temperature sensor having a temperature sensitive material positioned within a shell. The shell has a first section and a second section, which are attached together by a non-adhesive bond. The non-adhesive bond being an atomic bond, such as a diffusion bond. The temperature sensitive material is capable of emitting a radiation signal which varies in its magnitude and character as the material's temperature changes. The shell allows transmission of the radiation signal through the shell to an external processor. Analysis of the emitted radiation signal by the processor can provide a temperature measurement. The temperature sensitive material is a phosphorescent, such as a phosphor. The shell may be made of a material which can be diffusion bonded, such materials include a silicon comprising material, a glass, a plastic, a sapphire and a quartz. The diffusion bond seals the shell, thus preventing the temperature sensitive material from being exposed to the surrounding environment. The sensor can include a stem attached to the shell. The stem is capable of transmitting and receiving radiation signals to and from the sensor by either positioning an optical fiber adjacent the sensor or by containing one or more waveguides.
摘要翻译：在至少一个实施例中，本发明是具有位于壳体内的温度敏感材料的温度传感器。壳体具有第一部分和第二部分，它们通过非粘结粘合在一起。非粘合键是原子键，例如扩散键。温度敏感材料能够发射随材料温度变化而变化的辐射信号的大小和特性。外壳允许通过外壳将辐射信号传输到外部处理器。由处理器分析发射的辐射信号可以提供温度测量。感温材料是磷光体，例如磷光体。外壳可以由可扩散粘合的材料制成，这种材料包括含硅材料，玻璃，塑料，蓝宝石和石英。扩散接合密封外壳，从而防止温度敏感材料暴露于周围环境。传感器可以包括连接到外壳的杆。杆能够通过定位邻近传感器的光纤或者通过容纳一个或多个波导来传输和接收来自传感器的辐射信号。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式