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11. 发明授权

US6086676A Programmable electrical interlock system for a vacuum processing system 失效
标题翻译：用于真空处理系统的可编程电气联锁系统
公开(公告)号：US6086676A
公开(公告)日：2000-07-11
申请号：US893811
申请日：1997-07-11
申请人： Yeh-Jen Kao , Fufa Chen , James Chen
发明人： Yeh-Jen Kao , Fufa Chen , James Chen
IPC分类号： C23C14/54 , C23C14/56 , C23C16/00 , G05B19/00
CPC分类号： C23C14/54 , C23C14/568
摘要： A vacuum processing system is provided with a programmable interlock circuit for combining the interlock signals generated by the system into combined interlock signals. The programmable interlock circuit uses a matrix of switches to select which interlocks will be combined to form which combinations. The interlock signals are formed by two lines that are shorted together when the interlock signal is okay and not shorted together when the interlock signal is not okay. When the two lines are shorted together, then they activate a relay to send a signal in a line of relays, each of which is activated by a different interlock signal. The matrix of switches short out the relay switches in order to deselect one interlock input for one interlock output. Each interlock signal is associated with an LED for visual indication of whether the interlock is okay. Likewise, each combined interlock signal is associated with an LED for visual indication of whether the combination of interlocks is okay. Additionally, each interlock signal is associated with a defeat circuit wherein a jumper may defeat the interlock signal for every combination. Each defeat circuit is provided with an LED for visual indication of whether the interlock is defeated.
摘要翻译：真空处理系统设置有可编程联锁电路，用于将由系统产生的互锁信号组合成组合互锁信号。可编程互锁电路使用开关矩阵来选择哪些联锁将被组合以形成哪些组合。当互锁信号不好时，互锁信号良好并且不短路时，互锁信号由两条短路在一起形成。当两条线路一起短路时，它们启动一个继电器，发送一个继电器的信号，每个继电器由不同的互锁信号激活。开关矩阵使继电器开关短路，以取消选择一个互锁输入的一个互锁输出。每个互锁信号与LED相关联，用于可视指示互锁是否正常。同样地，每个组合互锁信号与LED相关联，用于可视地指示互锁的组合是否可行。此外，每个互锁信号与失败电路相关联，其中跳线可以针对每个组合来击败互锁信号。每个失败电路都配有一个LED，用于指示联锁是否被击败。

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