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    • 12. 发明申请
    • MEMS SWITCH
    • MEMS开关
    • US20110297519A1
    • 2011-12-08
    • US13209769
    • 2011-08-15
    • Sung-Hui HUANGPo-Wen Hsiao
    • Sung-Hui HUANGPo-Wen Hsiao
    • H01H57/00
    • H01H59/0009
    • A micro electro-mechanical system (MEMS) switch includes an active device, an immovable metal layer and a movable metal layer is provided. The immovable metal layer is disposed on the active device and the movable metal layer is disposed above the immovable metal layer. Accordingly, an insulating cavity is formed between the immovable metal layer and the movable metal layer. Further, the active device is capable of driving the movable metal layer. Compare to thin film transistor, since the operation performance of the MEMS switches would not affected by carrier mobility and on-off current ratio, display performance of the display device can be easily improved.
    • 微机电系统(MEMS)开关包括有源器件,不可移动金属层和可移动金属层。 不动金属层设置在有源器件上,并且可移动金属层设置在不可移动金属层上方。 因此,在不可移动金属层和可动金属层之间形成绝缘腔。 此外,有源器件能够驱动可移动金属层。 与薄膜晶体管相比,由于MEMS开关的操作性能不受载流子迁移率和开关电流比的影响,因此可以容易地提高显示装置的显示性能。
    • 13. 发明申请
    • MEMS Array Substrate and Display Device Using the same
    • MEMS阵列基板和显示装置
    • US20110007379A1
    • 2011-01-13
    • US12556671
    • 2009-09-10
    • Sung-Hui HUANGPo-Wen Hsiao
    • Sung-Hui HUANGPo-Wen Hsiao
    • G02B26/00H01H57/00
    • H01H59/0009
    • A micro electromechanical system (MEMS) array substrate includes a substrate, a plurality of first signal lines, a plurality of second signal lines, a plurality of MEMS switches and a plurality of pixel electrodes. The first signal lines are disposed on the substrate in parallel with one another as well as the second signal lines. The second signal lines intersect with the first signal lines, such that a plurality of pixel regions is defined on the substrate. Each MEMS switch is located at corresponding one of the intersections between the first signal lines and the second signal lines. Each pixel electrode is configured in corresponding one of the pixel regions and electrically connected with the corresponding MEMS switch Compare to thin film transistor, since the operation performance of the MEMS switches would not affected by carrier mobility and on-off current ratio, display performance of the display device can be easily improved. In addition, a display device using the MEMS array substrate is also provided.
    • 微机电系统(MEMS)阵列基板包括基板,多个第一信号线,多个第二信号线,多个MEMS开关和多个像素电极。 第一信号线彼此平行地设置在基板上,以及第二信号线。 第二信号线与第一信号线相交,使得在基板上限定多个像素区域。 每个MEMS开关位于第一信号线和第二信号线之间的相交处的相应一个处。 每个像素电极被配置在相应的一个像素区域中并与相应的MEMS开关电连接,与薄膜晶体管相比较,由于MEMS开关的操作性能不受载流子迁移率和开 - 关电流比的影响,显示性能 可以容易地改善显示装置。 此外,还提供了使用MEMS阵列基板的显示装置。