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11. 发明授权

US07727055B2 Flexible membrane for carrier head 有权
标题翻译：用于载体头的柔性膜
公开(公告)号：US07727055B2
公开(公告)日：2010-06-01
申请号：US11741692
申请日：2007-04-27
申请人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
发明人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
IPC分类号： B24B5/35
CPC分类号： B24B37/30 , Y10T428/24174 , Y10T428/24182
摘要： A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. The flexible membrane has a main portion and an outer annular portion, wherein a junction between the main portion and the outer annular portion comprises a peripheral edge hinge and an annular recess above the hinge along the outer wall of the outer annular portion.
摘要翻译：描述了具有基座组件，保持环组件，载体环和柔性膜的承载头。柔性膜具有主要部分和外部环形部分，其中主要部分和外部环形部分之间的接合处包括周边边缘铰链和沿着外部环形部分的外壁的铰链上方的环形凹部。

12. 发明授权

US08021215B2 Carrier head with retaining ring and carrier ring 有权
标题翻译：带保护环和承载环的承载头
公开(公告)号：US08021215B2
公开(公告)日：2011-09-20
申请号：US12698009
申请日：2010-02-01
申请人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
发明人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
IPC分类号： B24B41/06
CPC分类号： B24B37/32 , B24B37/30
摘要： A carrier head that has a housing, a base assembly, a retaining ring, a carrier ring, and a flexible membrane is described. The base assembly is vertically movable relative to the housing. The retaining ring is connected to and vertically movable relative to the base assembly and has a lower surface configured to contact a polishing pad and an inner surface configured to circumferentially surround the edge of a substrate to retain the substrate. The carrier ring is connected to and vertically fixed relative to the base assembly, circumferentially surrounds the retaining ring to prevent lateral motion of the retaining ring, and has a bottom surface configured to contact a polishing pad.
摘要翻译：描述了具有壳体，基座组件，保持环，载体环和柔性膜的承载头。基座组件相对于外壳可垂直移动。保持环相对于基座组件连接并且可垂直移动，并且具有被配置为接触抛光垫的下表面和被配置为周向围绕衬底的边缘以保持衬底的内表面。承载环相对于基座组件连接并且垂直固定，周向地包围保持环以防止保持环的横向运动，并且具有构造成接触抛光垫的底表面。

13. 发明授权

US07901273B2 Carrier ring for carrier head 有权
标题翻译：承载头用于承载头
公开(公告)号：US07901273B2
公开(公告)日：2011-03-08
申请号：US12698912
申请日：2010-02-02
申请人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
发明人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
IPC分类号： B24B21/18
CPC分类号： B24B37/32
摘要： A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. A carrier ring has an annular upper portion and an annular lower portion having a lower surface with a smaller inner diameter than the upper surface of the annular upper portion, wherein the carrier ring circumferentially surrounds a retaining ring and has a lower surface to contact a polishing pad.
摘要翻译：描述了具有基座组件，保持环组件，载体环和柔性膜的承载头。承载环具有环形上部和环形下部，其具有比环形上部的上表面更小的内径的下表面，其中承载环周向地包围保持环并且具有接触抛光的下表面垫。

14. 发明申请

US20110212672A1 Flexible Membrane for Carrier Head 有权
标题翻译：用于载体头的柔性膜
公开(公告)号：US20110212672A1
公开(公告)日：2011-09-01
申请号：US13104711
申请日：2011-05-10
申请人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
发明人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
IPC分类号： B24D11/00
CPC分类号： B24B37/30 , Y10T428/24174 , Y10T428/24182
摘要： A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. The flexible membrane has a main portion and an outer annular portion, wherein a junction between the main portion and the outer annular portion comprises a peripheral edge hinge and an annular recess above the hinge along the outer wall of the outer annular portion.
摘要翻译：描述了具有基座组件，保持环组件，载体环和柔性膜的承载头。柔性膜具有主要部分和外部环形部分，其中主要部分和外部环形部分之间的接合处包括周边边缘铰链和沿着外部环形部分的外壁的铰链上方的环形凹部。

15. 发明授权

US07950985B2 Flexible membrane for carrier head 有权
标题翻译：用于载体头的柔性膜
公开(公告)号：US07950985B2
公开(公告)日：2011-05-31
申请号：US12791808
申请日：2010-06-01
申请人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
发明人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
IPC分类号： B24B5/35
CPC分类号： B24B37/30 , Y10T428/24174 , Y10T428/24182
摘要： A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. The flexible membrane has a main portion and an outer annular portion, wherein a junction between the main portion and the outer annular portion comprises a peripheral edge hinge and an annular recess above the hinge along the outer wall of the outer annular portion.
摘要翻译：描述了具有基座组件，保持环组件，载体环和柔性膜的承载头。柔性膜具有主要部分和外部环形部分，其中主要部分和外部环形部分之间的接合处包括周边边缘铰链和沿着外部环形部分的外壁的铰链上方的环形凹部。

16. 发明申请

US20100240287A1 Flexible Membrane for Carrier Head 有权
标题翻译：用于载体头的柔性膜
公开(公告)号：US20100240287A1
公开(公告)日：2010-09-23
申请号：US12791808
申请日：2010-06-01
申请人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
发明人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
IPC分类号： B24B5/35
CPC分类号： B24B37/30 , Y10T428/24174 , Y10T428/24182
摘要： A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. The flexible membrane has a main portion and an outer annular portion, wherein a junction between the main portion and the outer annular portion comprises a peripheral edge hinge and an annular recess above the hinge along the outer wall of the outer annular portion.
摘要翻译：描述了具有基座组件，保持环组件，载体环和柔性膜的承载头。柔性膜具有主要部分和外部环形部分，其中主要部分和外部环形部分之间的接合处包括周边边缘铰链和沿着外部环形部分的外壁的铰链上方的环形凹部。

17. 发明申请

US20080119120A1 CARRIER HEAD WITH RETAINING RING AND CARRIER RING 有权
标题翻译：带保持环和承载环的承载头
公开(公告)号：US20080119120A1
公开(公告)日：2008-05-22
申请号：US11862096
申请日：2007-09-26
申请人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
发明人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
IPC分类号： B24B29/00
CPC分类号： B24B37/32 , B24B37/30
摘要： A carrier head that has a housing, a base assembly, a retaining ring, a carrier ring, and a flexible membrane is described. The base assembly is vertically movable relative to the housing. The retaining ring is connected to and vertically movable relative to the base assembly and has a lower surface configured to contact a polishing pad and an inner surface configured to circumferentially surround the edge of a substrate to retain the substrate. The carrier ring is connected to and vertically fixed relative to the base assembly, circumferentially surrounds the retaining ring to prevent lateral motion of the retaining ring, and has a bottom surface configured to contact a polishing pad.
摘要翻译：描述了具有壳体，基座组件，保持环，载体环和柔性膜的承载头。基座组件相对于外壳可垂直移动。保持环相对于基座组件连接并且可垂直移动，并且具有被配置为接触抛光垫的下表面和被配置为周向围绕衬底的边缘以保持衬底的内表面。承载环相对于基座组件连接并且垂直固定，周向地包围保持环以防止保持环的横向运动，并且具有构造成接触抛光垫的底表面。

18. 发明申请

US20080119119A1 Carrier Ring for Carrier Head 有权
标题翻译：载波头载波环
公开(公告)号：US20080119119A1
公开(公告)日：2008-05-22
申请号：US11741677
申请日：2007-04-27
申请人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
发明人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
IPC分类号： B24B7/20
CPC分类号： B24B37/32
摘要： A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. A carrier ring has an annular upper portion and an annular lower portion having a lower surface with a smaller inner diameter than the upper surface of the annular upper portion, wherein the carrier ring circumferentially surrounds a retaining ring and has a lower surface to contact a polishing pad.
摘要翻译：描述了具有基座组件，保持环组件，载体环和柔性膜的承载头。承载环具有环形上部和环形下部，其具有比环形上部的上表面更小的内径的下表面，其中承载环周向地包围保持环并且具有接触抛光的下表面垫。

19. 发明申请

US20200276686A1 Retainer for Chemical Mechanical Polishing Carrier Head 审中-公开
公开(公告)号：US20200276686A1
公开(公告)日：2020-09-03
申请号：US16799688
申请日：2020-02-24
申请人： Andrew J. Nagengast , Steven M. Zuniga
发明人： Andrew J. Nagengast , Steven M. Zuniga
IPC分类号： B24B37/32
摘要： A carrier head for chemical mechanical polishing includes a base, an actuator, a substrate mounting surface, and a retainer. The retainer includes an inner section and an outer section connected by a flexure. A bottom of the inner section of the retainer provides an inner portion of a lower surface configured to contact a polishing pad. An inner surface of the inner section extends upwardly from an inner edge of the lower surface to circumferentially surround the substrate mounting surface. The inner section of the retainer is positioned to receive a controllable load from the actuator and is vertically movable relative to the base. A bottom of the outer section of the retainer provides an outer portion of the lower surface. The outer section of the retainer is vertically fixed to the base. The inner section of the retainer is vertically movable relative to the outer section of the retainer.

20. 发明授权

US08469776B2 Flexible membrane for carrier head 有权
标题翻译：用于载体头的柔性膜
公开(公告)号：US08469776B2
公开(公告)日：2013-06-25
申请号：US13104711
申请日：2011-05-10
申请人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
发明人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
IPC分类号： B24B5/35
CPC分类号： B24B37/30 , Y10T428/24174 , Y10T428/24182
摘要： A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. The flexible membrane has a main portion and an outer annular portion, wherein a junction between the main portion and the outer annular portion comprises a peripheral edge hinge and an annular recess above the hinge along the outer wall of the outer annular portion.
摘要翻译：描述了具有基座组件，保持环组件，载体环和柔性膜的承载头。柔性膜具有主要部分和外部环形部分，其中主要部分和外部环形部分之间的接合处包括周边边缘铰链和沿着外部环形部分的外壁的铰链上方的环形凹部。

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