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    • 12. 发明授权
    • Optical device having modified transmission characteristics by localized thermal treatment
    • 通过局部热处理具有改进的传输特性的光学装置
    • US06442311B1
    • 2002-08-27
    • US09350205
    • 1999-07-09
    • Giovanni BarbarossaChellappan Narayanan
    • Giovanni BarbarossaChellappan Narayanan
    • G02B634
    • G02B6/13G02B6/105G02B2006/12171
    • Transmission characteristics of an optical device 200, fabricated from multiple layers 16, 27, 28 of silica-based glass on a silicon substrate 26, are modified by localized thermal treatment. The beam 501 of a carbon-dioxide (CO2) laser 510 is used to selectively soften the core and/or cladding material of a waveguide structure during or after the fabrication process. In one application, softening relieves the strain developed between the waveguide structure and the silicon substrate and substantially reduces or eliminates birefringence. In a second application, the CO2 laser is operated at another power level in order to modify the index of refraction. Changes in the index of refraction change the speed of light through a waveguide thereby changing the phase shift associated with the waveguide. In a third application, the CO2 laser is operated at yet another power level to increase the transmission loss of the waveguide. In all of the embodiments, heat treatment is substantially faster and/or less expensive than known techniques for modifying the transmission characteristics of an optical device.
    • 通过局部热处理改变在硅衬底26上由二氧化硅基玻璃的多层16,27,28制成的光学器件200的透射特性。 二氧化碳(CO2)激光器510的光束501用于在制造过程中或之后选择性地软化波导结构的芯和/或包层材料。 在一个应用中,软化消除了在波导结构和硅衬底之间产生的应变,并且基本上减少或消除了双折射。 在第二个应用中,CO2激光器在另一个功率电平下工作,以便改变折射率。 折射率的变化通过波导改变光的速度,从而改变与波导相关的相移。 在第三个应用中,CO2激光器在另一功率电平下操作以增加波导的传输损耗。 在所有实施例中,热处理比用于修改光学器件的传输特性的已知技术快得多和/或更便宜。