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    • 15. 发明申请
    • SEMICONDUCTOR DEVICE USING 2-DIMENSIONAL ELECTRON GAS AND 2-DIMENSIONAL HOLE GAS AND METHOD OF MANUFACTURING THE SEMICONDUCTOR DEVICE
    • 使用二维电子气体和二维孔气体的半导体器件及制造半导体器件的方法
    • US20140091310A1
    • 2014-04-03
    • US13860153
    • 2013-04-10
    • SAMSUNG ELECTRONICS CO., LTD.
    • Woo-chul JeonJai-kwang ShinJae-joon Oh
    • H01L29/20
    • H01L29/2003H01L21/8252H01L27/0605H01L27/085H01L29/1066H01L29/41766H01L29/66462H01L29/7781H01L29/7786
    • A semiconductor device includes a first compound semiconductor layer on a substrate, first through third electrodes spaced apart from each other on the first compound semiconductor layer, a second compound semiconductor layer on the first compound semiconductor layer between the first through third electrodes, a third compound semiconductor layer on the second compound semiconductor layer between the first and second electrodes, a first gate electrode on the third compound semiconductor layer, a fourth compound semiconductor layer having a smaller thickness than the third compound semiconductor layer on a portion of the second compound semiconductor layer between the second and third electrodes, and a second gate electrode on the fourth compound semiconductor layer. The first compound semiconductor layer between the second and third electrodes includes a 2-dimensional electron gas (2DEG) and the third compound semiconductor layer includes a 2-dimensional hole gas (2DHG).
    • 半导体器件包括:衬底上的第一化合物半导体层,在第一化合物半导体层上彼此间隔开的第一至第三电极,在第一至第三电极之间的第一化合物半导体层上的第二化合物半导体层,第三化合物 在第一和第二电极之间的第二化合物半导体层上的半导体层,第三化合物半导体层上的第一栅电极,在第二化合物半导体层的一部分上具有比第三化合物半导体层更小的厚度的第四化合物半导体层 在第二和第三电极之间以及在第四化合物半导体层上的第二栅电极。 第二和第三电极之间的第一化合物半导体层包括二维电子气(2DEG),第三化合物半导体层包括二维空穴气体(2DHG)。