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11. 发明授权

US07478347B2 Semiconductor manufacturing apparatus, management apparatus therefor, component management apparatus therefor, and semiconductor wafer storage vessel transport apparatus 失效
标题翻译：半导体制造装置，其管理装置，其部件管理装置和半导体晶片储存容器输送装置
公开(公告)号：US07478347B2
公开(公告)日：2009-01-13
申请号：US11404754
申请日：2006-04-17
申请人： Hiromi Yajima , Tatsumi Suganuma , Noriaki Yoshikawa , Tadashi Yotsumoto , Kenji Nakata
发明人： Hiromi Yajima , Tatsumi Suganuma , Noriaki Yoshikawa , Tadashi Yotsumoto , Kenji Nakata
IPC分类号： G06F17/50 , G06F19/00 , G06F11/30
CPC分类号： G05B19/4065 , G05B2219/37253 , Y02P90/86
摘要： A semiconductor manufacturing apparatus having a plurality of portions according to this invention includes a storage device which stores, for each portion, information representing the lapsed time of use or the product processing count till occurrence of a failure after installation of the portion, and a calculation device which receives the information stored in the storage device and outputs function information representing a failure probability and/or failure rate as a function of the lapsed time of use or the product processing count for each portion.
摘要翻译：根据本发明的具有多个部分的半导体制造装置包括：存储装置，其针对每个部分存储表示经过的使用时间或产品处理计数的信息，直到安装该部分之后的故障发生，并且计算装置，其接收存储在存储装置中的信息，并且输出表示故障概率和/或故障率的功能信息，作为每个部分的使用时间或产品处理计数的函数。

12. 发明申请

US20050220575A1 Vacuum processing apparatus and vacuum processing method 有权
标题翻译：真空加工设备和真空加工方法
公开(公告)号：US20050220575A1
公开(公告)日：2005-10-06
申请号：US10874241
申请日：2004-06-24
申请人： Takeshi Oono , Kenji Nakata , Shoji Okiguchi , Tooru Ueno , Hidehiro Oomae , Shigeharu Minami , Yoshitaka Kai
发明人： Takeshi Oono , Kenji Nakata , Shoji Okiguchi , Tooru Ueno , Hidehiro Oomae , Shigeharu Minami , Yoshitaka Kai
IPC分类号： H01L21/3065 , B65G1/00 , H01L21/00 , H01L21/677 , H01L21/68
CPC分类号： H01L21/67167 , H01L21/67745 , Y10S414/136
摘要： The invention provides a vacuum processing apparatus and vacuum processing method capable of improving the yield factor of a product. A vacuum processing apparatus 1 comprises a plurality of vacuum processing chambers 7 for providing vacuum processing to a sample 2, a vacuum carriage means 8 for carrying a sample into and out of the vacuum processing chamber 7, a switchable chamber 9 capable of being switched between atmosphere and vacuum for carrying a sample into and out of the vacuum processing chamber, a cassette supporting means 10 for supporting a plurality of cassettes housing samples, a carriage means 4 capable of moving vertically for taking out a sample from a given cassette on the cassette supporting means, and a control means performing carriage control for carrying the sample in the given cassette via the carriage means, the switchable chamber and the vacuum carriage means into the vacuum processing chamber and for carrying the processed sample out of the vacuum processing chamber, wherein the apparatus is further equipped with a waiting cassette supporting means for supporting a waiting cassette 5 capable of preventing the processed samples and the unprocessed samples from being mixed in a single cassette.
摘要翻译：本发明提供能够提高产品的成品率的真空处理装置和真空处理方法。真空处理装置1包括用于向样品2提供真空处理的多个真空处理室7，用于将样品进出真空处理室7的真空载置装置8，可切换室9 用于将样品携带到真空处理室中的气体和真空;用于支撑容纳样品的多个盒的盒支撑装置10;能够垂直移动的托架装置4，用于从盒上的给定盒带取出样品支撑装置，以及执行托架控制的控制装置，用于将经由所述托架装置，所述可切换室和所述真空托架装置的所述样本运送到所述真空处理室中并将所述经处理的样品运送出所述真空处理室，该装置还配备有用于支撑等待盒式磁带5插头的等待盒支持装置防止处理的样品和未处理的样品在单个盒中混合。

13. 发明申请

US20050108577A1 Remote diagnostic system for facilities and remote diagnostic method 审中-公开
标题翻译：远程诊断系统的设施和远程诊断方法
公开(公告)号：US20050108577A1
公开(公告)日：2005-05-19
申请号：US11003472
申请日：2004-12-06
申请人： Kouji Nishihata , Kenji Nakata , Shoji Ikuhara , Hideyuki Yamamoto , Hideaki Kondo
发明人： Kouji Nishihata , Kenji Nakata , Shoji Ikuhara , Hideyuki Yamamoto , Hideaki Kondo
IPC分类号： G06F13/00 , G06F21/00 , H01L21/00 , H01L21/02 , H04M11/00 , H04Q9/00 , H04L9/00
CPC分类号： G06F21/6218 , G06F2221/2113
摘要： A remote diagnostic system and method for facilities which carry out a diagnosis on a facilities placed under management of a first company using the diagnostic system of a second company, which is connected to the facilities through a communications network and which is not placed under management of the first company. The facilities include, a storage unit which stores information classified into multiple security levels having different access rights in order to determine the scope of reply in response to an inquiry regarding information on diagnosis of the facilities, and a security level evaluation control unit to assign a new access right in response to the inquiry devoid of access right regarding the diagnosis from the second company in conformance to the degree of the event related to the inquiry.
摘要翻译：一种远程诊断系统和方法，用于对使用第二公司的诊断系统的第一公司管理的设施进行诊断的设施，所述诊断系统通过通信网络连接到所述设施，并且不被管理第一家公司。这些设施包括：存储单元，其存储分类为具有不同访问权限的多个安全级别的信息，以便响应于关于设施的诊断的信息的查询来确定回复的范围;以及安全级别评估控制单元，针对与第二家公司的诊断有关的访问权限的查询符合与查询相关的事件程度的新访问权限。

14. 发明授权

US5580420A Plasma generating method and apparatus and plasma processing method and apparatus 失效
标题翻译：等离子体发生方法及装置及等离子体处理方法及装置
公开(公告)号：US5580420A
公开(公告)日：1996-12-03
申请号：US307272
申请日：1994-09-16
申请人： Katsuya Watanabe , Tetsunori Kaji , Naoyuki Tamura , Kenji Nakata , Hiroyuki Shichida , Seiichi Watanabe , Sadayuki Okudaira , Keizo Suzuki
发明人： Katsuya Watanabe , Tetsunori Kaji , Naoyuki Tamura , Kenji Nakata , Hiroyuki Shichida , Seiichi Watanabe , Sadayuki Okudaira , Keizo Suzuki
IPC分类号： H01J37/32 , H01L21/00
CPC分类号： H01J37/32238 , H01J37/32192 , H01J37/32247 , H01J37/32275 , H01J37/32678
摘要： A microwave penetrating window and a cavity which are substantially equal in diameter to a plasma generating chamber are successively connected to the plasma generating chamber and microwaves are introduced via the cavity into the plasma generating chamber. A processing gas in the plasma generating chamber is converted into a plasma by means of the microwaves introduced into the plasma generating chamber and the microwaves in specific modes are resonated in between a microwave reflective interface with the plasma generated in the plasma generating chamber and the reflective edge face of the cavity. The microwaves in the specific modes are thus formed in the cavity and the energy of the microwaves in the specific modes is increased by resonance. The boosted energy is added to the plasma and the plasma is densified accordingly. Moreover, a plasma excellent in uniformity and stability can be generated by resonating the microwaves in the specific modes in the presence of a uniform electromagnetic field.
摘要翻译：与等离子体发生室直径基本相等的微波穿透窗和空腔连续地连接到等离子体发生室，并且微波经由腔引入等离子体发生室。等离子体发生室中的处理气体通过引入到等离子体发生室中的微波转换为等离子体，并且特定模式中的微波共振在与等离子体发生室中产生的等离子体的微波反射界面和反射空腔的边缘面。因此，特定模式中的微波形成在空腔中，并且特定模式中的微波的能量通过共振增加。将升高的能量加入到等离子体中，并且等离子体相应地致密化。此外，通过在存在均匀电磁场的情况下在特定模式中谐振微波，可以产生均匀性和稳定性优异的等离子体。

15. 发明授权

US07862289B2 Vacuum processing apparatus and vacuum processing method 有权
标题翻译：真空加工设备和真空加工方法
公开(公告)号：US07862289B2
公开(公告)日：2011-01-04
申请号：US12230467
申请日：2008-08-29
申请人： Takeshi Oono , Kenji Nakata , Shoji Okiguchi , Tooru Ueno , Hidehiro Oomae , Shigeharu Minami , Yoshitaka Kai
发明人： Takeshi Oono , Kenji Nakata , Shoji Okiguchi , Tooru Ueno , Hidehiro Oomae , Shigeharu Minami , Yoshitaka Kai
IPC分类号： B65H85/00
CPC分类号： H01L21/67167 , H01L21/67745 , Y10S414/136
摘要： A vacuum processing apparatus and method in which the apparatus includes vacuum processing chambers for subjecting a sample to vacuum processing, a vacuum carriage, a switchable chamber, a cassette support for supporting a plurality of cassettes capable of housing samples, and a waiting cassette support for supporting a waiting cassette that differs from the cassettes supported on the cassette support and capable of having a number of samples. An atmospheric carriage enables carrying a sample among a given cassette of the plurality of cassettes or the waiting cassette. A controller effects control for carrying unprocessed and processed samples among the given cassette, the waiting cassette and the vacuum processing chamber, so that a mixture of both processed and unprocessed samples does not exist in the given cassette or the waiting cassette.
摘要翻译：一种真空处理装置和方法，其中所述装置包括用于对样品进行真空处理的真空处理室，真空支架，可切换室，用于支撑多个能够容纳样品的盒的盒支架，以及用于支持等同的盒子，其与支撑在盒支架上的盒子不同，并且能够具有多个样品。大气托架能够在多个盒子或等待盒中的给定盒中携带样品。控制器执行控制以在给定的盒式磁带，等待盒和真空处理室之间携带未处理和处理的样品，使得处理的和未处理的样品的混合物不存在于给定的盒式磁带或等待盒中。

16. 发明申请

US20090040297A1 Display Apparatus and Display Method 审中-公开
标题翻译：显示装置和显示方法
公开(公告)号：US20090040297A1
公开(公告)日：2009-02-12
申请号：US11991478
申请日：2006-08-30
申请人： Haruo Harada , Shogo Tanaka , Ichiro Enomoto , Teruomi Kuwano , Kenji Nakata , Katsuyuki Maekawa , Yoshihisa Mizuno
发明人： Haruo Harada , Shogo Tanaka , Ichiro Enomoto , Teruomi Kuwano , Kenji Nakata , Katsuyuki Maekawa , Yoshihisa Mizuno
IPC分类号： H04N9/47
CPC分类号： G02F1/133509 , G09G3/003 , G09G3/3648 , G09G2320/028 , G09G2320/0606 , G09G2320/0626 , G09G2320/066 , G09G2320/0666 , G09G2320/0673 , G09G2320/068 , G09G2360/144
摘要： The present invention is an display apparatus including: a display portion 100 that displays individual images IM1 and IM2 on the same screen; and a display control portion 10 that adjusts image quality of the individual images IM1 and IM2 as output conditions thereof to control visible ranges of the individual images IM1 and IM2. According to the present invention, the visible ranges can be changed by adjusting the image quality of the individual images IM1 and IM2. Therefore, it is possible to optimize the visible ranges of the individual images IM1 and IM2, and improve the visibility of the images in a multi-view display without changing the configuration of the display portion 100 composed of the multi-view display.
摘要翻译：本发明是一种显示装置，包括：在同一屏幕上显示各图像IM1和IM2的显示部分100; 以及显示控制部分10，其将各图像IM1和IM2的图像质量调整为其输出条件，以控制各个图像IM1和IM2的可见范围。根据本发明，可以通过调整各图像IM1和IM2的图像质量来改变可见范围。因此，可以优化各个图像IM1和IM2的可见范围，并且可以在不改变由多视点显示器构成的显示部分100的配置的情况下提高多视图显示中的图像的可视性。

17. 发明授权

US07476073B2 Vacuum processing method 有权
标题翻译：真空加工方法
公开(公告)号：US07476073B2
公开(公告)日：2009-01-13
申请号：US10874241
申请日：2004-06-24
申请人： Takeshi Oono , Kenji Nakata , Shoji Okiguchi , Tooru Ueno , Hidehiro Oomae , Shigeharu Minami , Yoshitaka Kai
发明人： Takeshi Oono , Kenji Nakata , Shoji Okiguchi , Tooru Ueno , Hidehiro Oomae , Shigeharu Minami , Yoshitaka Kai
IPC分类号： H01L21/02
CPC分类号： H01L21/67167 , H01L21/67745 , Y10S414/136
摘要： A vacuum processing apparatus and method includes at least one vacuum processing chamber, at least one carriage for carrying the sample from a given cassette into and out of the vacuum processing chamber. A controller performs carriage control for carrying the sample taken out of the given cassette into the vacuum processing chamber, and for carrying the processed sample out of the vacuum processing chamber. A waiting cassette support supports a waiting cassette in which an unprocessed sample from the given cassette or a processed sample from the given cassette after vacuum processing is placed so as to prevent the processed and unprocessed sample from being mixed with each other.
摘要翻译：真空处理装置和方法包括至少一个真空处理室，至少一个托架，用于将来自给定盒的样品运送到真空处理室中。控制器执行托架控制，以将从给定盒取出的样品运送到真空处理室中，并将处理过的样品运送出真空处理室。等待的盒式支架支持等待盒，其中放置了来自给定盒的未处理样品或真空处理后的给定盒的处理样品，以防止处理和未处理的样品彼此混合。

18. 发明申请

US20060190120A1 Semiconductor manufacturing apparatus, management apparatus therefor, component management apparatus therefor, and semiconductor wafer storage vessel transport apparatus 失效
公开(公告)号：US20060190120A1
公开(公告)日：2006-08-24
申请号：US11404754
申请日：2006-04-17
申请人： Hiromi Yajima , Tatsumi Suganuma , Noriaki Yoshikawa , Tadashi Yotsumoto , Kenji Nakata
发明人： Hiromi Yajima , Tatsumi Suganuma , Noriaki Yoshikawa , Tadashi Yotsumoto , Kenji Nakata
IPC分类号： G06F19/00
CPC分类号： G05B19/4065 , G05B2219/37253 , Y02P90/86
摘要： A semiconductor manufacturing apparatus having a plurality of portions according to this invention includes a storage device which stores, for each portion, information representing the lapsed time of use or the product processing count till occurrence of a failure after installation of the portion, and a calculation device which receives the information stored in the storage device and outputs function information representing a failure probability and/or failure rate as a function of the lapsed time of use or the product processing count for each portion.

19. 发明授权

US07065725B2 Semiconductor manufacturing apparatus, management apparatus therefor, component management apparatus therefor, and semiconductor wafer storage vessel transport apparatus 失效
公开(公告)号：US07065725B2
公开(公告)日：2006-06-20
申请号：US10377770
申请日：2003-03-04
申请人： Hiromi Yajima , Tatsumi Suganuma , Noriaki Yoshikawa , Tadashi Yotsumoto , Kenji Nakata
发明人： Hiromi Yajima , Tatsumi Suganuma , Noriaki Yoshikawa , Tadashi Yotsumoto , Kenji Nakata
IPC分类号： G06F17/50 , G06F19/00 , G06F11/30
CPC分类号： G05B19/4065 , G05B2219/37253 , Y02P90/86
摘要： A semiconductor manufacturing apparatus having a plurality of portions according to this invention includes a storage device which stores, for each portion, information representing the lapsed time of use or the product processing count till occurrence of a failure after installation of the portion, and a calculation device which receives the information stored in the storage device and outputs function information representing a failure probability and/or failure rate as a function of the lapsed time of use or the product processing count for each portion.

20. 发明申请

US20050114995A1 Earthquake-proof bed 审中-公开
标题翻译：防震床
公开(公告)号：US20050114995A1
公开(公告)日：2005-06-02
申请号：US10903868
申请日：2004-07-29
申请人： Kenji Nakata , Sanjiro Nakata
发明人： Kenji Nakata , Sanjiro Nakata
IPC分类号： A47C19/00 , A47C19/22 , A47C21/00 , A47C31/00
CPC分类号： A47C31/002 , A47C29/003
摘要： An earthquake-proof bed that (1) has segmentalized components, (2) is easy to handle, and (3) is easily constituted by simple assembly, using connecting parts such as bolts. The bed includes (1) multiple lower frames that are dividable in the longitudinal direction of a bottom-plate of the earthquake-proof bed, (2) multiple side frames that have support beams and that are connected to a floor frame—which is assembled by connecting the lower frames together—at a desired height above the floor, (3) multiple upper frames that are connected to the top-side beams of the side frames arranged at the ceiling portion of a rectangle that is surrounded by the side frames, (4) multiple cambered roof units that are mounted upon and connected with the upper frames, and (5) multiple floor panels arranged on the floor frames.
摘要翻译：（1）具有分段部件的防震床，（2）易于操作，（3）通过简单的组装，使用螺栓等连接部件容易构成。该床包括（1）可在防震床的底板的纵向方向上分割的多个下框架，（2）具有支撑梁并且连接到地板框架的多个侧框架 - 组装通过将下框架连接在一起，在地板上方的期望高度处，（3）连接到布置在由侧框包围的矩形的顶部的侧框架的顶侧梁的多个上框架，（4）安装在上框架上并与上框架连接的多个拱形屋顶单元，以及（5）布置在地板框架上的多个地板镶板。

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