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11. 发明授权

US08522612B1 MEMS on-chip inertial navigation system with error correction 有权
标题翻译：具有误差校正的MEMS片上惯性导航系统
公开(公告)号：US08522612B1
公开(公告)日：2013-09-03
申请号：US13410998
申请日：2012-03-02
申请人： Randall L. Kubena
发明人： Randall L. Kubena
IPC分类号： G01C19/00
CPC分类号： G01C19/5684
摘要： An on-chip navigation system, optionally combined with GPS (Global Positioning System) and/or an imaging array, which incorporates MEMS (MicroElectroMechanical Systems) components is possible by the use of careful material selection and novel bonding techniques used during fabrication. The use of MEMS components permits many of the components of a typical inertial navigation system to reside on a single chip. Because the components are in close proximity, the components can then be used to monitor the environmental changes of the chip, such as temperature and vibration, and correct for the resulting offsets of other components. This allows improved system performance even if the individual sensor components are not ideal.
摘要翻译：通过使用仔细的材料选择和在制造期间使用的新型结合技术，可以选择结合使用MEMS（微电子机械系统）部件的GPS（全球定位系统）和/或成像阵列的片上导航系统。使用MEMS组件允许典型惯性导航系统的许多组件驻留在单个芯片上。由于组件非常接近，因此可以使用组件来监视芯片的环境变化，例如温度和振动，并纠正其他组件产生的偏移。这样即使各个传感器组件不理想，也可以提高系统性能。

12. 发明授权

US08402824B1 Frequency locking of resonators for improved temperature control of gyroscopes 有权
标题翻译：谐振器的频率锁定，用于改善陀螺仪的温度控制
公开(公告)号：US08402824B1
公开(公告)日：2013-03-26
申请号：US12636931
申请日：2009-12-14
申请人： Randall L. Kubena
发明人： Randall L. Kubena
IPC分类号： G01C19/56
CPC分类号： G01C19/5783
摘要： A precision gyroscope includes a semiconductor substrate, a gyroscope integrated on the substrate, and a quartz resonator clock integrated on the substrate. In another embodiment the substrate is a quartz substrate.
摘要翻译：精密陀螺仪包括半导体衬底，集成在衬底上的陀螺仪和集成在衬底上的石英谐振器时钟。在另一个实施例中，衬底是石英衬底。

13. 发明申请

US20080034575A1 Large area integration of quartz resonators with electronics 有权
标题翻译：石英谐振器与电子部件的大面积集成
公开(公告)号：US20080034575A1
公开(公告)日：2008-02-14
申请号：US11502336
申请日：2006-08-09
申请人： David T. Chang , Randall L. Kubena
发明人： David T. Chang , Randall L. Kubena
IPC分类号： H04R31/00
CPC分类号： H04R17/00 , H01L2924/0002 , Y10T29/42 , Y10T29/49005 , Y10T29/49007 , Y10T29/4908 , Y10T29/53178 , H01L2924/00
摘要： Methods for integrating quartz-based resonators with electronics on a large area wafer through direct pick-and-place and flip-chip bonding or wafer-to-wafer boding using handle wafers are described. The resulting combination of quartz-based resonators and large area electronics wafer solves the problem of the quartz-electronics substrate diameter mismatch and enables the integration of arrays of quartz devices of different frequencies with the same electronics.
摘要翻译：描述了通过直接拾取和倒装芯片接合或使用处理晶片的晶片到晶片的布局将石英基谐振器与大面积晶片上的电子器件集成的方法。所得到的石英基谐振器和大面积电子晶片的组合解决了石英电子衬底直径不匹配的问题，并且能够将具有不同频率的石英器件的阵列与相同的电子器件集成。

14. 发明授权

US06982185B2 Single crystal, dual wafer, tunneling sensor or switch with silicon on insulator substrate and a method of making same 失效
公开(公告)号：US06982185B2
公开(公告)日：2006-01-03
申请号：US10358471
申请日：2003-02-04
申请人： Randall L. Kubena , David T. Chang
发明人： Randall L. Kubena , David T. Chang
IPC分类号： H01L21/00
CPC分类号： H01H1/0036 , G01P15/0802 , G01P15/0894 , H01H59/0009
摘要： A method of making a micro electro-mechanical switch or tunneling sensor. A cantilevered beam structure and a mating structure are defined on an etch stop layer on a first substrate or wafer; and at least one contact structure and a mating structure are defined on a second substrate or wafer, the mating structure on the second substrate or wafer being of a complementary shape to the mating structure on the first substrate or wafer. A bonding layer, preferably a eutectic bonding layer, is provided on at least one of the mating structures. The mating structure of the first substrate is moved into a confronting relationship with the mating structure of the second substrate or wafer. Pressure is applied between the two substrates so as to cause a bond to occur between the two mating structures at the bonding or eutectic layer. Then the first substrate or wafer and the etch stop layer are removed to free the cantilevered beam structure for movement relative to the second substrate or wafer.

15. 发明授权

US06698287B2 Microgyro tuning using focused ion beams 有权
标题翻译：使用聚焦离子束进行微型调谐
公开(公告)号：US06698287B2
公开(公告)日：2004-03-02
申请号：US10285886
申请日：2002-11-01
申请人： Randall L. Kubena , Richard Joyce , Robert Thomas M'Closkey , A. Dorian Challoner
发明人： Randall L. Kubena , Richard Joyce , Robert Thomas M'Closkey , A. Dorian Challoner
IPC分类号： G01C1900
CPC分类号： G01C19/5719 , G01P2015/084
摘要： The present invention discloses methods of manufacturing mechanical resonator microgyroscopes using focused ion beam machining and the mechanical resonator gyroscopes produced therefrom. An exemplary method of tuning a mechanical resonator gyroscope, includes the steps of mounting a mechanical resonator gyroscope in a vacuum chamber with a controllable focused ion beam where the gyroscope includes exciting and sensing elements for measuring a resonant frequency of the gyroscope. The exciting and sensing elements are activated to measure the resonant frequency of the mechanical resonator gyroscope and the resonant frequency of the gyroscope is adjusted to a desired resonant frequency value by controlling the focused ion beam to remove material of the gyroscope.
摘要翻译：本发明公开了使用聚焦离子束加工和由其制造的机械谐振器陀螺仪制造机械谐振器微型光学器件的方法。调谐机械谐振器陀螺仪的示例性方法包括以下步骤：将机械谐振器陀螺仪安装在具有可控聚焦离子束的真空室中，其中陀螺仪包括用于测量陀螺仪的谐振频率的激励和感测元件。激励和感测元件被激活以测量机械谐振器陀螺仪的谐振频率，并且通过控制聚焦离子束以去除陀螺仪的材料，将陀螺仪的谐振频率调整到期望的谐振频率值。

16. 发明授权

US06238539B1 Method of in-situ displacement/stress control in electroplating 有权
标题翻译：电镀中原位位移/应力控制方法
公开(公告)号：US06238539B1
公开(公告)日：2001-05-29
申请号：US09344729
申请日：1999-06-25
申请人： Richard J. Joyce , Ronghua Wei , Randall L. Kubena , Robert E. Doty
发明人： Richard J. Joyce , Ronghua Wei , Randall L. Kubena , Robert E. Doty
IPC分类号： C25D2112
CPC分类号： C25D21/12
摘要： The dominant physical parameter that affects the internal stress of electroplated metals on substrates have been identified and their effects have been systematically studied. Thin electroplated metals have very high internal stresses, even though the substrate displacements are small. Increasing the electroplated metal's thickness greatly reduces the magnitude of the stress, which can be either tensile or compressive depending on the plating conditions, but it may not necessarily reduce the displacement of the substrate. Based on the research done in connection to this application, the relationship between the plating temperatures and the current density needed to obtain near-zero-stress state for electroplated nickel on silicon substrate can be deduced.
摘要翻译：影响电镀金属对衬底内应力的主要物理参数已被确定，并对其影响进行了系统研究。薄的电镀金属具有非常高的内应力，即使衬底位移较小。增加电镀金属的厚度大大减小了应力的大小，其可以根据电镀条件而拉伸或压缩，但是它可能不一定会降低基板的位移。基于与本申请相关的研究，可以推导出电镀温度与电解镍在硅衬底上获得接近零应力状态所需的电流密度之间的关系。

17. 发明授权

US08176607B1 Method of fabricating quartz resonators 有权
标题翻译：石英谐振器的制造方法
公开(公告)号：US08176607B1
公开(公告)日：2012-05-15
申请号：US12575634
申请日：2009-10-08
申请人： Randall L. Kubena , Tsung-Yuan Hsu
发明人： Randall L. Kubena , Tsung-Yuan Hsu
IPC分类号： H04R17/10 , B21D53/76
CPC分类号： H04R17/00 , Y10T29/42 , Y10T29/49165 , Y10T29/49401
摘要： A method for fabricating VHF and/or UHF quartz resonators (for higher sensitivity) in a cartridges design with the quartz resonators requiring much smaller sample volumes than required by conventional resonators, and also enjoying smaller size and more reliable assembly. MEMS fabrication approaches are used to fabricate with quartz resonators in quartz cavities with electrical interconnects on a top side of a substrate for electrical connection to the electronics preferably through pressure pins in a plastic module. An analyte is exposed to grounded electrodes on a single side of the quartz resonators, thereby preventing electrical coupling of the detector signals through the analyte. The resonators can be mounted on the plastic cartridge or on arrays of plastic cartridges with the use of inert bonding material, die bonding or wafer bonding techniques. This allows the overall size, cost, and required biological sample volume to be reduced while increasing the sensitivity for detecting small mass changes.
摘要翻译：一种用于在墨盒设计中制造VHF和/或UHF石英谐振器（用于更高灵敏度）的方法，其中石英谐振器比常规谐振器要求的样品体积要小得多，并且还具有更小的尺寸和更可靠的组装。 MEMS制造方法用于在石英腔中制造石英谐振器，在基底的顶侧具有电互连，用于通过塑料模块中的压力引脚电连接到电子装置。分析物暴露于石英谐振器单侧的接地电极，从而防止检测器信号通过分析物的电耦合。谐振器可以使用惰性接合材料，管芯接合或晶片接合技术安装在塑料盒或塑料盒阵列上。这允许减小整体尺寸，成本和所需的生物样品体积，同时增加用于检测小质量变化的灵敏度。

18. 发明授权

US07851971B2 Low frequency quartz based MEMS resonators and method of fabricating the same 有权
标题翻译：低频石英MEMS谐振器及其制造方法
公开(公告)号：US07851971B2
公开(公告)日：2010-12-14
申请号：US12577420
申请日：2009-10-12
申请人： David T. Chang , Randall L. Kubena , Frederic P. Stratton , Pamela R. Patterson
发明人： David T. Chang , Randall L. Kubena , Frederic P. Stratton , Pamela R. Patterson
IPC分类号： H01L41/08
CPC分类号： H04R31/00 , H04R19/005 , Y10T29/42 , Y10T29/49005 , Y10T29/4908
摘要： A method for fabricating a low frequency quartz resonator includes metalizing a top-side of a quartz wafer with a metal etch stop, depositing a first metal layer over the metal etch stop, patterning the first metal layer to form a top electrode, bonding the quartz wafer to a silicon handle, thinning the quartz wafer to a desired thickness, depositing on a bottom-side of the quartz wafer a hard etch mask, etching the quartz wafer to form a quartz area for the resonator and to form a via through the quartz wafer, removing the hard etch mask without removing the metal etch stop, forming on the bottom side of the quartz wafer a bottom electrode for the low frequency quartz resonator, depositing metal for a substrate bond pad onto a host substrate wafer, bonding the quartz resonator to the substrate bond pad, and removing the silicon handle.
摘要翻译：一种用于制造低频石英谐振器的方法包括用金属蚀刻停止器将石英晶片的顶侧金属化，在金属蚀刻停止器上沉积第一金属层，图案化第一金属层以形成顶部电极，将石英将晶片细化到硅手柄，将石英晶片细化到所需厚度，在石英晶片的底侧上沉积硬蚀刻掩模，蚀刻石英晶片以形成用于谐振器的石英区域，并通过石英形成通孔晶片，去除硬蚀刻掩模而不去除金属蚀刻停止，在石英晶片的底侧上形成用于低频石英谐振器的底部电极，将用于衬底接合焊盘的金属沉积到主衬底晶片上，将石英谐振器到基板接合焊盘，并且移除硅手柄。

19. 发明授权

US07750535B2 Quartz-based nanoresonator 有权
标题翻译：石英基纳米谐振器
公开(公告)号：US07750535B2
公开(公告)日：2010-07-06
申请号：US11800294
申请日：2007-05-04
申请人： Randall L. Kubena , David T. Chang , Jinsoo Kim
发明人： Randall L. Kubena , David T. Chang , Jinsoo Kim
IPC分类号： H01L41/08 , H03H9/215
CPC分类号： H03H9/19 , H03H3/04 , H03H2003/0414 , H03H2009/241 , Y10T29/42 , Y10T29/49005 , Y10T29/4908 , Y10T29/49128 , Y10T29/49165
摘要： A method for fabricating a quartz nanoresonator which can be integrated on a substrate, along with other electronics is disclosed. In this method a quartz substrate is bonded to a base substrate. The quartz substrate is metallized so that a bias voltage is applied to the resonator, thereby causing the quartz substrate to resonate at resonant frequency greater than 100 MHz. The quartz substrate can then be used to drive other electrical elements with a frequency equal to its resonant frequency. The quartz substrate also contains tuning pads to adjust the resonant frequency of the resonator. Additionally, a method for accurately thinning a quartz substrate of the resonator is provided. The method allows the thickness of the quartz substrate to be monitored while the quartz substrate is simultaneously thinned.
摘要翻译：公开了一种用于制造可集成在基底上的石英纳米谐振器的方法以及其它电子器件。在该方法中，将石英基板接合到基底基板。石英衬底被金属化，使得偏置电压被施加到谐振器，从而使得石英衬底在大于100MHz的谐振频率下谐振。石英衬底然后可用于以等于其谐振频率的频率驱动其它电气元件。石英衬底还包含调谐垫以调节谐振器的谐振频率。此外，提供了一种用于精确稀薄谐振器的石英衬底的方法。该方法允许在石英衬底同时变薄的同时监测石英衬底的厚度。

20. 发明授权

US07237315B2 Method for fabricating a resonator 有权
标题翻译：谐振器的制造方法
公开(公告)号：US07237315B2
公开(公告)日：2007-07-03
申请号：US10426931
申请日：2003-04-30
申请人： Randall L. Kubena , David T. Chang , Jinsoo Kim
发明人： Randall L. Kubena , David T. Chang , Jinsoo Kim
IPC分类号： H04R31/00
CPC分类号： H03H9/19 , H03H3/04 , H03H2003/0414 , H03H2009/241 , Y10T29/42 , Y10T29/49005 , Y10T29/4908 , Y10T29/49128 , Y10T29/49165
摘要： A method for fabricating a quartz nanoresonator which can be integrated on a substrate, along with other electronics is disclosed. In this method a quartz substrate is bonded to a base substrate. The quartz substrate is metallized so that a bias voltage is applied to the resonator, thereby causing the quartz substrate to resonate at resonant frequency greater than 100 MHz. The quartz substrate can then be used to drive other electrical elements with a frequency equal to its resonant frequency. The quartz substrate also contains tuning pads to adjust the resonant frequency of the resonator. Additionally, a method for accurately thinning a quartz substrate of the resonator is provided. The method allows the thickness of the quartz substrate to be monitored while the quartz substrate is simultaneously thinned.
摘要翻译：公开了一种用于制造可集成在基底上的石英纳米谐振器的方法以及其它电子器件。在该方法中，将石英基板接合到基底基板。石英衬底被金属化，使得偏置电压被施加到谐振器，从而使得石英衬底在大于100MHz的谐振频率下谐振。石英衬底然后可用于以等于其谐振频率的频率驱动其它电气元件。石英衬底还包含调谐垫以调节谐振器的谐振频率。此外，提供了一种用于精确稀薄谐振器的石英衬底的方法。该方法允许在石英衬底同时变薄的同时监测石英衬底的厚度。

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