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11. 发明申请

US20070138954A1 Semiconductor device and manufacturing method thereof 失效
标题翻译：半导体器件及其制造方法
公开(公告)号：US20070138954A1
公开(公告)日：2007-06-21
申请号：US11702058
申请日：2007-02-05
申请人： Toru Takayama , Junya Maruyama , Yumiko Ohno , Masakazu Murakami , Toshiji Hamatani , Hideaki Kuwabara , Shunpei Yamazaki
发明人： Toru Takayama , Junya Maruyama , Yumiko Ohno , Masakazu Murakami , Toshiji Hamatani , Hideaki Kuwabara , Shunpei Yamazaki
IPC分类号： H05B33/00
CPC分类号： H01L27/3276 , H01L27/12 , H01L27/1214 , H01L27/124 , H01L27/1266 , H01L27/14634 , H01L27/14643 , H01L27/14683 , H01L27/3272 , H01L29/66757 , H01L29/78603 , H01L31/105 , H01L51/0024 , H01L51/003 , H01L51/5212 , H01L51/5253 , H01L2221/68368
摘要： (OBJECT) The object is to provide a lightened semiconductor device and a manufacturing method thereof by pasting a layer to be peeled to various base materials. (MEANS FOR SOLVING THE PROBLEM) In the present invention, a layer to be peeled is formed on a substrate, then a seal substrate provided with an etching stopper film is pasted with a binding material on the layer to be peeled, followed by removing only the seal substrate by etching or polishing. The remaining etching stopper film is functioned as a blocking film. In addition, a magnet sheet may be pasted as a pasting member.
摘要翻译：（目的）本发明的目的是提供一种减轻半导体器件及其制造方法，该方法是将待剥离的层粘贴到各种基材上。（解决问题的手段）在本发明中，在基板上形成被剥离层，然后将具有蚀刻阻挡膜的密封基板上的粘合材料粘贴在被剥离层上，然后仅除去密封衬底通过蚀刻或抛光。剩余的蚀刻阻挡膜用作阻挡膜。此外，可以将磁片作为粘贴部件粘贴。

12. 发明授权

US08629439B2 Light emitting device, method of preparing the same and device for fabricating the same 有权
标题翻译：发光装置及其制备方法及其制造装置
公开(公告)号：US08629439B2
公开(公告)日：2014-01-14
申请号：US11476508
申请日：2006-06-28
申请人： Shunpei Yamazaki , Masaaki Hiroki , Masakazu Murakami , Hideaki Kuwabara
发明人： Shunpei Yamazaki , Masaaki Hiroki , Masakazu Murakami , Hideaki Kuwabara
IPC分类号： H01L29/04
CPC分类号： H01L27/3211 , H01L27/32 , H01L27/322 , H01L27/3246 , H01L27/3258 , H01L51/5228 , H01L51/5234 , H01L51/5253 , H01L51/5281
摘要： A light emitting device having a high definition, a high aperture ratio and a high reliability is provided. The present invention realizes a high definition and a high aperture ratio for a flat panel display of full colors using luminescent colors of red, green and blue without being dependent upon the film formation method and deposition precision of an organic compound layer by forming the laminated sections 21, 22 by means of intentionally and partially overlapping different organic compound layers of adjacent light emitting elements. Moreover, the protective film 32a containing hydrogen is formed and the drawback in the organic compound layer is terminated with hydrogen, thereby realizing the enhancement of the brightness and the reliability.
摘要翻译：提供了具有高清晰度，高开口率和高可靠性的发光器件。本发明利用红色，绿色和蓝色的发光颜色实现全色平板显示器的高清晰度和高开口率，而不依赖于成膜方法和通过形成层叠部分的有机化合物层的沉积精度 21,22通过有意和部分地重叠相邻发光元件的不同有机化合物层。此外，形成含有氢的保护膜32a，并且用氢终止有机化合物层的缺点，从而实现亮度的提高和可靠性。

13. 发明申请

US20050012105A1 Light emitting device and method of manufacturing the same 有权
标题翻译：发光元件及其制造方法
公开(公告)号：US20050012105A1
公开(公告)日：2005-01-20
申请号：US10918419
申请日：2004-08-16
申请人： Shunpei Yamazaki , Masaaki Hiroki , Masakazu Murakami , Hideaki Kuwabara
发明人： Shunpei Yamazaki , Masaaki Hiroki , Masakazu Murakami , Hideaki Kuwabara
IPC分类号： H01L27/32 , H01L51/52 , H01L31/12
CPC分类号： H01L27/3248 , H01L27/3211 , H01L27/3216 , H01L27/322 , H01L27/3246 , H01L27/3272 , H01L27/3276 , H01L27/3279 , H01L51/5212 , H01L51/5228 , H01L51/5253 , H01L2251/5315 , Y10S257/929
摘要： To provide a light emitting device high in reliability with a pixel portion having high definition with a large screen. According to a light emitting device of the present invention, on an insulator (24) provided between pixel electrodes, an auxiliary electrode (21) made of a metal film is formed, whereby a conductive layer (20) made of a transparent conductive film in contact with the auxiliary electrode can be made low in resistance and thin. Also, the auxiliary electrode (21) is used to achieve connection with an electrode on a lower layer, whereby the electrode can be led out with the transparent conductive film formed on an EL layer. Further, a protective film (32) made of a film containing hydrogen and a silicon nitride film which are laminated is formed, whereby high reliability can be achieved.
摘要翻译：通过大屏幕提供具有高清晰度的像素部分的可靠性高的发光装置。根据本发明的发光器件，在设置在像素电极之间的绝缘体（24）上形成由金属膜构成的辅助电极（21），由此形成由透明导电膜形成的导电层（20）与辅助电极接触可以使电阻较小，薄。此外，辅助电极（21）用于实现与下层电极的连接，由此可以用形成在EL层上的透明导电膜将电极引出。此外，形成由层压的含有氢的膜和氮化硅膜构成的保护膜（32），由此可以实现高可靠性。

14. 发明授权

US08168483B2 Manufacturing method for light emitting device 有权
标题翻译：发光装置的制造方法
公开(公告)号：US08168483B2
公开(公告)日：2012-05-01
申请号：US13108128
申请日：2011-05-16
申请人： Shunpei Yamazaki , Hideaki Kuwabara , Masakazu Murakami
发明人： Shunpei Yamazaki , Hideaki Kuwabara , Masakazu Murakami
IPC分类号： H01L21/84
CPC分类号： H01L51/56 , C23C14/046 , C23C14/12 , C23C14/246 , C23C14/564 , H01L27/3244 , H01L33/44
摘要： The present invention provides a vapor deposition method and a vapor deposition system of film formation systems by which EL materials can be used more efficiently and EL materials having superior uniformity with high throughput rate are formed. According to the present invention, inside a film formation chamber, an evaporation source holder in a rectangular shape in which a plurality of containers sealing evaporation material is moved at a certain pitch to a substrate and the evaporation material is vapor deposited on the substrate. Further, a longitudinal direction of an evaporation source holder in a rectangular shape may be oblique to one side of a substrate, while the evaporation source holder is being moved. Furthermore, it is preferable that a movement direction of an evaporation source holder during vapor deposition be different from a scanning direction of a laser beam while a TFT is formed.
摘要翻译：本发明提供一种可以更有效地使用EL材料的成膜系统的气相沉积方法和气相沉积系统，并且形成具有高生产率的均匀性优异的EL材料。根据本发明，在成膜室内部，将密封蒸发材料的多个容器以一定间距移动到基板上的矩形状的蒸发源保持器和蒸发材料蒸镀在基板上。此外，蒸发源保持器的纵向方向可以在基板的一侧倾斜，同时蒸发源保持器被移动。此外，优选的是，蒸镀源夹持器在气相沉积期间的移动方向与形成TFT的激光束的扫描方向不同。

15. 发明授权

US08089066B2 Light emitting device 有权
标题翻译：发光装置
公开(公告)号：US08089066B2
公开(公告)日：2012-01-03
申请号：US12724475
申请日：2010-03-16
申请人： Shunpei Yamazaki , Masaaki Hiroki , Masakazu Murakami , Hideaki Kuwabara
发明人： Shunpei Yamazaki , Masaaki Hiroki , Masakazu Murakami , Hideaki Kuwabara
IPC分类号： H01L29/08
CPC分类号： H01L27/3248 , H01L27/3211 , H01L27/3216 , H01L27/322 , H01L27/3246 , H01L27/3272 , H01L27/3276 , H01L27/3279 , H01L51/5212 , H01L51/5228 , H01L51/5253 , H01L2251/5315 , Y10S257/929
摘要： To provide a light emitting device high in reliability with a pixel portion having high definition with a large screen. According to a light emitting device of the present invention, on an insulator (24) provided between pixel electrodes, an auxiliary electrode (21) made of a metal film is formed, whereby a conductive layer (20) made of a transparent conductive film in contact with the auxiliary electrode can be made low in resistance and thin. Also, the auxiliary electrode (21) is used to achieve connection with an electrode on a lower layer, whereby the electrode can be led out with the transparent conductive film formed on an EL layer. Further, a protective film (32) made of a film containing hydrogen and a silicon nitride film which are laminated is formed, whereby high reliability can be achieved.
摘要翻译：通过大屏幕提供具有高清晰度的像素部分的可靠性高的发光装置。根据本发明的发光器件，在设置在像素电极之间的绝缘体（24）上形成由金属膜构成的辅助电极（21），由此形成由透明导电膜形成的导电层（20）与辅助电极接触可以使电阻较小，薄。此外，辅助电极（21）用于实现与下层电极的连接，由此可以用形成在EL层上的透明导电膜将电极引出。此外，形成由层压的含有氢的膜和氮化硅膜构成的保护膜（32），由此可以实现高可靠性。

16. 发明申请

US20110217802A1 Fabrication System and Manufacturing Method of Light Emitting Device 有权
标题翻译：发光装置制造系统及制造方法
公开(公告)号：US20110217802A1
公开(公告)日：2011-09-08
申请号：US13108128
申请日：2011-05-16
申请人： Shunpei Yamazaki , Hideaki Kuwabara , Masakazu Murakami
发明人： Shunpei Yamazaki , Hideaki Kuwabara , Masakazu Murakami
IPC分类号： H01L33/36 , C23C16/04
CPC分类号： H01L51/56 , C23C14/046 , C23C14/12 , C23C14/246 , C23C14/564 , H01L27/3244 , H01L33/44
摘要： The present invention provides a vapor deposition method and a vapor deposition system of film formation systems by which EL materials can be used more efficiently and EL materials having superior uniformity with high throughput rate are formed. According to the present invention, inside a film formation chamber, an evaporation source holder in a rectangular shape in which a plurality of containers sealing evaporation material is moved at a certain pitch to a substrate and the evaporation material is vapor deposited on the substrate. Further, a longitudinal direction of an evaporation source holder in a rectangular shape may be oblique to one side of a substrate, while the evaporation source holder is being moved. Furthermore, it is preferable that a movement direction of an evaporation source holder during vapor deposition be different from a scanning direction of a laser beam while a TFT is formed.
摘要翻译：本发明提供一种可以更有效地使用EL材料的成膜系统的气相沉积方法和气相沉积系统，并且形成具有高生产率的均匀性优异的EL材料。根据本发明，在成膜室内部，将密封蒸发材料的多个容器以一定间距移动到基板上的矩形状的蒸发源保持器和蒸发材料蒸镀在基板上。此外，蒸发源保持器的纵向方向可以在基板的一侧倾斜，同时蒸发源保持器被移动。此外，优选的是，蒸镀源夹持器在气相沉积期间的移动方向与形成TFT的激光束的扫描方向不同。

17. 发明申请

US20080057602A1 Fabrication System and Manufacturing Method of Light-Emitting Device 有权
标题翻译：发光装置的制造系统和制造方法
公开(公告)号：US20080057602A1
公开(公告)日：2008-03-06
申请号：US11876968
申请日：2007-10-23
申请人： Shunpei Yamazaki , Hideaki Kuwabara , Masakazu Murakami
发明人： Shunpei Yamazaki , Hideaki Kuwabara , Masakazu Murakami
IPC分类号： H01L21/00
CPC分类号： H01L51/56 , C23C14/046 , C23C14/12 , C23C14/246 , C23C14/564 , H01L27/3244 , H01L33/44
摘要： The present invention provides a vapor deposition method and a vapor deposition system of film formation systems by which EL materials can be used more efficiently and EL materials having superior uniformity with high throughput rate are formed. According to the present invention, inside a film formation chamber, an evaporation source holder in a rectangular shape in which a plurality of containers sealing evaporation material is moved at a certain pitch to a substrate and the evaporation material is vapor deposited on the substrate. Further, a longitudinal direction of an evaporation source holder in a rectangular shape may be oblique to one side of a substrate, while the evaporation source holder is being moved. Furthermore, it is preferable that a movement direction of an evaporation source holder during vapor deposition be different from a scanning direction of a laser beam while a TFT is formed.
摘要翻译：本发明提供一种可以更有效地使用EL材料的成膜系统的气相沉积方法和气相沉积系统，并且形成具有高生产率的均匀性优异的EL材料。根据本发明，在成膜室内部，将密封蒸发材料的多个容器以一定间距移动到基板上的矩形状的蒸发源保持器和蒸发材料蒸镀在基板上。此外，蒸发源保持器的纵向方向可以在基板的一侧倾斜，同时蒸发源保持器被移动。此外，优选的是，蒸镀源夹持器在气相沉积期间的移动方向与形成TFT的激光束的扫描方向不同。

18. 发明申请

US20060243989A1 Light emitting device, method of preparing the same and device for fabricating the same 有权
标题翻译：发光装置及其制备方法及其制造装置
公开(公告)号：US20060243989A1
公开(公告)日：2006-11-02
申请号：US11476508
申请日：2006-06-28
申请人： Shunpei Yamazaki , Masaaki Hiroki , Masakazu Murakami , Hideaki Kuwabara
发明人： Shunpei Yamazaki , Masaaki Hiroki , Masakazu Murakami , Hideaki Kuwabara
IPC分类号： H01L33/00
CPC分类号： H01L27/3211 , H01L27/32 , H01L27/322 , H01L27/3246 , H01L27/3258 , H01L51/5228 , H01L51/5234 , H01L51/5253 , H01L51/5281
摘要： A light emitting device having a high definition, a high aperture ratio and a high reliability is provided. The present invention realizes a high definition and a high aperture ratio for a flat panel display of full colors using luminescent colors of red, green and blue without being dependent upon the film formation method and deposition precision of an organic compound layer by forming the laminated sections 21, 22 by means of intentionally and partially overlapping different organic compound layers of adjacent light emitting elements. Moreover, the protective film 32a containing hydrogen is formed and the drawback in the organic compound layer is terminated with hydrogen, thereby realizing the enhancement of the brightness and the reliability.
摘要翻译：提供了具有高清晰度，高开口率和高可靠性的发光器件。本发明利用红色，绿色和蓝色的发光颜色实现全色平板显示器的高清晰度和高开口率，而不依赖于成膜方法和通过形成层叠部分的有机化合物层的沉积精度 21,22通过有意和部分地重叠相邻发光元件的不同有机化合物层。此外，形成含有氢的保护膜32a，并且有机化合物层中的缺点用氢终止，从而实现亮度的提高和可靠性。

19. 发明授权

US07098069B2 Light emitting device, method of preparing the same and device for fabricating the same 有权
公开(公告)号：US07098069B2
公开(公告)日：2006-08-29
申请号：US10349750
申请日：2003-01-22
申请人： Shunpei Yamazaki , Masaaki Hiroki , Masakazu Murakami , Hideaki Kuwabara
发明人： Shunpei Yamazaki , Masaaki Hiroki , Masakazu Murakami , Hideaki Kuwabara
IPC分类号： H01L51/40
CPC分类号： H01L27/3211 , H01L27/32 , H01L27/322 , H01L27/3246 , H01L27/3258 , H01L51/5228 , H01L51/5234 , H01L51/5253 , H01L51/5281
摘要： A light emitting device having a high definition, a high aperture ratio and a high reliability is provided. The present invention realizes a high definition and a high aperture ratio for a flat panel display of full colors using luminescent colors of red, green and blue without being dependent upon the film formation method and deposition precision of an organic compound layer by forming the laminated sections 21, 22 by means of intentionally and partially overlapping different organic compound layers of adjacent light emitting elements. Moreover, the protective film 32a containing hydrogen is formed and the drawback in the organic compound layer is terminated with hydrogen, thereby realizing the enhancement of the brightness and the reliability.

20. 发明授权

US06781162B2 Light emitting device and method of manufacturing the same 有权
标题翻译：发光元件及其制造方法
公开(公告)号：US06781162B2
公开(公告)日：2004-08-24
申请号：US10349738
申请日：2003-01-23
申请人： Shunpei Yamazaki , Masaaki Hiroki , Masakazu Murakami , Hideaki Kuwabara
发明人： Shunpei Yamazaki , Masaaki Hiroki , Masakazu Murakami , Hideaki Kuwabara
IPC分类号： H01L310328
CPC分类号： H01L27/3248 , H01L27/3211 , H01L27/3216 , H01L27/322 , H01L27/3246 , H01L27/3272 , H01L27/3276 , H01L27/3279 , H01L51/5212 , H01L51/5228 , H01L51/5253 , H01L2251/5315 , Y10S257/929
摘要： To provide a light emitting device high in reliability with a pixel portion having high definition with a large screen. According to a light emitting device of the present invention, on an insulator (24) provided between pixel electrodes, an auxiliary electrode (21) made of a metal film is formed, whereby a conductive layer (20) made of a transparent conductive film in contact with the auxiliary electrode can be made low in resistance and thin. Also, the auxiliary electrode (21) is used to achieve connection with an electrode on a lower layer, whereby the electrode can be led out with the transparent conductive film formed on an EL layer. Further, a protective film (32) made of a film containing hydrogen and a silicon nitride film which are laminated is formed, whereby high reliability can be achieved.
摘要翻译：通过大屏幕提供具有高清晰度的像素部分的可靠性高的发光装置。根据本发明的发光器件，在设置在像素电极之间的绝缘体（24）上形成由金属膜构成的辅助电极（21），由此形成由透明导电膜形成的导电层（20）与辅助电极接触可以使电阻较小，薄。此外，辅助电极（21）用于实现与下层电极的连接，由此可以用形成在EL层上的透明导电膜将电极引出。此外，形成由层压的含有氢的膜和氮化硅膜构成的保护膜（32），由此可以实现高可靠性。

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